JPS6228430U - - Google Patents

Info

Publication number

JPS6228430U

JPS6228430U JP11876585U JP11876585U JPS6228430U JP S6228430 U JPS6228430 U JP S6228430U JP 11876585 U JP11876585 U JP 11876585U JP 11876585 U JP11876585 U JP 11876585U JP S6228430 U JPS6228430 U JP S6228430U

Authority

JP

Japan

Prior art keywords

quartz chamber

light

detected

end point

emission spectrum

Prior art date

1985-07-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010453 quartz Substances 0.000 claims description 5
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
• 238000001514 detection method Methods 0.000 claims description 3
• 238000001312 dry etching Methods 0.000 claims description 3
• 238000005530 etching Methods 0.000 claims description 3
• 238000000295 emission spectrum Methods 0.000 claims 3
• 238000010586 diagram Methods 0.000 description 1

Cited By (3)