JPS62267743A - Strippable developing device with reexposing section - Google Patents
Strippable developing device with reexposing sectionInfo
- Publication number
- JPS62267743A JPS62267743A JP11149686A JP11149686A JPS62267743A JP S62267743 A JPS62267743 A JP S62267743A JP 11149686 A JP11149686 A JP 11149686A JP 11149686 A JP11149686 A JP 11149686A JP S62267743 A JPS62267743 A JP S62267743A
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- substrate
- reexposing
- strippable
- belts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 53
- 206010040844 Skin exfoliation Diseases 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 abstract description 14
- 239000000126 substance Substances 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000005611 electricity Effects 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
- G03F7/2024—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure of the already developed image
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
この発明は、印刷回路等の製造に供される剥離現像装置
に関するものである。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a peeling and developing device used for manufacturing printed circuits and the like.
〈従来の技術〉
印刷回路の製造等のために、画像形成用基板の表面に透
明支持体と、この支持体上に被着された光重合性組成物
層とからなる画像形成材料の上記光重合組成物層側を貼
着し、この光重合性組成物層を画像状に露光して硬化領
域を形成し、上記支持体を基板から引離して該基板上に
画像状のレジストを形成する画像形成手段、および該画
像形成に最適な剥離現像装置がすでに提案されている。<Prior Art> For the production of printed circuits, etc., the above-mentioned photo-coating of an image-forming material consisting of a transparent support and a photopolymerizable composition layer coated on the support is applied to the surface of an image-forming substrate. The polymeric composition layer side is attached, the photopolymerizable composition layer is imagewise exposed to light to form a cured area, and the support is separated from the substrate to form an imagewise resist on the substrate. Image forming means and peeling and developing devices optimal for image formation have already been proposed.
上記のような剥離現像方法においては第1図に示す如く
画像形成された基板1上には、光重合性組成物層のうち
パターン状に露光され硬化した露光部2が密着している
。ここで、この露光部2の側面、すなわち光重合性組成
物層のうち露光されずに引離された未露光部との破壊面
に注目すると、わずかながら該未露光部の一部3が残っ
ている。In the peeling development method as described above, as shown in FIG. 1, the exposed portions 2 of the photopolymerizable composition layer, which have been exposed and cured in a pattern, are in close contact with the substrate 1 on which an image has been formed. Here, if we pay attention to the side surface of this exposed area 2, that is, the fractured surface of the unexposed area of the photopolymerizable composition layer that has been separated without being exposed, a small portion 3 of the unexposed area remains. ing.
ところが残った該未露光部3はもともと基板1に貼着す
るように設計されているため、それ自身粘着力を有して
いる。そのため画像形成後の基板を重ね合わせ、長時間
放置すると第2図に示すように残った該未露光部3と上
方の基板1′とが密着してしまう。スルーホール基板等
の両面に画像形成がなされている基板を巾ねた場合にも
同様に、iii像面同志が密着してしまうのである。However, since the remaining unexposed area 3 was originally designed to be attached to the substrate 1, it has adhesive strength itself. Therefore, if the substrates after image formation are stacked and left for a long time, the remaining unexposed portion 3 and the upper substrate 1' will come into close contact as shown in FIG. Similarly, when a substrate with images formed on both sides, such as a through-hole substrate, is crossed, the image planes iii will come into close contact with each other.
このため、重ね合わせた基板を1枚づつ処理するために
持ち上げようとすると密着した部分を剥がす時に前記露
光部2の一部が破損してしまい、所定の画像が得られな
い場合がある。またこの時、余分な労力を要するうえに
、静電気が発生し、ゴミの付着や作業性の低下をまねい
ていたのである。For this reason, when attempting to lift stacked substrates one by one to process them, a portion of the exposure section 2 may be damaged when peeling off the portions that are in close contact with each other, and a desired image may not be obtained. In addition, this required extra labor and generated static electricity, which led to the accumulation of dust and reduced workability.
上記のような密着は、長尺状の基材を連続して剥離現像
し、そのままロール状に巻き取る時にも同様に発生し、
ロール状の基材を後工程処理するために巻き出す時に、
やはり画像の損傷や静電気の発生によるゴミの付着など
が生じていた。The above-mentioned adhesion also occurs when a long base material is continuously peeled and developed and then wound up into a roll.
When unrolling a roll-shaped base material for post-processing,
As expected, images were damaged and dust adhered to them due to static electricity.
以上のような欠点を防ぐために、従来基板と基板の間に
、表面がシリコン処理されたフィルムなど離型性を有す
るシートを入れたり、長尺の基材を巻き取る場合には該
離型性のシートを重ねながら巻き取るなどの方法がとら
れていた。が、しかしながらこの方法は離型性のシート
という副資材を必要とする上、該シートを取去る時に静
電気が発生し、あまり効果的な方法とは言えなかった。In order to prevent the above-mentioned drawbacks, conventionally, a sheet with release properties such as a film whose surface has been treated with silicon is inserted between the substrates, and when a long base material is rolled up, the release properties are removed. Methods such as stacking sheets and rolling them up were used. However, this method requires an auxiliary material such as a releasable sheet, and static electricity is generated when the sheet is removed, so it cannot be said to be a very effective method.
さらに第6図に示すようにコ型の溝を有するラック20
に被処理基板4を挿入し、未露光部3と基板1が接触し
ないようにする方法があるが、基板寸法に合わせてた専
用ラックを多数必要とするうえ、スペース効率も悪いと
いう欠点があった。Further, as shown in FIG. 6, a rack 20 having a U-shaped groove
There is a method of inserting the substrate 4 to be processed into the substrate so that the unexposed area 3 and the substrate 1 do not come into contact with each other, but this method requires a large number of dedicated racks that are matched to the dimensions of the substrate and has the drawbacks of poor space efficiency. Ta.
この発明は、上記のような点にかんがみてなされたもの
であり、画像形成後の基板上に再露光を行なうことによ
り、パターン状に形成された光重合性組成物層の露光部
の側面に残っている未露光部を確実に光重合させ、現像
終了後の基板を直接重ね合わせる、あるいは巻き取るこ
とのできる剥離現像装置を提供することを目的とする。This invention was made in view of the above points, and by re-exposing the substrate after image formation, the side surface of the exposed area of the photopolymerizable composition layer formed in a pattern is It is an object of the present invention to provide a peeling developing device that can reliably photopolymerize remaining unexposed areas and directly stack or wind up substrates after development.
〈問題点を解決するための手段〉
上記の問題点を解決するため、この発明は透明支持体お
よび光重合性組成物層の未露光部を該基板上より剥離し
、光重合性組成物層の露光部を基板上に残存させた後、
該光重合性組成物を光硬化させることのできる光源にて
基板を再度露光するような再露光部を該剥離現色部の後
方に設けたものである。<Means for Solving the Problems> In order to solve the above problems, the present invention peels off the transparent support and the unexposed part of the photopolymerizable composition layer from the substrate, and removes the photopolymerizable composition layer from the substrate. After leaving the exposed area on the substrate,
A re-exposure section for exposing the substrate again to a light source capable of photocuring the photopolymerizable composition is provided behind the peeling and developing section.
以下、この発明の実施例を添付図面にもとづいて説明す
る。Embodiments of the present invention will be described below with reference to the accompanying drawings.
実施例1
第3図に示す如くスルーホールを有する基板など、基板
の両面に画像を形成する必要のあるものを剥離現像でき
る両面剥離現像F115の基板搬出口側に、基板の幅り
に合わせてそれ自身の間隔を変えることのできる一対の
基板搬送ベルト7を設置する。この基板搬送ベルト7は
被処理基板4a〜40等の両サイドを数ミリ保持し、搬
送できる機能を有するものであって、同等の機能を持つ
ものであれば例えばコンベアヂエーン等を利用してもよ
い。また、該搬送ベルト7の基板のつかみしろは、形成
された画像に影響のない範囲であれば何ミリでもよい。Embodiment 1 As shown in Fig. 3, a double-sided peeling developer F115 that can peel and develop substrates that require images to be formed on both sides of the substrate, such as a substrate with through holes, is placed at the substrate exit side according to the width of the substrate. A pair of substrate transport belts 7 are installed which can vary their spacing. This substrate conveyance belt 7 has the function of holding and conveying the substrates to be processed 4a to 40 by several millimeters on both sides, and if it has the same function, it can be carried out using a conveyor chain, for example. Good too. Further, the gripping margin of the substrate of the conveyor belt 7 may be any number of millimeters as long as it does not affect the formed image.
この基板搬送ベルトの上、下双方に、前記光重合組成物
層を光重合させることのできる再露光部6a、6bを設
ける。Re-exposure sections 6a and 6b capable of photopolymerizing the photopolymerizable composition layer are provided both above and below this substrate conveyance belt.
ここで、露光終了後の被処理基板4aを剥離現像n5内
部(図示せず)に投入し、該基板の上、下面をそれぞれ
現像処理し、所定の画像を形成する。画像形成終了後の
被処理基板4bは、剥離現像機5内部より搬出され、前
記基板搬送ベルト7に両サイドを保持され、進行する。Here, the substrate 4a to be processed after exposure is placed into a peeling and developing device n5 (not shown), and the upper and lower surfaces of the substrate are developed, respectively, to form a predetermined image. After the image formation has been completed, the substrate 4b to be processed is carried out from inside the peeling developing device 5, held on both sides by the substrate conveying belt 7, and advanced.
この時に前記再露光部6a、6bによって被処理基板4
bのそれぞれ上、下面を再露光に最適な露光量にて光照
射する。At this time, the substrate to be processed 4 is exposed by the re-exposure sections 6a and 6b.
The upper and lower surfaces of b are irradiated with light at the optimum exposure amount for re-exposure.
この再露光部の内部は第4図に示すように、ボディ60
.再露光が可能なランプ61、反射板62、絞り83、
およびランプの冷却装置64、その他の採機類(図示せ
ず)で構成されている。そして、基板処理速度の変化に
対して絞り63の開閉度を調整し、つねに一定の再露光
部を得られるようにされている。The inside of this re-exposure section is a body 60 as shown in FIG.
.. A re-exposure lamp 61, a reflector 62, an aperture 83,
and a lamp cooling device 64, and other sampling equipment (not shown). The degree of opening and closing of the diaphragm 63 is adjusted in response to changes in substrate processing speed, so that a constant re-exposed area can always be obtained.
この再露光処理により、第1図に示す未露光部3が光重
合し、露光部2と同質となって粘着性を失う。再露光処
理後の被処理基板4cは前記基板搬送ベルト7を通過し
た後、アンローダ−等により1枚づつ、つみ重ねること
ができる。By this re-exposure treatment, the unexposed area 3 shown in FIG. 1 is photopolymerized, becomes the same as the exposed area 2, and loses its tackiness. After the substrates 4c to be processed after the re-exposure process pass through the substrate conveyance belt 7, they can be stacked one by one using an unloader or the like.
〈実施例2〉
第5図において長尺状の基材10に対してN続的に現像
でき剥離現像装置(図示せず)の後方にガイドロール1
1〜13を設ける。このうちガイドロール12および1
3によって一定の面積を有する照射面を形成する。そし
て基材の画像形成面の上方に設けられた再露光部6Cに
より、再露光処理を行なう。この時実施例1と同様に、
第4図に示す絞り63を調整し、基材10の搬送速度に
合わせた露光量で照射する。<Example 2> In FIG. 5, a guide roll 1 is installed behind a peeling and developing device (not shown) that can continuously develop a long substrate 10.
1 to 13 are provided. Of these, guide rolls 12 and 1
3 to form an irradiation surface having a constant area. Then, a re-exposure process is performed by a re-exposure section 6C provided above the image forming surface of the base material. At this time, similarly to Example 1,
The diaphragm 63 shown in FIG. 4 is adjusted to irradiate the substrate 10 with an exposure amount that matches the transport speed of the substrate 10.
この再露光処理により、離型性を有するシートの如き副
資材を重ねることなく基材を巻取軸14に巻き取ること
ができる。By this re-exposure process, the base material can be wound around the winding shaft 14 without overlapping auxiliary materials such as sheets having mold releasability.
〈発明の効果〉
上記のように、この発明によれば画像形成後の基板を副
資材や特殊な冶具を使用することなく、直接重ねたり巻
き取ったりすることができる。その場合、該画像形成面
と基板とが密着することがないため、画像のIllが全
くない。また静電気が発生しにくくなり、ゴミの付着の
確率が大幅に低下する。さらに作業性においても、従来
のような作業を妨げる要素がないため、他の工程と変わ
りなく行なうことができる。<Effects of the Invention> As described above, according to the present invention, substrates after image formation can be directly stacked or rolled up without using auxiliary materials or special jigs. In that case, since the image forming surface and the substrate do not come into close contact with each other, there is no image Ill at all. In addition, static electricity is less likely to be generated, and the probability of dust adhesion is greatly reduced. Furthermore, in terms of workability, there are no elements that hinder work as in the past, so the process can be carried out in the same way as other processes.
第1図は画像形成後の被処理基板の断面図、第2図は被
処理基板を重ねた時の断面図、第3図は再露光部を有す
る両面剥離現像礪の斜視図、第4図は再露光部の断面図
、第5図は長尺状の基材を処理する場合の回置部側面図
、第6図は専用ラックに基板を挿入した時の側面図であ
る。
1.1′・・・基板 2・・・露光部3・・・
未露光部Figure 1 is a cross-sectional view of the substrate to be processed after image formation, Figure 2 is a cross-sectional view of the substrates stacked together, Figure 3 is a perspective view of a double-sided peeling development tank with a re-exposure section, and Figure 4. 5 is a sectional view of the re-exposure section, FIG. 5 is a side view of the rotation section when processing a long substrate, and FIG. 6 is a side view when the substrate is inserted into the dedicated rack. 1.1'...Substrate 2...Exposure section 3...
Unexposed area
Claims (1)
性組成物層からなる画像形成材料を積層し、パターン状
の露光を行なった後、上記透明支持体と光重合性組成物
層の未露光部とを基板より剥離し、光重合性組成物層の
露光部を基板上に残存させる剥離現像装置において、現
像終了後の基板上のパターンを確実に光重合させるため
の再露光部を前記剥離現像装置の後方に設けたことを特
徴とする再露光部を有する剥離現像装置。An image forming material consisting of a transparent support and a photopolymerizable composition layer is laminated on the surface of a substrate on which an image is to be formed, and exposed in a pattern. In a peeling development device that peels off the exposed area from the substrate and leaves the exposed area of the photopolymerizable composition layer on the substrate, the re-exposed area is used to ensure that the pattern on the substrate after development is photopolymerized. A peeling and developing device having a re-exposure section provided at the rear of the peeling and developing device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11149686A JPS62267743A (en) | 1986-05-15 | 1986-05-15 | Strippable developing device with reexposing section |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11149686A JPS62267743A (en) | 1986-05-15 | 1986-05-15 | Strippable developing device with reexposing section |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62267743A true JPS62267743A (en) | 1987-11-20 |
Family
ID=14562755
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11149686A Pending JPS62267743A (en) | 1986-05-15 | 1986-05-15 | Strippable developing device with reexposing section |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62267743A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01172957A (en) * | 1987-12-28 | 1989-07-07 | Toyo Ink Mfg Co Ltd | Image forming device |
-
1986
- 1986-05-15 JP JP11149686A patent/JPS62267743A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01172957A (en) * | 1987-12-28 | 1989-07-07 | Toyo Ink Mfg Co Ltd | Image forming device |
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