JPS6228430U - - Google Patents
Info
- Publication number
- JPS6228430U JPS6228430U JP11876585U JP11876585U JPS6228430U JP S6228430 U JPS6228430 U JP S6228430U JP 11876585 U JP11876585 U JP 11876585U JP 11876585 U JP11876585 U JP 11876585U JP S6228430 U JPS6228430 U JP S6228430U
- Authority
- JP
- Japan
- Prior art keywords
- quartz chamber
- light
- detected
- end point
- emission spectrum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 238000001312 dry etching Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 238000000295 emission spectrum Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Spectrometry And Color Measurement (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11876585U JPS6228430U (zh) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11876585U JPS6228430U (zh) | 1985-07-31 | 1985-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6228430U true JPS6228430U (zh) | 1987-02-20 |
Family
ID=31005529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11876585U Pending JPS6228430U (zh) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228430U (zh) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63254732A (ja) * | 1987-04-13 | 1988-10-21 | Hitachi Ltd | エッチング終点判定方法 |
| JPH01241127A (ja) * | 1988-03-23 | 1989-09-26 | Hitachi Ltd | エッチング終点判定方法 |
| JPH06229827A (ja) * | 1992-12-23 | 1994-08-19 | Internatl Business Mach Corp <Ibm> | プラズマ・エッチングの終了点検出装置及び方法 |
-
1985
- 1985-07-31 JP JP11876585U patent/JPS6228430U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63254732A (ja) * | 1987-04-13 | 1988-10-21 | Hitachi Ltd | エッチング終点判定方法 |
| JPH01241127A (ja) * | 1988-03-23 | 1989-09-26 | Hitachi Ltd | エッチング終点判定方法 |
| JPH06229827A (ja) * | 1992-12-23 | 1994-08-19 | Internatl Business Mach Corp <Ibm> | プラズマ・エッチングの終了点検出装置及び方法 |
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