JPS62261838A - Dust-proof chamber - Google Patents

Abstract

PURPOSE:To correct and improve the flow of clean air so as to be vertical by a method wherein a control panel and a slant panel which reduces the stagnation of air are provided below a grating to control the flow of suction air so as to flow along the control panel and the slant panel. CONSTITUTION:The sucking direction of clean air A through a suction port 16 is corrected so as to flow along control panels 15 by providing the control panels 15a-15f. The suction force of the suction port 16 weakens an acting force or a slant suction force with respect to the clean air A, which flows above the control panels 15a, 15b, by the preclusion of the control panel 15a. Accordingly, the clean air A at an upper part between the control panels 15a, 15b is sucked along the control panels 15a, 15b. The control of the direction of suction is effected in the same manner with respect to respective control panels 15a-15f. As a result, the slant flow of the clean air A which flows through a dust-proof chamber 13 may be improved. A slant panel 17 is provided for sucking the clean air A along the slant panel 17.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a dust-proof room that circulates clean air from the ceiling to the floor of a ventilation structure, and particularly relates to a dust-proof room that circulates clean air from the ceiling to the floor of a ventilation structure. Manufacturing of.

It relates to techniques that are effective when applied to inspections, etc.

[Conventional technology]

conductor World) J (1985, 8
Monthly issue 9 (published by Press Journal, p. 59-67) provides examples of the above-mentioned clean room structures.
Efficiency Particulate A
An irfilter is installed to control dust in the dustproof room by blowing clean air toward the grating (metal grating) installed on the floor.

The inventors of the present invention conducted various studies regarding the flow of IJ-air flowing through the dust-proof chamber. FIG. 3 shows an example of a dust-proof chamber that was studied prior to the present invention.

1 is a dust-proof room, 2 is a HEPA filter, 3 is a banquet room, 4
is a grating, 5 is an intake port, 6 is an outside air intake port, 7 is an air conditioner, and 8 is a ventilation port.

In the dustproof chamber 1, clean air A flows out from the HEPA filter 2 toward the grating 4. The clean air A that has blown through the grating 4 is taken in from the intake port 5, and is recirculated to the air conditioner 7 as return air.

At this time, the air intake force is strong near the air intake port 5, and the air intake force becomes weaker as it gets farther away, so the flow direction of the clean air A in the dust-proof interior 3 changes diagonally toward the air intake port 5. .

As a result, the inventors of the present invention have revealed that various problems as shown below occur.

[Problem that the invention seeks to solve]

That is, in a clean room with vertical laminar flow throughout the entire surface, as shown in the above-mentioned known example No. 966, the clean air may not flow vertically in the dust-proof room but move and spread horizontally. The above phenomenon is called mixed flow, and when this phenomenon occurs, unnecessary waste, etc., drifts inside the dust-proof room, causing problems in the manufacturing process.

Alternatively, it has become clear that it adheres to semiconductor integrated circuits during the inspection process and causes product defects. Particularly, since semiconductor integrated circuits are manufactured using a miniaturized device process, reduction of the above-mentioned dust and the like is extremely important.

According to the studies conducted by the present inventors, it was found that the occurrence of cross-flow is noticeable in the vicinity of the rethane inlet provided at the bottom of the grating, and that it gradually becomes more vertical as it moves away from the rethane inlet. . Therefore, the inventors realized that the above problem could be solved by regulating the direction of air intake near and far from the rethane intake port, and came to propose the present invention.

An object of the present invention is to reduce the diagonal flow of clean air in a dust-proof chamber by regulating the flow direction of clean air flowing out from a HEPA filter.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Means for solving problems]

A brief summary of typical inventions disclosed in this book is as follows.

That is, an air flow regulating section and a suction direction regulating section are provided below the grating of the dustproof chamber. This air regulating section is a plurality of plate-shaped bodies that are long near the intake port that takes in clean air and shorten as they get farther away, and the intake direction of the clean air taken in from the grating is aligned with the plate-shaped bodies. Eggplant. The suction direction regulating section is a swash plate that is provided at the lower part of the plate-shaped body, and has a long distance from the clean room (crating) near the intake port, and becomes narrower as it gets farther from the intake port, and regulates the intake direction. It is configured to do so.

[Effect]

According to the above-mentioned means, the intake force of clean air from an oblique direction is regulated by the plate-like body, and furthermore, the clean air taken into the lower part of the grating is taken into the intake port without being accumulated by the swash plate. Therefore, it is possible to achieve the object of the present invention, which is to make the flow direction of the clean air flowing in the dust-proof room vertical.

[Example-1] Hereinafter, with reference to FIG. 1, a first example of a dust-proof room to which the present invention is applied
An example will be explained.

Note that FIG. 1 is a cross-sectional view of the main parts showing the structure of the dust-proof chamber.

The feature of this embodiment is that air flow regulating parts (hereinafter also referred to as air flow regulating plates) are provided at predetermined intervals at the lower part of the grating, and a diagonal plate is provided below the air flow regulating plate as a suction direction regulating part. This is because the air intake direction is regulated.

Reference numeral 11 indicates the entire dustproof room, 12 is a HEPA filter, 13 is the inside of the dustproof room, and 14 is a grating that corresponds to the floor of the color ventilation structure in the present invention. At the bottom of the grating 14, there are air flow regulating plates 15a to 15f for a predetermined period of time.
(hereinafter referred to as a regulation plate) is provided. The length of the regulating plates 15a to 15f is longest near the intake air 016, and becomes shorter as the intake force decreases. A swash plate 17 is provided at the lower part of the regulation plate 15a=15f, and is positioned so that the vicinity of the intake port 16 is at a low position and the position becomes higher as the distance goes away. In addition, 18 is an outside air intake port, 19 is an air conditioner,
20 is an air outlet.

By providing the above-mentioned regulating plate 15a=15f and the above-mentioned swash plate 17, the mixed flow of clean air A in the dust-proof chamber 13 is improved as described below.

That is, by providing the regulating plates 15a to 15f,
The intake direction of clean air A through the intake port 16 is determined by the regulation plate 1.
5. Regulation plate 15a near the intake port 16
For example, with respect to clean air A flowing above the regulating plates 15a and 15b, the intake force of the intake port 16 is blocked by the regulating plate 158, and in other words, the force acting on the oblique intake force is weakened. It will be done.

Therefore, the clean air A in the upper part between the regulating plates 15a and 15b is taken in along the regulating plates 15a and 15'bK. The above-mentioned regulation of the intake direction is performed by regulation plates 15b to 1
The same process is performed for each of 5f. As a result, the flow direction of the clean air A blowing through the dust-proof chamber 3 is improved as shown in the figure K, and the above-mentioned diagonal flow is improved.

The swash plate 17 takes in the clean air A along the swash plate 17.

That is, the suction force is strong near the intake port 16, and becomes weaker as it gets farther away. However, if the swash plate 17 is provided as shown, the clean air a that has passed through the grating 14
The amount of air that remains far from the intake port 16 is reduced, and the air is quickly taken in. Therefore, the flow direction of the clean air A flowing vertically in the dustproof chamber 13 is corrected by the regulating plates 15a=15f and the swash plate 17 as described above.

This embodiment has the following effects.

(1) Air flow regulating plates of different lengths are vertically provided at predetermined intervals at the bottom of the grating that forms the floor of the dustproof room, and the air flow regulating plates allow clean air to flow from the bottom of the grating into the dustproof room. Since the structure is configured so that air is taken in along the direction, it is possible to obtain the effect that the direction of flow of clean air in the dustproof chamber by the intake port is corrected and improved in a vertical direction.

(2) By installing a grating at the bottom of the dust-proof room floor, which is a slanted plate with a low position near the intake port and a high position toward the distance from the intake port, the clean air flowing out of the grating can be Air can be taken in along the board,
Since unnecessary stagnation and stagnation of clean air can be reduced, the flow direction of clean air in the dustproof chamber can be corrected and improved to be perpendicular to IK.

(3) The above (IH21) improves the vertical alignment of the flow direction of the clean air in the dust-proof chamber, so it is possible to reduce the accumulation of dust in the dust-proof chamber.

(4) With (3) above, the adhesion of undesirable dust to semiconductor wafers, etc. is reduced during the manufacturing and inspection processes of semiconductor integrated circuits, etc., which are carried out in a dust-proof room, and the yield of gloves is improved by reducing defects due to foreign objects. The effect is that you can.

(5) According to (1) to (4) above, it is possible to produce and test semiconductor integrated circuits using a miniaturized device process at a high yield.

[Embodiment 2] Next, a second embodiment of the present invention will be described with reference to FIG. 2.

The feature of this embodiment is that the length of the air passage hole of the grating is changed instead of the above-mentioned regulating plate 15a=15f.

Note that the same parts as in the first embodiment are given the same reference numerals to avoid duplication of explanation.

As shown in FIG. 2, each ventilation hole 22 of each of the gratings 21a to 21g is formed to be long in the vicinity of the air intake port 16 and to become shorter as it goes farther away.

That is, by forming the length of each ventilation hole 22 as described above, each ventilation hole 22 substantially extends from the regulation plate 15a.
- It comes to perform the same function as 15f. Therefore,
Each of the gratings 21a to 21g itself has the same effect on the clean air A as the grating 14 and the regulating plates 15a to 15f. The swash plate 17 also functions in the same manner as described above.

As a result, the direction of the clean air A flowing through the dustproof chamber 13 is corrected in the vertical direction along each ventilation hole 22.

According to the bottom-proof chamber 11 shown in this embodiment, in addition to having the same effects as in the first embodiment, the following effects can also be obtained.

(6) By forming the vent holes in the grating so that they are long near the intake port and become shorter as they move away from the intake port, dustproofing can be achieved without the need for a regulation plate that specifically regulates the flow direction of clean air. The effect is that the flow of clean air in the room can be vertically corrected and improved in accordance with the direction of the ventilation holes.

Although the invention made by the present inventor has been specifically explained based on examples above, the present invention is not limited to the above examples, and can be modified in various ways without departing from the gist of the invention. Needless to say. For example, the air intake ports may be provided at two locations at the bottom of the grating, and the slanted plate may be made stiffer, or the center portion of the regulating plate may be shortened, and the area near the air intake ports may be made longer.

Alternatively, a structure may be used in which the regulating plate is formed into a slanting board shape and the length of the regulating plate is changed according to the inclination.

In this case, there is an advantage that the intake port need only be provided at one location in the center of the swash plate, and that the difference in intake force is small.

Furthermore, the regulation plates may be arranged densely near the intake port and sparsely arranged far away.

In the above explanation, the invention made by the present inventors and others was mainly applied to a dust-proof room where semiconductor integrated circuits are manufactured and inspected, which is the background field of application of the invention, but the present invention is not limited thereto. Instead, it can be used in combiator rooms, etc. where air conditioner control is performed.

〔Effect of the invention〕

A brief explanation of the effects obtained by typical inventions disclosed in this application is as follows.

That is, a regulating plate is provided at the bottom of the grating to vertically regulate the air flow, and a swash plate is provided to reduce air retention, and the regulating plate controls the flow of air taken in through the grating by the intake port. Since the grating is configured to run along the grating and the swash plate, it is possible to achieve the effect of vertically correcting and improving the flow of the air in the dustproof chamber above the grating, that is, the clean air.

[Brief explanation of drawings]

Fig. 1 is a sectional view showing a first embodiment of a dust-proof chamber to which the present invention is applied, and Fig. 2 is a cross-sectional view showing a second embodiment of the dust-proof chamber of the present invention. ~21g...Grating, 15a=15f...Air flow regulating plate, 16...
Intake port, 17...Swash plate, 22...Vent hole. Agent: Patent Attorney Katsuo Ogawa '＼3rd
Figure 6′ δ

Claims (1)

[Claims] 1. In a dust-proof room that allows clean air to flow from the ceiling to the floor of the ventilation structure, there is an airflow regulation section at the bottom of the floor of the ventilation structure, and an intake direction regulation section at the bottom of this airflow regulation section. A dustproof room characterized by being equipped with.