JPS62280662A - Control method for measurement accuracy of measuring instrument for semiconductor device - Google Patents

Abstract

PURPOSE:To shorten the loss time in measurement accuracy confirmation and to secure the accuracy of measurement by providing a reference semiconductor device storage part in a test handling device, and switching a conveyance line and storing a reference semiconductor device. CONSTITUTION:Rails 4 for conveyance are switched to take the reference semiconductor device out of the reference semiconductor device storage part 6 of the test handling device automatically, the device is measured plural times at semiconductor device measurement parts 2 and 3 and stored in the storage part 6 again, and the rails 4 are returned to a conveyance path for normal operation. Therefore, the measurement accuracy is confirmed at desired time in a short time even during operation and the accurate measurement accuracy is secured at any time.

Description

[Detailed Description of the Invention] 3. Detailed Description of the Invention [Purpose of the Invention (Industrial Application Field) The present invention is applicable to RC (integrated circuit) and LSI (large scale integrated circuit)
The present invention relates to a measurement accuracy control method for an apparatus for measuring semiconductor devices such as the above.

(Prior Art) Normally, in a test handling device, it is necessary to manage the measurement accuracy confirmation in the measurement section, and the measurement accuracy must be with respect to a reference semiconductor device. Furthermore, unless the reference semiconductor device is measured under the same conditions as in normal work, errors will occur in the measurement results, making it impossible to correctly manage the measurement accuracy of the measuring device.

K, who manages the measurement accuracy in the measuring section using a conventional test handling device, releases the test notebook 9 ring device from its normal working state, places the reference semiconductor device on the transfer line, puts it into its normal working state, and calculates the measurement results. get. Then, the normal work state is canceled again, the reference semiconductor device on the transfer line is taken out, and if the result allows it to be operated as normal work, it is used as normal work, but the above work is performed to confirm the accuracy of one measurement. (necessary), during which time normal work ceases, and measurement accuracy confirmation and production volume become inversely proportional.

FIG. 2 is for explaining the above-mentioned problem, and the conventional test handling apparatus does not have a reference semiconductor device storage section on the semiconductor device transport line or in a place adjacent to the transport line. Therefore, in order to obtain the measurement results at the measurement section of the reference semiconductor device, the semiconductor device must be transported through the lobe section 1 or from the middle of the semiconductor device transport rail 4, and then transferred to the measurement section of the first measurement section 2, M2. After the measurement in step 3, the only method available was to remove the reference semiconductor device from the semiconductor device unloader section 5.

(Problem to be solved by the invention) The above measurement accuracy confirmation is an essential operation in the test handling device, and must be performed even if there is lost time. This becomes a problem.

The present invention has been made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a complete method for controlling the measurement accuracy of a semiconductor device measuring device, which can shorten the loss time that occurs when confirming measurement accuracy and improve the accuracy of the measurement itself. It is something.

[Structure of the Invention] (Means and Effects for Solving Problems) The present invention provides a storage section for a reference semiconductor device in a test handling device, and after measuring an arbitrary number of times, the reference semiconductor device is placed in a test handling device. Automatically take out the sample from the storage section, flow it to the transfer line of the test handling device, measure it in the measurement section, and automatically put it back into the storage section? A storage section for the reference semiconductor device is provided in the transport line of the last-no-1 handling device in order to reduce the loss time that occurs when confirming the measurement accuracy and to improve the accuracy of the measurement itself.

(Embodiment) An embodiment of the present invention will be fully described below with reference to the drawings. 1st
The figure is a configuration diagram of the same example, but since this is an example in which it corresponds to the one in Figure 2, corresponding parts are given the same reference numerals and explanations are omitted. Give an explanation.

That is, in the test handling device according to the present invention, a reference semiconductor device storage section 6 is provided at a location in contact with the semiconductor device transport rail 4 of the device, and all the reference semiconductor devices are stored here, and when checking measurement accuracy, the transport line is closed. Switching between the first 411 constant part 2 and the second measuring part 3, the measurement results? Then, all the semiconductor devices serving as a reference are stored again through the transport rail 4 into the storage section 6. That is, when confirming measurement accuracy, the reference semiconductor device storage section 6, the semiconductor device measurement section 2.3, and the semiconductor device transport rail 4 are used. On the other hand, during normal work, the semiconductor device loader section 1,
Measuring section 2.3, transport rail 4. A semiconductor device unloader section 5 is used.

Switching between normal work and measurement accuracy confirmation can be done by specifying an arbitrary number of times, so measurement accuracy can be checked even if there is a problem in the middle of normal work. Furthermore, since the transport lines are different, the reference semiconductor device and the normal work semiconductor device Ift location do not mix with each other.

[Effects of the Invention] As explained above, according to the present invention, measurement accuracy can be checked and normal work can be carried out just by switching the conveyor line, thereby significantly reducing lost time and completely improving work efficiency. Can be done. Furthermore, measurement accuracy can be confirmed using the same reference semiconductor device tjlL, and accurate judgment can be made.

[Brief explanation of drawings]

FIG. 1 is a block diagram of an embodiment of the present invention, and FIG. 2 is a block diagram for explaining conventional test handling. DESCRIPTION OF SYMBOLS 1... Semiconductor device loader part, 2.3... Semiconductor device measurement part, 4... Semiconductor device transport rail, 5... Semiconductor device unlobe part, 6... Reference semiconductor device storage part.

Claims (1)

[Claims] A storage section for the reference semiconductor device is provided in the test handling device, and after measuring an arbitrary number of times, the reference semiconductor device is automatically taken out from the storage section, placed on the transfer line of the test handling device, and placed in the measurement section. take measurements,
A measurement accuracy control method for a semiconductor device measuring device, characterized in that the device is automatically stored in the storage section again.