JPS62268086A - Microwave heater - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention uses microwaves to test integrated circuit boards, etc.
The present invention relates to a microwave heating device for heating.

(Prior Art) The conventional microwave heating device has been designed to prevent damage caused by the magnet 1 Heron 1, for example, 2.
The microwave of 45G112 was coupled to the waveguide 3 via the antenna 2, and was irradiated to the sample 6 such as an integrated circuit board on the sample stage 5 through the conical horn 4, dielectrically heating the sample 6. The horn 4 is separated by υ1 at the sample stage 5, and the sample 6
There is a desk so that you can put things in and take them out. In addition, the sample stage 5
is formed of a dielectric material, and the tip of the horn 4 is closed with an end plate 7 made of the same material as the horn 4.

When heating 1 G using such a microwave heating device, it is desirable that the upper temperature limit on the surface of the sample 6 is uniform, so it is desirable that the electric field applied to the sample 6 is uniform. It will be done.

However, when the microwave electric field is irradiated to the sample t46 by the conical horn 4 using the T E 10 mode as in this example, the power distribution on the surface of the sample 6 becomes as shown in FIG.
There was a problem that the distribution was not circularly symmetrical, and the distribution on the χ axis rapidly decreased from the center toward the outer periphery.

In order to solve this problem, as shown in FIG. 3(Δ)(B), a circularly polarized wave generating mechanism 8 is provided between the waveguide 3 and the conical horn 4. When the sample 6 is irradiated, the power distribution becomes circularly symmetrical as shown in FIG. 6, and the sample 6 can be heated uniformly.

(Problems to be Solved by the Invention) However, in the microwave heating device having the structure shown in FIGS. 3A and 3B, a circularly polarized wave generating mechanism 8 that can withstand high power must be added. However, there were problems in that it was difficult to miniaturize and was expensive.

An object of the present invention is to provide a microwave heating device that can uniformly heat a sample and can be manufactured in a small size and stored.

(Means for Solving the Problems): The structure of the present invention for achieving the above object will be explained with reference to FIG. 1 (A>(B)) corresponding to the embodiment.
The present invention includes a magnetron 1, a rectangular waveguide 9 to which microwaves generated by the magnetron 1 are applied, and a tip of the rectangular waveguide 9 rotated by 45 degrees around its axis to have a small diameter. TE to sample 6, with side connected. It is equipped with a square pyramidal horn 10 that irradiates microwaves of two orthogonal polarized modes in the same phase.

(Function) With this configuration, TE. The sample 6 can be irradiated with two orthogonal polarized modes, and the sample 6 can be heated uniformly. Two orthogonal polarized waves are generated using a rectangular waveguide and a square pyramidal horn.
Since the structure can be formed in a cylinder, it can be formed compactly and inexpensively.

(Example) An example of the present invention will be described below with reference to FIG. 1 (Δ) (B). As shown in the figure, in the microwave heating device of this embodiment, a rectangular waveguide 9 is connected to a magnetron 1, and microwaves are supplied from the magnetron 1 to the rectangular waveguide 9 by an antenna 2. There is. The small diameter side of a square pyramidal horn 10 is connected to the tip of the rectangular waveguide 9 with its axis rotated by 45 degrees around its axis. horn 10
A sample stand 5 made of a dielectric material is provided inside the sample stand 5, and the tip of the horn 10 is closed with an end plate 7.The horn 10 is also separated at the sample stand 5, and the sample 5
It is designed so that it can be taken in and taken out.

To this sea urchin, a rectangular waveguide and a square pyramidal horn 10 are installed.
When rotated and combined, the vertical and horizontal orthogonal two polarized waves of the T E to mode can be moved, and the two orthogonal polarized waves can be irradiated onto the sample 6 using the square pyramid horn 10 in the same phase.

The power distribution of the microwave in this case, as shown in FIG. 4, is approximately axially symmetrical, and the power distribution is wider than when circularly polarized waves are used as shown in FIG.

(Effects of the Invention) As explained above, the microwave heating device according to the present invention has a structure in which the rectangular waveguide and the square pyramidal horn are rotated 45 degrees in the axial direction, so that the It is possible to irradiate the sample with two orthogonal polarized microwaves in the same phase, so that a uniform power distribution can be applied to the sample and the sample can be heated uniformly.

Furthermore, if a rectangular waveguide and a square 11 horn are combined as in the present invention, the structure becomes a spacer, which allows for miniaturization and inexpensive manufacturing.

[Brief explanation of drawings]

Figures 1 (A) and (B) are a partially cutaway surface view and a bottom view showing an embodiment of the device according to the present invention, Figure 2 is a vertical sectional view and a bottom view of a conventional device, and Figure 3 is a A partially cutaway side view and a bottom view of an example of the conventional device, and FIG. 4 is a power distribution diagram of the device according to the present invention shown in FIG. 1 (Δ) (B). , Fig. 5 and Fig. 6 are Fig. 2 (△) (B) and Fig. 3 <
FIGS. 3A and 3B are power distribution diagrams on the sample surface in each conventional apparatus shown in FIGS. DESCRIPTION OF SYMBOLS 1... Magnetron, 2... Antenna, 5... Sample stage, 6... Sample, 9... Rectangular waveguide, 10...
Square pyramidal horn. Figure 1

Claims (1)

[Claims] A magnetron, a rectangular waveguide to which the microwaves generated by the magnetron are applied, and a small diameter side connected to the tip of the rectangular waveguide by rotating the axis by 45 degrees around the axis of the rectangular waveguide to connect the sample to the TE_1_0 A microwave heating device comprising a square pyramidal horn that irradiates microwaves of two orthogonal polarized modes in the same phase.