JPS62272260A - Exposing and printing frame device - Google Patents

Abstract

PURPOSE:To prevent the shift between an original picture and body to be exposed and to improve precision in terms of workability by loading three curved projecting parts on the lower surface of an upper frame fitting the original picture, and different types of stands on the upper surface of a lower frame fitting the body to be exposed. CONSTITUTION:Conical projecting parts 8a and 8b and a spherical projecting part 8c are disposed in an isosceles triangle shape around the lower surface of the upper 1 fixing and positioning the original picture 3. A thick cylindrical stand 9a corresponding to the projecting part 8, a type-C groove-like stand 9b and a cylindrical stand 9c are provided on the upper surface of the lower frame 2 positioning the body to be exposed 4. Centering stand 8a to a stand 9a and the stand 8b is fixed in the width dimension of a groove in the stand 9b to fix all directions. A stand 8c and the stand 9c comprise the surface, and a video camera 11 and a fine adjustment tool 14 adjust the lower frame again. Accordingly a simple constitution can prevent the shift between the original picture and the body to be exposed, and precision in terms of workability can be improved.

Description

Detailed Description of the Invention 3. Detailed Description of the Invention [Field of Industrial Application] The present invention relates to an exposure and printing frame device in an exposure and printing apparatus that exposes precision images.

[Conventional technology]

Various types of exposure and printing frames have been provided for industrial use of image@exposure and printing equipment, and they can be broadly categorized into those shown in FIGS. 3 and 4. Two typical examples will be described below with reference to the drawings. In the figure, the upper frame 10
1 and the lower frame 102 are configured to be openable by a hinge 108 in FIG. 3, and by a guide post 110 and a thrust bushing 111 in FIG. Important elements during exposure printing are the original image 103 attached to the upper frame 101 and the exposed object 104.
The purpose is to prevent misalignment. As a countermeasure against this problem, vacuum suction is conventionally performed from the bottom of the lower frame 102 to attract the exposed object 104 to the lower frame 102, and the position regulating tool 107
In this method, the object 104 to be exposed is fixed, surrounded on all sides by bank rubber 105, and evacuated from the vacuum suction port 106, whereby the space between the gaps Px regulated by the spacers 109 is evacuated and exposed and printed.

[Problem that the invention seeks to solve]

However, the conventional exposure and printing apparatus described above has a problem in satisfying the accuracy requirements of recent precision electronic circuits, and a solution to this problem has been sought.

One of the problems is that it is difficult to ensure reproducibility for each exposed object in the process of repeatedly exposing and printing the same image. As described above, as a work procedure, the original image is fixed on the upper frame, and the exposed object on the lower frame is replaced every exposure operation. At this time, there is naturally a necessary play such as the gap created in the support shaft of the hinge and the sliding gap between the guide boss and the thrust bush, but these movable parts cause slight positional deviations during vacuum suction. Because of this positional deviation, work requiring stable reproducibility of precise relative positional relationships with a tolerance of 5 microns or less was impossible. On the other hand, adding various jigs, positional deviation detection means, etc. to the exposure border setting device 5 in order to satisfy the above required accuracy reduces the workability of the exposure printing and complicates the configuration of the device. This complicates the operability and increases the cost of the device.

The present invention provides an exposure/printing frame that prevents misalignment between a document image and an exposed object, has excellent precision reproducibility in terms of workability, and has a simple configuration in a precision image exposure/printing apparatus used for industrial/industrial use. The purpose is to provide

c. Means for Solving the Problem] A means for solving the above problem is to arrange at least three protrusions having curved or inclined surfaces around the lower surface of the upper frame of the exposure printing frame device for attaching the original image. A pedestal having a hollow portion with at least one end open, a groove-shaped pedestal, and a flat pedestal are arranged on the upper surface of the lower frame to which the exposed object is attached, at positions to support the protruding portions separately. and the mutual positional relationship between the upper frame and the lower frame is determined by the support of the protrusion by the pedestal.

[Effect]

The effect produced by using the above means will be explained with reference to the principle diagram in FIG. Image 3 is fixed to upper frame 1. The positional relationship between the upper frame 1 and the lower frame 2 is as follows: a protrusion (spherical body) 83', a pedestal (thick circle W1) 9a' having a hollow part, a protrusion (spherical body) 8b', and a groove-shaped pedestal. (Abbreviation C type m) 9b'
By determining the two points, two points on the straight line are determined, and by determining the protrusion (spherical body) 8C' and the pedestal 9cL having a flat surface, the above three points are determined. At this time, the three-point protrusions 3a' to 8c' arranged on the upper frame and the corresponding three-point pedestals 9a' to 90' on the lower frame are adjusted and fixed. The positional relationship between the original image 3 and the exposed material 4 is precisely 1.
The points match, and a highly accurate mutual positional relationship can be repeatedly reproduced.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 2 is a perspective view of essential parts showing an embodiment of the present invention.

First, the configuration will be explained. The original fgI image consists of a film or a glass dry plate (hereinafter referred to as a glass mask) 3, and the glass mask 3 is positioned on the upper frame 1 of the exposure and printing frame by a positioning jig 13, and fixed in a predetermined position by a fixing fastener 12. Ru. There is also a video camera 1 on the top of the upper frame 1.
1 is disposed so as to be movable around the rotating shaft 11a. On the lower surface of the upper frame, protrusions 8a and 8b made of a truncated cone and a protrusion 8c made of a spherical body, which are mutual positional relationship determining means according to the present invention, are installed.

The arrangement positional relationship of the three protrusions 8a, 8b, and 8c is 8a.
, 8b, a spherical body 8c is disposed equidistant from the center of each truncated cone. That is, three protrusions are provided in an isosceles triangular shape with the protrusions 8a and 8b as the base and the protrusion 8C as the apex.

On the other hand, the lower frame 2 is provided with pedestals 9a, 9b, and 9c at positions that match the protrusions 8a to 8C provided on the upper frame 1.

A thick-walled cylindrical pedestal 9a is provided corresponding to the truncated conical protrusion 8a, a substantially C-shaped groove-shaped pedestal 9b is provided corresponding to the truncated conical protrusion 8b, and a pedestal 9b having a substantially C-shaped groove is provided to correspond to the spherical protrusion 8c. Correspondingly, a cylindrical pedestal 9c is provided. A suction pedestal 5 is provided corresponding to the glass mask 3 fixed to the upper frame 1. The suction pedestal 5 is made of an alloy called Inha containing 36% nickel, and has extremely high hardness, but a coefficient of thermal expansion that is approximately equal to that of the glass mask 3 attached to the upper frame. A thin tube for vacuum suction is provided in the suction pedestal 5.
Position regulating tools 7 made of square taper pins or the like are provided at the four corners for positioning an object to be exposed (not shown). Further, the positioning of the lower frame 2 is performed by a lower frame fine adjustment tool 14, and the entire lower frame is pressed against a lower frame fixture 15 by a pressing member (not shown) to be positioned and fixed to the main body of the exposure apparatus (not shown).

The operation of the exposure and printing frame configured as described above will be explained. The glass mask 3 attached to the upper frame l is fixed by fixing fasteners 12. An object to be exposed (hereinafter referred to as a work) is transferred to the suction pedestal 5 of the lower frame 2 by a robot or the like serving as a transfer means (not shown). The workpiece is provided with a square guide hole for position regulation in correspondence with a position regulating device 7, such as a rectangular tapered bottle, set up at the corner of the suction pedestal 5. 5 cents.

Next, exhaust is performed through the vacuum suction port 6 provided in the suction pedestal 5, and the workpiece is suctioned and fixed tightly to the suction pedestal 5. When the workpiece is fixed, a driving means (not shown) is activated, and the upper frame 1 is lowered to form protrusions 8a and 8b disposed on the lower surface of the upper frame 1.

8C is fixed to corresponding pedestals 9a, 9b, and 9c. The truncated cone 8a is fixed at a position corresponding to the inner diameter dimension of the thick-walled cylindrical holder 9a, and the truncated cone 8b is fixed at a position corresponding to the width dimension of the groove of the C-shaped groove holder 9b. Since the direction is disposed in the direction of the thick cylindrical pedestal 9a, the front, rear, right and left directions are fixed, and the formation of the surface is determined by the spherical body 8c being determined as the cylindrical pedestal 9c.

The upper and lower frames whose positional relationship has been fixed by the above procedure are confirmed by the video camera 11, and when a positional shift is confirmed by the camera, the lower frame fine adjustment tool 14 is used to adjust the frame again. When the positional relationship between the glass mask 3 and the workpiece is correctly confirmed through the above operation, the video camera 11 is retracted to the outside of the upper frame 1 around the rotation axis ILa so that it does not become an obstacle to the operation. With the above steps, the preparation is completed and the exposure process is started.

The present invention is not limited to the above embodiments, but can be implemented in various ways. For example, the protrusion is not limited to a spherical body or a truncated cone, but may have a curved surface or an inclination, and may be configured in a shape that facilitates accurate position regulation, such as a triangular pyramid or a square pyramid.

The structure of each pedestal is not limited to the embodiments, for example, the groove-shaped pedestal may be V-shaped, U-shaped, or U-shaped, or similarly, a hollow part with at least one end open. The shape of the pedestal having the shape is not limited to a cylindrical shape either.

If it is difficult to balance the upper frame 1 due to the weight of the disposed members, etc., the positional relationship determining means may have a large number of supports, such as four. In this case, it is best to use a flat pedestal with spring properties for the pedestals other than those mentioned above. Furthermore, when moving closer to support the upper frame with the lower frame, either or both of the upper frame and the lower frame may be moved.

〔Effect of the invention〕

As is clear from the above explanation, the front, rear, left, and right directions are fixed by the two sets of positioning means, the pedestal having a hollow part corresponding to the two protrusions, and the groove-shaped pedestal, and one protrusion and the plane are fixed. The formation of one surface is specified by the support of the pedestal. In other words, the mutual positional relationship between the upper frame and the lower frame is determined by the simplest method based on the principle that the surface to be formed is determined by fixing three mechanically minimum points, and the inner diameter of the cylindrical pedestal and The document image (glass This has the great effect of suppressing the positional deviation between the mask) and the exposed object (workpiece) to ±5 microns or less. Furthermore, in actual exposure printing work, when a conventional exposure printing frame was used, it was impossible to perform exposure printing with a line spacing of 100 microns or less, but in an exposure printing experiment using the exposure printing frame of the present invention, the line spacing was 30 microns or less. I was able to obtain a line spacing of . In addition, since the configuration for determining the positional relationship is simple as described above, the workability and operability of the apparatus are not reduced, resulting in high productivity.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing the principle of the present invention, FIG. 2 is a perspective view showing essential parts of the invention, and FIGS. 3 and 4 are sectional views of a device according to the prior art. The numbers in the figure indicate the following. 1... Upper frame 2... Lower frame 3... Original image (glass mask) 4... M exposure body (work) 5... Suction base 7... Position regulating tool 8a,
8b... truncated cone (protruding part) 8c... spherical body (protruding part) 9a river meat cylindrical holder 9b.
...C-shaped groove holder 9c...Cylindrical holder 11...
Video camera 14...lower frame fine adjustment ritual utensil patent applicant Oak Seisakusho Co., Ltd. agent Patent attorney Michizo Isono 1. °′−・ Figure 2

Claims (1)

[Claims] In the exposure and printing frame constituting the exposure and printing device, at least three protrusions having curved or inclined surfaces are arranged around the lower surface of the upper frame on which the original image is attached, and at least one end on the upper surface of the lower frame on which the object to be exposed is attached. A pedestal having a hollow portion with an opening, a groove-shaped pedestal, and a flat pedestal are arranged at positions that support the protruding portions respectively, and the mutual positional relationship between the upper frame and the lower frame is determined. The exposure and printing frame device is characterized in that the above-mentioned protrusion is supported by the pedestal.