JPS52120893A - Apparatus for detecting ph3 - Google Patents

Apparatus for detecting ph3

Info

Publication number
JPS52120893A
JPS52120893A JP3715876A JP3715876A JPS52120893A JP S52120893 A JPS52120893 A JP S52120893A JP 3715876 A JP3715876 A JP 3715876A JP 3715876 A JP3715876 A JP 3715876A JP S52120893 A JPS52120893 A JP S52120893A
Authority
JP
Japan
Prior art keywords
detecting
dopping
measurement
reaction
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3715876A
Other languages
Japanese (ja)
Inventor
Teruaki Motooka
Katsumi Takami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3715876A priority Critical patent/JPS52120893A/en
Publication of JPS52120893A publication Critical patent/JPS52120893A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/76—Chemiluminescence; Bioluminescence
    • G01N21/766—Chemiluminescence; Bioluminescence of gases

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)

Abstract

PURPOSE:To provide an apparatus for detecting PH3, in which PH3 used for, for example, dopping gas is detected for a short time and at a high sensitivity and in an in-processed system by measurement of luminescence emitted by the reaction of PH3 with O2.
JP3715876A 1976-04-05 1976-04-05 Apparatus for detecting ph3 Pending JPS52120893A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3715876A JPS52120893A (en) 1976-04-05 1976-04-05 Apparatus for detecting ph3

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3715876A JPS52120893A (en) 1976-04-05 1976-04-05 Apparatus for detecting ph3

Publications (1)

Publication Number Publication Date
JPS52120893A true JPS52120893A (en) 1977-10-11

Family

ID=12489782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3715876A Pending JPS52120893A (en) 1976-04-05 1976-04-05 Apparatus for detecting ph3

Country Status (1)

Country Link
JP (1) JPS52120893A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0053527A1 (en) * 1980-11-27 1982-06-09 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method and device for the direct continuous analysis of traces of arsine
FR2506459A1 (en) * 1981-05-25 1982-11-26 Air Liquide METHOD AND APPARATUS FOR DIRECT AND CONTINUOUS ANALYSIS OF TRACES OF GASEOUS HYDRIDES

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0053527A1 (en) * 1980-11-27 1982-06-09 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method and device for the direct continuous analysis of traces of arsine
FR2506459A1 (en) * 1981-05-25 1982-11-26 Air Liquide METHOD AND APPARATUS FOR DIRECT AND CONTINUOUS ANALYSIS OF TRACES OF GASEOUS HYDRIDES

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