JPS62261006A - 表面欠陥検査装置 - Google Patents

表面欠陥検査装置

Info

Publication number
JPS62261006A
JPS62261006A JP61103084A JP10308486A JPS62261006A JP S62261006 A JPS62261006 A JP S62261006A JP 61103084 A JP61103084 A JP 61103084A JP 10308486 A JP10308486 A JP 10308486A JP S62261006 A JPS62261006 A JP S62261006A
Authority
JP
Japan
Prior art keywords
slit
detection
inspected
line sensor
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61103084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0577003B2 (enrdf_load_stackoverflow
Inventor
Fumiki Yokota
横田　文樹
Wataru Kubota
窪田　弥
Toru Nishiyama
徹 西山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP61103084A priority Critical patent/JPS62261006A/ja
Publication of JPS62261006A publication Critical patent/JPS62261006A/ja
Publication of JPH0577003B2 publication Critical patent/JPH0577003B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP61103084A 1986-05-07 1986-05-07 表面欠陥検査装置 Granted JPS62261006A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61103084A JPS62261006A (ja) 1986-05-07 1986-05-07 表面欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61103084A JPS62261006A (ja) 1986-05-07 1986-05-07 表面欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS62261006A true JPS62261006A (ja) 1987-11-13
JPH0577003B2 JPH0577003B2 (enrdf_load_stackoverflow) 1993-10-25

Family

ID=14344766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61103084A Granted JPS62261006A (ja) 1986-05-07 1986-05-07 表面欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS62261006A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008046103A (ja) * 2006-07-19 2008-02-28 Shimatec:Kk 表面検査装置
JP4827744B2 (ja) * 2004-02-18 2011-11-30 イスラ ヴィズィオーン アーゲー 検査路設定及び検査領域決定方法
JP2015096837A (ja) * 2013-11-15 2015-05-21 株式会社島津製作所 表面形状計測装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5954221U (ja) * 1982-10-04 1984-04-09 ダイハツ工業株式会社 トランスフア装置の２輪・４輪切換用ドツグクラツチ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5954221U (ja) * 1982-10-04 1984-04-09 ダイハツ工業株式会社 トランスフア装置の２輪・４輪切換用ドツグクラツチ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4827744B2 (ja) * 2004-02-18 2011-11-30 イスラ ヴィズィオーン アーゲー 検査路設定及び検査領域決定方法
JP2008046103A (ja) * 2006-07-19 2008-02-28 Shimatec:Kk 表面検査装置
JP2015096837A (ja) * 2013-11-15 2015-05-21 株式会社島津製作所 表面形状計測装置

Also Published As

Publication number Publication date
JPH0577003B2 (enrdf_load_stackoverflow) 1993-10-25

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