JPS62274211A - Tilt angle detecting sensor - Google Patents

Tilt angle detecting sensor

Info

Publication number
JPS62274211A
JPS62274211A JP11757586A JP11757586A JPS62274211A JP S62274211 A JPS62274211 A JP S62274211A JP 11757586 A JP11757586 A JP 11757586A JP 11757586 A JP11757586 A JP 11757586A JP S62274211 A JPS62274211 A JP S62274211A
Authority
JP
Japan
Prior art keywords
slit
light
tilt angle
detection sensor
angle detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11757586A
Other languages
Japanese (ja)
Other versions
JPH0619273B2 (en
Inventor
Kikuo Shimura
志村 菊雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SOTSUKISHIYA KK
Sokkisha Co Ltd
Original Assignee
SOTSUKISHIYA KK
Sokkisha Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SOTSUKISHIYA KK, Sokkisha Co Ltd filed Critical SOTSUKISHIYA KK
Priority to JP61117575A priority Critical patent/JPH0619273B2/en
Publication of JPS62274211A publication Critical patent/JPS62274211A/en
Publication of JPH0619273B2 publication Critical patent/JPH0619273B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To improve measuring accuracy and to obtain a stable tilt angle sensor by measuring an interval between two images of a slit arranged in a focal plane and detecting the tilt angle of a vessel and preventing a measuring error due to temperature variation, etc. CONSTITUTION:When the vessel 2 is tilted by an angle theta in the direction of the gravity, an angle made by a horizontal plane 11 and a plane mirror 1 is made to 90 deg.+ or -theta. When a refractive index of a liquid and a focal distance of a condenser lens 4' are denoted as (n) and (f) respectively, in case theta is small, the interval (d) between two images of the slit 6 made by two optical paths is indicated as (d)=4(n)theta(f). In other words, since the interval (d) is proportional to an angle which is subtracted 90 deg. from the angle made by the plane mirror 1 and the horizontal plane 11, namely, the tilt angle theta of the vessel 2, the tilt angle can be calculated by measuring the interval (d). Since the interval (d) is directly given by the tilt angle theta on one photodetector, any error due to the characteristic variation, the relative position variation, etc., of the photodetector due to the temperature variation, etc., is not brought in.

Description

【発明の詳細な説明】[Detailed description of the invention]

3、発明の1Iv=細な説明 (産業上の利用分野) 本発明は、液体を収容した容器の重力の方向に対する傾
斜角を、液体の水平面と容器の1側面に吹付は念平面鏡
とで構成される二枚4!!を利用して、その反射光線の
反射方向の変化に変換して、傾斜角に相当した出力信号
を得る様にし友、光電式の傾斜角検出センサに関するも
のである。 (従来技術) 従来、液体が重力の作用によって常に水平面を呈するこ
とを利用して、液体を人ねぇ8器の傾きを検出する傾斜
角センサが実用化されている。こねは、この水平面から
の反射光の進路が容器の頌きに応じて変化するので、反
射光の基準時の進路に対する傾斜時の進路の変化を光電
的に検出することによって傾斜角を求めようとするもの
である。この際、反射光の進路は受光検出器によって検
出されるのであるが、温度の変化等に起因する受光検出
器のゼロ点の変動、感度の変動、相対位宜の変動等によ
って受光検出器の出力が変動するため、傾斜角検出にお
いて誤差を持つことが免れ得なかつ念。 (発明が解決すべき問題点) この発明は、上述の様な従来の傾斜角センナに見られる
温度変化等による測定PA差をなくす友めになされたも
ので、測定精度を向上させ、より安定な傾斜角センナを
提供することを目的としている。 (問題点を解決するための手段) 本発明の傾斜角検出センサは、第1図において、水i′
F−而11を呈する液体3′t−収容する8器2であっ
てそのI II面に平面鏡1が設けられた容器2と、そ
の焦点面に配置されたスリット6からの光をコリメート
してこのコリメート光を液体3の水平面11と平面鏡1
とで構成する二枚鏡のいずれの反射面へも同時に入射さ
せる様に容器2に対して固定的に配置されたコリメート
系4と、上記の二枚鋼で2回反射づれ之コリメート光を
集光してその焦点面に配置された受光検出器7上にスリ
ット6の2つの滓を結□□□する様に容器2に対して固
定的に配置された集光系4′とを備えている。 (作用) 本発明の頌$1角検出センサをこの様に構成すると、第
2図において、平面鏡1が重力の方向からθ煩くと、受
光検出器7上にスリット6の2つの縁が相互にdの間隔
をなして結ばされ、この間隔dに1頃f+陶θに比例す
るので、受光検出器7によりこの間隔dを測定すること
によって容器2の傾斜θを検出することができる。 (実判例) 第1図と第2叱を参照にして本発明の第1の実施例を説
明する。第1図に示した様に、Ijr:面が側面の1つ
に対[、てほぼ45の角度をなす透明な容52のこの側
面に+面鏡1を設け、容器2 &C入れた透明液体3の
水iF−而11と平面鏡1とがtよぼ直角になる様に容
器2′f!:被測定体(図示なし)に対して配置する。 コリメータ光学系20の光軸9がモ面蜆1と水平面11
との交線10に対しておおむね直父し、コリメート光学
系20を開成する光源5、コリメータレンズ4(集光レ
ンズ4′も兼ねる)、スリット6、受光検出器7、ハー
フミラ−8がi軸9を含み平面鏡lと水IP而11とに
肖ぼ11ズするモ面内に位置する様に、コリメータ光学
系20を容器2に対して固定する。スリット6、受光検
出器7はコリメータレンズ4の焦点面に立置しているの
で、スリット6から出た光源5の光H/%−フミター8
で反射されてコリメータレンズ4によってコリメートさ
れて子桁光となり、容器2の底面を通って液体3の中に
入射する。この子桁光は、交線10を含み光軸9にモ行
な面を境として、反射の順が(1)水平面1メ乎面境1
 、(2)〒面鏡F、モ面11、となる2通りの光路に
分けられる。そして、各反射光は、集光レンズ4′(コ
リメータレンズ4でもある)によってI・−7ミラー8
を通過してその焦点面上に置かれている受光検出器7上
にスリット6の2つの僚(上記2通りの光路各々に対応
する障)を結像する。 第11図の場合、モ面′a1と水平面11がi!角をな
すので、上記2通9つ反射光によるスリット6の像は相
互に重なり合って1つの峰となる。 これに対
3. 1Iv = Detailed Description of the Invention (Industrial Application Field) The present invention is composed of a virtual plane mirror that sprays the liquid onto the horizontal surface and one side of the container to adjust the inclination angle of the container containing the liquid to the direction of gravity. Two pieces 4! ! The present invention relates to a photoelectric tilt angle detection sensor that converts the reflected light beam into a change in the reflection direction to obtain an output signal corresponding to the tilt angle. (Prior Art) Conventionally, a tilt angle sensor has been put into practical use that detects the tilt of a liquid by utilizing the fact that the liquid always presents a horizontal surface due to the action of gravity. The path of the reflected light from this horizontal surface changes depending on the shape of the container, so we can find the angle of inclination by photoelectrically detecting the change in the path of the reflected light when it is tilted compared to the standard path. That is. At this time, the path of the reflected light is detected by the light receiving detector, but due to changes in the zero point of the light receiving detector due to changes in temperature, fluctuations in sensitivity, fluctuations in relative position, etc. Because the output fluctuates, it is inevitable that there will be errors in tilt angle detection. (Problems to be Solved by the Invention) This invention was made to eliminate the measurement PA difference caused by temperature changes, etc., which is seen in the conventional tilt angle sensor as described above, and improves measurement accuracy and makes it more stable. The purpose of the present invention is to provide a tilt angle sensor. (Means for Solving the Problems) The inclination angle detection sensor of the present invention has a water i′ in FIG.
A container 2 containing a liquid 3't exhibiting F-11 is provided with a plane mirror 1 on its I II surface, and the light from a slit 6 arranged at its focal plane is collimated. This collimated light is transferred to the horizontal surface 11 of the liquid 3 and the plane mirror 1.
A collimating system 4 is fixedly arranged with respect to the container 2 so as to simultaneously make the light incident on both reflecting surfaces of a two-panel mirror consisting of and a condensing system 4' fixedly disposed relative to the container 2 so as to focus the two slits of the slit 6 on the light-receiving detector 7 disposed at its focal plane. There is. (Function) When the angle detection sensor of the present invention is configured in this way, as shown in FIG. They are connected at a distance of d, and since the distance d is proportional to about 1 f + ceramic θ, the inclination θ of the container 2 can be detected by measuring the distance d with the light receiving detector 7. (Actual Case) A first embodiment of the present invention will be described with reference to FIG. 1 and FIG. 2. As shown in FIG. 1, a positive mirror 1 is provided on this side of a transparent container 52 whose Ijr surface makes an angle of approximately 45 with respect to one of the side surfaces, and a transparent liquid contained in the container 2 &C is provided. Container 2'f so that the water iF-11 and the plane mirror 1 are approximately perpendicular to t! : Placed relative to the object to be measured (not shown). The optical axis 9 of the collimator optical system 20 is aligned with the moth surface 1 and the horizontal surface 11.
The light source 5, the collimator lens 4 (which also serves as a condensing lens 4'), the slit 6, the light receiving detector 7, and the half mirror 8 are located on the i-axis, which is approximately directly connected to the intersection line 10 with The collimator optical system 20 is fixed to the container 2 so as to be located in a plane including the plane mirror 9 and the plane mirror 1 and the water IP 11. Since the slit 6 and the light receiving detector 7 are placed vertically on the focal plane of the collimator lens 4, the light H/% of the light source 5 emitted from the slit 6 - Fumiter 8
The light is reflected by the beam and is collimated by the collimator lens 4 to become a beam of light, which passes through the bottom of the container 2 and enters the liquid 3. This sub-beam light is reflected in the order of (1) horizontal plane 1 plane boundary 1 with the plane including the intersection line 10 and parallel to the optical axis 9 as the boundary.
, (2) It is divided into two optical paths: a mirror F and a mirror 11. Then, each reflected light is collected by a condensing lens 4' (also a collimator lens 4) into an I-7 mirror 8.
The light beam passes through the slit 6 and forms images of the two members of the slit 6 (obstructions corresponding to the two optical paths described above) on the light receiving detector 7 placed on the focal plane thereof. In the case of FIG. 11, the plane 'a1 and the horizontal plane 11 are i! Since they form an angle, the images of the slit 6 formed by the two nine reflected lights overlap each other to form one peak. Against this

【7て、第2図に示I−友様に、容器2が吃力
の方向に対して角度θ傾斜すると、水平面11と平面鏡
1のなすt14度ti90+θ (第2図の場合はプラ
ス)となる。液体30屈折率をn、焦光レンズ4′の焦
点距離t−fとすると、θが小さい場合、上記2つの光
路によってできるスリット6の2つの浄の間riSdi
t。 d = 4 n 19 f と表わされる。すなわち、間隔dFi、平面鏡lと水平
面11のなす角度から90を引いた角変。 宵いかターれば、容器2の傾斜角θに比例するので、間
隔dを測定するととKよって傾斜角を求めることができ
る。第3図にこの傾斜角θと間隔dの関係を示す@間隔
dけ、上記の説明から明らかな様に、1つの受光検出器
上でII接煩斜040によって与えられるので、従来の
ものの櫟な温度変動等圧@因する受光検出器の特性変動
。 相対位置変動等による誤差は何ら導入されない。 スリット6として第4内に示す様な純隙形状のスリット
を部用すると、傾斜がある場合には第5寵に示す様な律
が受光検出D7上に結摩される。この受光検出器7とし
てCCDやライセンサ等t−使用すれば、峰の間隔dを
デジタル的に測定でき、これに基づいて傾斜角θを求め
ることができる。 第6図と第7図はアナログ的に像の間隔dを測定するた
めのスリット6 (第6図) と受光検出87(vJ7
図)の形状の別の例t−示している。 スリット6は作の間隔dを測定するためにスリットの中
心線から対称にIij@的に光強度が減少する様にした
二等辺三角形の部分21と、光強度を一定に保つ九めに
使われる一定の幅を持った部分22とに分かれていて、
それぞれ受光検出器7の蛍光部23と24に結像される
様になっている。傾斜がある場合のスリットの鐵と受光
検出器の各受光部との関係を第8図に示す。 2つの光路によってできるスリットの部分21の2つの
像を実線と点線で示しである。受光部23の出力Fi傾
斜絢θに対して第9図に示す様な関係になり、傾斜角θ
に比例することとなる。 ここでこの様なスリットのa’、 装な%vXは、スリ
ットの部分21の2つの作が交差している範囲内のいず
れかの位置に受光部23があれは、受光部23にかかる
スリット部分21の2つのlの面積は受光部23の位t
v−よらずに一定であるので、温度変動等による受光検
出器の位置ズレによって検出光強度の変動を受けないこ
とである。なお、スリット部分21の形状は上記し念も
のだ限定されず、例えば中心線から外側へ対称に光強度
が増加するものであっても良い口元強度を一定に保つた
めに匣われるスリット部分22に対応する受光部24の
出力は、光源5の発光強度を制御するのにkわれ、スリ
ット21の光強ifを一定に保ち、光強度の変化による
測定誤差を無くす様にしている。 第10図と第11図は、フリメータ光学系にハーフミラ
−を用いない実施例の側面図とKF面図を示すもので、
スリット6と受光検出器7とは、コリメータレンズ4 
(集光レンズ4も蓋ねる)の焦点面上で、光軸9ft含
み交線10Kili交する千面(第11図のモ面に垂直
な千面)に対して対称な位置に配置されている。この様
な光学系の配置により、第1図と第2図に示した実施例
の傾斜1!!検出センナと同様に傾斜角を求めることが
できる。 第12図は、送光系のコリメータレンズ4と受光系の集
光レンズ4′を別のレンズで構成し、同様にハーフミラ
−を用いない実施例のモ面奢を示すもので、スリット6
はコリメータレンズ4の焦点面に、受光検出器7は集光
レンズ4′の焦点面にそれぞれ配置されている。作用は
先に示した各実施例のものと同様である。 以上の各実施例においては、傾斜の方向、すなわち、傾
斜角θの符号を判別することができない。この符号の判
別を必要とする場合は、第3図又は第9図の特性図上で
傾斜角θの+側か一イ到の一方の側だけで本発明の傾斜
角検出七ンサを使用する様に被測定体に対する吹付は位
置を調整して使用するか、第10図及び第11図に示す
様に、おおむね光軸9と交線】0を含むモ面内でコリメ
ータレンズ4とスリット6との間に配置され几不透明な
しきり板25等を使用すると良い。この様なしきり板2
5を使用する場合は、検出できる傾斜内θの符号は+側
だけになる。 なお、以上の実施例においてにコリメータレンズ4から
のコリメート光は液体内部から平面鏡1及び・水平面1
1に入射するものとし念が、液体3の水平面11が反射
性のものである場合には、液体3の上方からコリメート
光を入射させる様に構成することもできる。その池、種
々の変更が可能なことは当業者に明らかであろう。 (発明の効果) 以上の様に、本発明によれば、モ面焼と液体水平面とで
通常はおおむね直交する様に構成された二枚鏡によって
モ行光1@を2つの光路に分けて反射させ、集光系でそ
れぞれの光路の反射光によって時障され友スリットの2
つの鐵の間の間隔を測定することによって傾斜角を検出
しテイルので、縣度変動等に影響されない高精度の傾斜
角検出センナを提供することができる。 この傾斜Ml*出センサによって物体の傾斜を高精度で
検出でき、検出し九′屯気fa号によってその物体又は
それが関与する池の物体の傾斜内等にフィードバックを
かけることができ、自動側(財)や遠隔制御等に利用で
きる。
[7] As shown in Fig. 2, when the container 2 is tilted at an angle θ with respect to the direction of the stuttering force, the angle formed by the horizontal plane 11 and the plane mirror 1 is t14 degrees ti90 + θ (in the case of Fig. 2, it is positive). . Assuming that the refractive index of the liquid 30 is n and the focal length t-f of the focusing lens 4', when θ is small, riSdi between the two holes of the slit 6 formed by the above two optical paths.
t. It is expressed as d = 4 n 19 f . That is, the distance dFi is the angular change obtained by subtracting 90 from the angle formed by the plane mirror l and the horizontal surface 11. Since the distance is proportional to the inclination angle θ of the container 2, the inclination angle can be determined by measuring the distance d. FIG. 3 shows the relationship between the inclination angle θ and the distance d. As is clear from the above explanation, the distance d is given by the II contact slope 040 on one light receiving detector, so it is different from the conventional one. Characteristic fluctuations of the photodetector due to temperature fluctuations due to isobaric changes. No errors due to relative position fluctuations etc. are introduced. When a slit having a pure gap shape as shown in the fourth part is used as the slit 6, if there is an inclination, a law as shown in the fifth part will be formed on the light reception detection D7. If a CCD, license sensor, or the like is used as the light receiving detector 7, the interval d between the peaks can be measured digitally, and the inclination angle θ can be determined based on this. Figures 6 and 7 show the slit 6 (Figure 6) for measuring the image interval d in an analog manner and the light receiving detection 87 (vJ7).
Another example of the shape of figure t- is shown. The slit 6 has an isosceles triangular part 21 whose light intensity decreases symmetrically from the center line of the slit in order to measure the interval d, and a ninth part which keeps the light intensity constant. It is divided into a part 22 with a certain width,
The images are formed on the fluorescent parts 23 and 24 of the light receiving detector 7, respectively. FIG. 8 shows the relationship between the slit iron and each light-receiving part of the light-receiving detector when there is an inclination. Two images of the slit portion 21 formed by the two optical paths are shown by solid lines and dotted lines. The relationship is as shown in FIG. 9 with respect to the output Fi of the light receiving section 23 and the inclination angle θ.
It will be proportional to. Here, a' and %vX of such a slit are as follows: If the light receiving part 23 is located at any position within the range where the two parts of the slit part 21 intersect, the slit covering the light receiving part 23 is The area of the two l's of the portion 21 is the area t of the light receiving part 23.
Since it is constant regardless of v-, the intensity of the detected light is not affected by fluctuations in the position of the light receiving detector due to temperature fluctuations or the like. Note that the shape of the slit portion 21 is not limited to the above-mentioned one; for example, the shape of the slit portion 21 may be such that the light intensity increases symmetrically outward from the center line. The output of the corresponding light receiving section 24 is used to control the emission intensity of the light source 5, keeping the light intensity if of the slit 21 constant, and eliminating measurement errors due to changes in light intensity. Figures 10 and 11 show a side view and a KF plane view of an embodiment in which a half mirror is not used in the frimeter optical system.
The slit 6 and the light receiving detector 7 are the collimator lens 4
(The condensing lens 4 can also be covered) is placed in a symmetrical position with respect to a thousand planes (thousand planes perpendicular to plane M in Figure 11) that include an optical axis of 9 feet and intersect with 10 lines of intersection. . By arranging the optical system in this way, the slope of the embodiment shown in FIGS. 1 and 2 is 1! ! The tilt angle can be determined in the same way as the detection sensor. FIG. 12 shows the elegance of an embodiment in which the collimator lens 4 of the light transmitting system and the condensing lens 4' of the light receiving system are constructed with separate lenses, and similarly a half mirror is not used.
is arranged at the focal plane of the collimator lens 4, and the light receiving detector 7 is arranged at the focal plane of the condensing lens 4'. The operation is similar to that of each of the embodiments shown above. In each of the above embodiments, it is not possible to determine the direction of inclination, that is, the sign of the inclination angle θ. If it is necessary to determine this sign, use the inclination angle detection sensor of the present invention only on the + side or the + side of the inclination angle θ on the characteristic diagram shown in Fig. 3 or Fig. 9. When spraying onto the object to be measured, either adjust the position or spray the collimator lens 4 and slit 6 in the plane including the line 0, which roughly intersects the optical axis 9, as shown in FIGS. It is preferable to use an opaque cutting board 25 or the like placed between the two. This kind of cutting board 2
5, the sign of the inclination θ that can be detected is only on the + side. In the above embodiment, the collimated light from the collimator lens 4 is transmitted from inside the liquid to the plane mirror 1 and the horizontal surface 1.
If the horizontal surface 11 of the liquid 3 is reflective, the collimated light may be made to enter the liquid 3 from above. It will be apparent to those skilled in the art that various modifications can be made to the pond. (Effects of the Invention) As described above, according to the present invention, the mole beam 1@ is divided into two optical paths by the two mirrors configured such that the mole surface firing and the liquid horizontal plane are generally orthogonal to each other. It is reflected, and in the condensing system, the reflected light of each optical path is disturbed and the two of the friend slits are
Since the tilt angle is detected by measuring the interval between the two irons, it is possible to provide a highly accurate tilt angle detection sensor that is not affected by fluctuations in precision or the like. This tilt Ml* output sensor can detect the tilt of an object with high precision, and it is possible to apply feedback to the tilt of the object or the pond object it is related to by using the 9-ton air signal, and the automatic side It can be used for remote control, etc.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の1実施例の頌叫角センサの側面図、第
2図はこれに傾斜がある場合の説明図、第3閃は傾斜角
対像間隔の特性図、第4図はス’J y )形状の1例
の正面図、第5図は受光検出器上のスリブ)Iの正面図
、第6図はスリット形状のf巾の側の正面図、第7図は
第6図のスリットに対もする受光検出器の正面図、第8
図は第6図のスリットの障と第7図の受光検出器の関係
t−示す説明図、第9図は第8図の場合の傾斜角対出力
特性図、第10図及び第11図はハーフミラ−1を部用
しない実施例の釧面図とモ面図、第12図はコリメータ
レンズと集光レンズを別のレンズで構成(−た実施例の
子面図である。 l:平面鏡 2:容器 3:液体 4:コリメータレン
ズ 4′:集光レンズ 5:光源6:スリット 7:受
光検出器 8:ハーフミラ−9:光軸 10:交線 1
1:液体の水平面 20:コリメータ光学系 21:傾斜角測定用スリット 22:光強度制御用スリ
ット 23:傾斜角測定用受光部24:光強度制仰用受
光部 25:しきり板特許出願人  沫式会仕測 機 
舎 出願人代理人 弁理士 佐  藤  文  男(ほか2
名) 区                   馳・ヂ 4
 図  ポ 5 図    ボ 6 1’碩巣8図 革口図   本11図 112図 手続補正書(自発) 昭和6洋 6月233 特許庁長官 宇 賀 道 部 殿 1、事件の表示 昭和61年特許願第117575号 2、発明の名称 傾斜角検出センサ 3、補正をする者 事件との関係  特許出願人 住 所 東京都渋谷区富ケ谷1丁目1番1号名称 株式
会社測機舎 代表者    古賀子一部 4、代理人 5、補正の対象  明細書の「発明の詳細な説明」の欄
6、補正の内容 /)明細書第7頁第18行「液体30屈折率を」を「液
体3の屈折率をJに補正する。 −)同頁第19行「焦光レンズ4′」を「集光レンズ4
′」に補正する。 3)同第10頁第15行「第11図の平面に」を「第1
1図の紙面に」に補正する。
Fig. 1 is a side view of a cry angle sensor according to an embodiment of the present invention, Fig. 2 is an explanatory diagram when there is an inclination, the third figure is a characteristic diagram of the inclination angle versus image distance, and Fig. 4 is Figure 5 is a front view of an example of the slit shape, Figure 5 is a front view of the slit shape I, Figure 6 is a front view of the f width side of the slit shape, and Figure 7 is the front view of the slit shape. Front view of the light receiving detector corresponding to the slit in the figure, No. 8
The figure is an explanatory diagram showing the relationship between the slit obstruction in Figure 6 and the photodetector in Figure 7, Figure 9 is a tilt angle vs. output characteristic diagram in the case of Figure 8, and Figures 10 and 11 are FIG. 12 is a front view and a front view of an embodiment in which the half mirror 1 is not used, and FIG. : Container 3: Liquid 4: Collimator lens 4': Condensing lens 5: Light source 6: Slit 7: Light receiving detector 8: Half mirror 9: Optical axis 10: Line of intersection 1
1: Horizontal surface of liquid 20: Collimator optical system 21: Slit for measuring inclination angle 22: Slit for controlling light intensity 23: Light receiving part for measuring inclination angle 24: Light receiving part for controlling light intensity 25: Shikiri plate patent applicant Atom type Business measurement machine
Patent attorney Fumi Sato (and 2 others)
First name) Ward Hase-ji 4
Figure Po 5 Figure Bo 6 1' Sekisu 8 Figure Leather Port Book 11 Figure 112 Procedural Amendment (Voluntary) 1985 June 233 Commissioner of the Patent Office Uga Michibe 1, Indication of Case 1988 Patent Application No. 117575 2, Name of the invention Inclination angle detection sensor 3, Relationship to the case of the person making the amendment Patent applicant address 1-1-1 Tomigaya, Shibuya-ku, Tokyo Name Sokkisha Co., Ltd. Representative Kogako Parti 4. Agent 5, Subject of amendment Column 6 of “Detailed Description of the Invention” of the specification, Contents of amendment -) Correct the 19th line of the same page, "Focusing lens 4'" to "Condensing lens 4".
’”. 3) Change “on the plane of Figure 11” to “1st line” on page 10, line 15 of the same page.
1 on the page of the paper.

Claims (7)

【特許請求の範囲】[Claims] (1)水平面を呈する液体を収容しその1側面に平面鏡
が設けられた容器と、その焦点面に配置されたスリット
からの光をコリメートしてこのコリメート光を上記液体
の水平面と上記平面鏡とで構成する二枚鏡のいずれの反
射面へも同時に入射させる様に上記容器に対して固定的
に配置されたコリメート系と、上記二枚鏡で2回反射さ
れたコリメート光を集光してその焦点面に配置された受
光検出器上に上記スリットの2つの像を結像する様に上
記容器に対して固定的に配置された集光系と、を備えて
なり、上記スリットの2つの像の間隔を測定することに
よつて上記容器の傾斜角を検出することを特徴とする傾
斜角検出センサ。
(1) A container containing a liquid exhibiting a horizontal surface and having a plane mirror on one side, collimating light from a slit placed at its focal plane, and collimating the collimated light between the horizontal plane of the liquid and the plane mirror. A collimating system is fixedly arranged with respect to the container so that the light is simultaneously incident on both reflecting surfaces of the two mirrors, and the collimated light reflected twice by the two mirrors is collected and collected. a condensing system fixedly disposed relative to the container so as to form two images of the slit on a light-receiving detector disposed in a focal plane; An inclination angle detection sensor, characterized in that the inclination angle of the container is detected by measuring the interval between.
(2)上記スリットは細隙形状であり、上記受光検出器
は上記細隙形状のスリットの2つの像の間の間隔を測定
する様に構成されたものであることを特徴とする特許請
求の範囲第1項記載の傾斜角検出センサ。
(2) The slit is in the shape of a slit, and the light receiving detector is configured to measure the distance between two images of the slit in the slit shape. An inclination angle detection sensor according to scope 1.
(3)上記スリットはスリット像の光強度分布がスリッ
トの中心線から対称に連続的に変化する様な形状のもの
であり、上記受光検出器は上記スリットの2つの像の交
差範囲内のスリット中心線方向の所定幅の全光強度を測
定する様に構成されたものであることを特徴とする特許
請求の範囲第1項記載の傾斜角検出センサ。
(3) The slit has a shape such that the light intensity distribution of the slit image changes continuously and symmetrically from the center line of the slit, and the light receiving detector is located within the intersection range of the two images of the slit. 2. The tilt angle detection sensor according to claim 1, wherein the sensor is configured to measure the total light intensity of a predetermined width in the center line direction.
(4)上記コリメート系と上記集光系とを1つの結像系
で構成したことを特徴とする特許請求の範囲第1項から
第3項のいずれかに記載した傾斜角検出センサ。
(4) The tilt angle detection sensor according to any one of claims 1 to 3, wherein the collimating system and the condensing system are constituted by one imaging system.
(5)上記コリメート系と上記スリットとの間及び上記
集光系と上記受光検出器との間にしきり板を設けたこと
を特徴とする特許請求の範囲第1項から第4項のいずれ
かに記載された傾斜角検出センサ。
(5) Any one of claims 1 to 4, characterized in that a partition plate is provided between the collimating system and the slit and between the light collecting system and the light receiving detector. Tilt angle detection sensor described in .
(6)上記コリメート系からのコリメート光を上記液体
の水平面と上記平面鏡とに上記水平面下方から入射させ
る様に配置したことを特徴とする特許請求の範囲第1項
から第5項のいずれかに記載された傾斜角検出センサ。
(6) According to any one of claims 1 to 5, the collimated light from the collimating system is arranged so as to be incident on the horizontal surface of the liquid and the plane mirror from below the horizontal surface. The tilt angle detection sensor described.
(7)上記コリメート系からのコリメート光を上記液体
の水平面と上記平面鏡とに上記水平面上方から入射させ
る様に配置したことを特徴とする特許請求の範囲第1項
から第5項のいずれかに記載された傾斜角検出センサ。
(7) According to any one of claims 1 to 5, the collimated light from the collimating system is arranged so as to be incident on the horizontal surface of the liquid and the plane mirror from above the horizontal surface. The tilt angle detection sensor described.
JP61117575A 1986-05-23 1986-05-23 Tilt angle sensor Expired - Fee Related JPH0619273B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61117575A JPH0619273B2 (en) 1986-05-23 1986-05-23 Tilt angle sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61117575A JPH0619273B2 (en) 1986-05-23 1986-05-23 Tilt angle sensor

Publications (2)

Publication Number Publication Date
JPS62274211A true JPS62274211A (en) 1987-11-28
JPH0619273B2 JPH0619273B2 (en) 1994-03-16

Family

ID=14715215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61117575A Expired - Fee Related JPH0619273B2 (en) 1986-05-23 1986-05-23 Tilt angle sensor

Country Status (1)

Country Link
JP (1) JPH0619273B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002286448A (en) * 2001-03-28 2002-10-03 Topcon Corp Tilt detecting device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49909A (en) * 1972-04-20 1974-01-07
JPS5899712A (en) * 1981-12-09 1983-06-14 Tokyo Optical Co Ltd Slant angle measuring device
JPS60232502A (en) * 1984-05-04 1985-11-19 Tokyo Optical Co Ltd Liquid prism
JPS6140506A (en) * 1984-04-18 1986-02-26 Asahi Optical Co Ltd Angle sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49909A (en) * 1972-04-20 1974-01-07
JPS5899712A (en) * 1981-12-09 1983-06-14 Tokyo Optical Co Ltd Slant angle measuring device
JPS6140506A (en) * 1984-04-18 1986-02-26 Asahi Optical Co Ltd Angle sensor
JPS60232502A (en) * 1984-05-04 1985-11-19 Tokyo Optical Co Ltd Liquid prism

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002286448A (en) * 2001-03-28 2002-10-03 Topcon Corp Tilt detecting device
JP4653898B2 (en) * 2001-03-28 2011-03-16 株式会社トプコン Tilt detection device

Also Published As

Publication number Publication date
JPH0619273B2 (en) 1994-03-16

Similar Documents

Publication Publication Date Title
US4647193A (en) Optical target ranging apparatus
JP2913984B2 (en) Tilt angle measuring device
JPH01145515A (en) Photosensor
US6411372B1 (en) Geodetic instrument with laser arrangement
JPS5852514A (en) Measuring device for distance between light source and surface of observation
JPH0652171B2 (en) Optical non-contact position measuring device
SU958854A1 (en) Device for simultaneous measurement of misalgnment and direction
JPH0434092B2 (en)
US6307636B1 (en) Method for telemeasuring and telemeter
JPH09280859A (en) Tilt sensor and surveying device using the sensor
JPS61247944A (en) Measuring instrument for reflection factor
US7692777B1 (en) Optical clinometer
JPH0140035Y2 (en)
JPH0345322B2 (en)
US5276497A (en) Measuring apparatus of mirror surface
JPS62274211A (en) Tilt angle detecting sensor
US6320653B1 (en) Multiple-axis inclinometer for measuring inclinations and changes in inclination
JP2003535319A (en) Optical sensor for distance measurement and / or surface inclination measurement
JPH05340723A (en) Clearance size measuring method
JPS60173488A (en) Proximity sensor device
JPS6266111A (en) Optical distance detecting device
JPS57199909A (en) Distance measuring device
SU1052864A1 (en) Device for gauging object slope
JPS61108908A (en) Fine inclined angle detector
JP2001188030A (en) Lens meter

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees