JPS62280720A - Manufacture of liquid crystal display device - Google Patents

Abstract

PURPOSE:To obtain uniform orientation with a large tilt angle by applying high polymer resin over a substrate, lifting off this high polymer resin, and further performing a rubbing treatment. CONSTITUTION:A pattern 2 of <=1mum pitch is formed on a substrate 1 by using resist, the high polymer resin is applied over the surface of the substrate, and then a high polymer resin film 3 is formed by a heat treatment. Then, the resist is peeled off by using resist separating liquid and then the high polymer resin film is peeled off, thereby forming fine projections and recesses on the surface of the substrate. Then, the surface of the substrate is rubbed in a constant direction with cloth, etc., to grind the projections and recesses more on one-directional sides than on the other-directional dies, so the shape of the projections and recesses has directivity, but the shape and density of the projections and recesses are determined by the total pressure of the rubbing treatment and the pattern pitch. Consequently, liquid crystal molecules 4 are oriented stably in a constant direction at a pretilt angle theta.

Description

[Detailed Description of the Invention] 3. Detailed Description of the Invention [Field of Industrial Application] The present invention provides a method for manufacturing a liquid crystal display device! ! # relates to a method for forming an alignment layer.

[Conventional technology]

As a conventional method for forming an alignment layer of a liquid crystal display device, Bi
Inclined deposition method of b, ku, etc. (Japanese Patent Application Laid-open No. 17746/1983)
, or after applying polyimide polymer resin on the substrate,
Rub in a certain direction with cloth etc. (Japanese Patent Application Laid-Open No. 55-1435
No. 25) etc.

[Problem that the invention seeks to solve]

However, although the tilted deposition method of spinning is very advantageous in giving a predetermined pretilt angle to the liquid crystal, on the other hand, since it is a vacuum deposition method, a high vacuum h of about 10-' Toff is required.
In addition, since the substrate must be tilted, it has the disadvantage of poor mass production.

Furthermore, in the rubbing method, it is difficult to freely set the pretilt angle of the liquid crystal, and especially to finely adjust the pretilt angle.

The present invention is intended to solve these problems, and its purpose is to provide uniform orientation with a large tilt angle.

[Ninth way to solve the problem]

The method for manufacturing a liquid crystal display device according to the present invention includes a process for forming an alignment layer of a substrate, a process for coating a polymer resin on the substrate, a process for removing the polymer resin, and a process for forming the surface of the polymer resin. It is characterized by a type of work that involves rubbing in a certain direction with cloth, etc.

Furthermore, the type of work for removing the polymer resin is 1 μm.
It is characterized in that a pattern with a pitch of m or less is formed by a 7-to-7 method.

[Effect]

The operation of the present invention will be explained based on FIG. A pattern 2 with a pitch of 1 μm or less is formed on the substrate 1 using a resist (Fig. 1). Next, a polymer resin is applied to the surface of the substrate, and after that, a polymer resin coating 3 is formed by heat treatment. (Figure 1-■).

Next, when the resist is removed using a resist removal solution, the polymer resin coating on the resist is removed, and fine irregularities are formed on the substrate surface (Fig. t41-■).

Next, by rubbing the surface of the substrate with a cloth or the like in a certain direction, one side of the unevenness is more dislocated than the other side, so the shape of the unevenness becomes directional (ts1
Figure -■). In this case, the shape and density of the unevenness are determined by the total pressure of the rubbing process and the pattern pitch.
desirable.

As a result of the above processing, the liquid crystal molecules 4F as shown in Figure 1-■
They are arranged stably in a certain direction at an i-pretilt angle θ. When using the present invention, the pretilt angle can be controlled in the range of 0 to 30 degrees.

〔Example〕

In this example, a transparent electrode was patterned into a predetermined shape, a positive resist (AZ-1350, 7, Shepley type) was applied onto the substrate using a spinner, and then prebaked at 80° C. for 20 minutes in an open environment. Next, we created a dot pattern with a pitch of 1 μm.
Exposure using an otomask. Next, special liquid NMD-
! i (manufactured by Tokyo Ohka), and after comparison, it was opened at 12
Bost bake for 20 minutes at 0°C. Next, a polyimide polymer resin was applied, a polyimide film was formed by thermal ffK, and the resist was removed using a special stripping liquid 5T-10 (manufactured by Tokyo Ohka). After this, the surface of the polyimide coating was observed using a scanning electron microscope (Hitachi! 1), and the ratio was 1.
When the unevenness with a μm pitch was confirmed ψ, an alignment layer was formed by rubbing in a certain direction using a leaflet with a total pressure of 0 cuff. The liquid crystal is held between such substrates.

The pretilt angle was measured and found to be approximately 20°.

In addition, a super TNWJ liquid crystal display device 11I is constructed using the above substrate, and then a display B-B having a uniform orientation in one display area is obtained.

Example λ The same procedure as in Example 1 was carried out except that the total rubbing pressure was set at 100 or more, except for 9, and the liquid crystal was held between the T substrates.

I measured the pretilt angle and found it to be approximately 15 degrees ft.

Example 3 Polyvinyl alcohol was used as the polymer resin, and the same process as in Example 1 was performed except for the following.A liquid crystal was held between the substrates, and the pretilt angle was measured. Example 4 Polyether sulfone (pzs) as polymer resin
The pretilt angle was measured by sandwiching the liquid crystal using nine substrates prepared in the same manner as in Example t, and the following result was approximately 2.
[Effects of the Invention] As described above, according to the present invention, the process for forming an alignment layer is
h = , A type of work that coats a polymer resin on a substrate.

A type of work in which the polymer resin is lifted off, a type of work in which the surface of the polymer resin is rubbed in a certain direction with cloth, etc., and a type of work in which the polymer resin is further removed are 1.
By forming patterns with a pitch of 1 μm or less using the lift-off method, unevenness with a directionality of 1 μm or less can be formed on the substrate surface. Set the pretilt angle of 0 to 3
Can be controlled within a range of 0°.

Therefore, the present invention is particularly effective for a liquid crystal display (VK) lid that uses a birefringence mode to display a large-sized dog, which has been attracting attention in recent years.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram showing the effect of the present invention. 1... Board 2...Resist 3...Polymer resin coating ４・・・・・・Liquid crystal molecules that's all Applicant: Seiko Epson Corporation (a) (C) (d) (e) Figure 1

Claims (2)

[Claims] (1) In a liquid crystal display device in which a liquid crystal is sandwiched between a pair of substrates each having a transparent electrode on the substrate and an alignment layer on the electrode,
A method for manufacturing a liquid crystal display device, wherein the step of forming at least one of the alignment layers comprises at least the steps of applying a polymer resin on a substrate, lifting off the molecular resin, and performing a rubbing treatment. . (2) The method for manufacturing a liquid crystal display device according to claim 1, wherein in the step of lifting off the polymer resin, a pattern with a pitch of at least 1 μm or less is formed by a lift-off method.