JPS6226051U - - Google Patents

Info

Publication number

JPS6226051U

JPS6226051U JP12139186U JP12139186U JPS6226051U JP S6226051 U JPS6226051 U JP S6226051U JP 12139186 U JP12139186 U JP 12139186U JP 12139186 U JP12139186 U JP 12139186U JP S6226051 U JPS6226051 U JP S6226051U

Authority

JP

Japan

Prior art keywords

polycrystalline silicon

silicon layer

electrode metal

metal film

stepped

Prior art date

1986-08-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000002184 metal Substances 0.000 claims description 11
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 10
• 239000000758 substrate Substances 0.000 claims description 5
• 239000004065 semiconductor Substances 0.000 claims description 4
• 238000010586 diagram Methods 0.000 description 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• 239000012535 impurity Substances 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1