JPS622590A - Laser drawing apparatus - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a laser drawing apparatus for drawing a pattern on a sample using a laser beam, and particularly to a laser drawing apparatus suitable for direct drawing on a PCB substrate or the like.

[Technical background of the invention and its problems] In recent years, P CB (Print C1rcuit
A laser drawing device using a laser beam has been developed to directly draw a pattern on a sample such as 3 oard). This device draws a pattern using the so-called rusk scan method by continuously moving the sample in one direction, scanning the laser beam in a direction perpendicular to the direction of movement, and controlling the ON/OFF state of the beam. be. Another feature is that even a large-area sample can be drawn in a relatively short time.

However, this type of device has the following problems. That is, current laser drawing devices process CAD systems and intermediate data (hereinafter abbreviated as pattern data) that is geometrically compressed data obtained by the CAD systems, and process blanking data (hereinafter abbreviated as bit data). ) is formed in advance, and its bit data is recorded on MT (magnetic tape). Then, the MT is selected according to the type of PCB to be drawn, and the above-mentioned drawing device is driven. For this reason, the amount of bit data for one PCB is enormous, and MTI winding is usually used to draw one side of the PCB. Therefore, when drawing many different PCBs in sequence, a large number of MTs must be prepared in advance, and the MTs must be replaced each time, which is troublesome. In addition, bit data is directly given through the MT-+DISK for drawing operations on one PCB or the same pattern, but when trying to draw different drawing patterns sequentially, mounting of the MT for each different pattern is required. This was necessary and the work was extremely complicated.

Note that the reason why the bit data is formed in advance and recorded on the MT is that it is necessary to supply the bit data in real time during drawing. In other words, if the pattern data is processed in advance in a drawing device to form bit data, the drawing device would require a huge amount of memory to store the bit data, which is practically impossible. Another reason is that it takes time to form bit data, resulting in a decrease in drawing speed.

[Purpose of the invention]

The present invention has been made in consideration of the above circumstances, and its purpose is to provide a new laser drawing device that generates bit data necessary for blanking in real time. In other words, the data that must be prepared in advance for drawing can be made into pattern data without reducing the drawing speed, and the amount of data required in advance can be significantly reduced, improving work efficiency and It is an object of the present invention to provide a highly practical laser drawing device that can reduce the size of a storage device such as an MT.

[Summary of the invention]

The gist of the present invention is to reduce the amount of data that must be prepared in advance by providing the drawing device itself with a function of converting pattern data into bit data.

That is, the present invention provides a laser drawing apparatus that irradiates a sample placed on a sample stage with a laser beam to draw a desired pattern on the sample.
a polygon mirror that reflects a laser beam from a laser oscillator and irradiates the reflected beam onto the sample; means for rotating and scanning the reflected beam in a direction substantially perpendicular to the moving direction of the stage; and converting geometric pattern data of a figure to be drawn on the sample into (1,0) blanking data. a data conversion unit, a plurality of buffer memories for storing the converted blanking data, and selecting one of these memories to irradiate the sample on the basis of the blanking data stored in the memory;
The area to be drawn on the sample is divided into a plurality of rectangular stripes determined by the scanning width of the laser beam on the sample, and the sample stage is continuously moved in the Y direction. After drawing one stripe on the sample, step the stage in the X direction, move the stage again in the -Y direction to draw the next stripe, and repeat this to draw the remaining stripes in sequence. This is how it was done.

[Embodiments of the invention]

Hereinafter, details of the present invention will be explained with reference to illustrated embodiments.

FIG. 1 is a diagram showing the basic configuration of a laser drawing device according to a first embodiment of the present invention, and this device basically consists of a laser drawing device main body IQ- and its control system 1. Ru. The drawing apparatus main body 1 further includes a sample stage 11 on which a sample 12 is placed, a stage driver 16 that moves the stage 11 in one direction, and an AO element (acousto-optic element) 22 that blanks a laser beam from a laser oscillator 21. A blanking driver 43 that drives this AO element 22,
A polygon mirror 26 and a polygon mirror 26 that reflect the laser beam and irradiate the reflected beam onto the sample 12.
is rotated and the reflected beam from the mirror 26 is directed to the sample 12.
It consists of a motor (not shown) that scans the top of the screen. In addition, in the control system 50, the pattern data conversion unit 61 converts pattern data in a geometric format from the MT 52 or the like into bit data (blanking data) under the control of the CPLI 51. Then, this dot data is sent to the blanking driver 43, and the beam is blanked by the AO element 22.

Hereinafter, the specific structure of the laser drawing apparatus body IL and the control system 1 will be described with reference to FIGS. 2 to 6.

FIG. 2 is a perspective view showing the schematic structure of the main body of the laser drawing apparatus. Sample stage 11 movable in the X direction and Y direction
A sample 12 such as a PCB is placed on top. The sample stage 11 is a rectangular plate with a window 11a smaller in diameter than the sample 12, as shown in FIG. 3 as a side sectional view and FIG. 4 as a plan view. The sample 12 is held fixedly by sandwiching the sample 12 between the two. Note that the upper glass plate 13a is attached to the clamp 14.
It is fixed to and rotates together with the clamp 14. The sample stage 11 includes a ball screw 15. It is connected to a stage drive system that includes a motor (stage driver) 16 that rotates the ball screw 15, a nut 17 that is screwed onto the ball screw 15, and the like. The sample stage 11 is continuously moved in one direction (Y direction) by the rotation of the motor 16. Also, although not shown in the figure,
The sample stage 11 is moved in a direction (Y direction) perpendicular to the movement direction described above by a stage drive system similar to that described above. In addition, 18 is a wire for connecting the stage 11 and its drive system, 19 is a first guide body that defines the moving direction of the stage 11 in the Y direction, and 19' is a wire that defines the moving direction of the stage 11 in the X direction. The second guide body shown in FIG.

On the other hand, the laser beam emitted from the laser oscillator 21 is irradiated onto the first AO element 22 for beam blanking. The laser beam that has passed through the AO element 22 is expanded by a diffusion lens 23 and irradiated onto a second AO element 24 for switching the beam up and down. AO element 24
For example, the beam switched upward is reflected by the focusing mirror 25a and irradiated onto the polygon mirror 26a. The laser beam reflected by the polygon mirror 268 passes through the Fθ lens 27a, and then passes through the objective mirror 28a.
The light is reflected by the beam and is irradiated onto the upper surface of the sample 12. Further, the laser beam switched downward by the AO element 24 is directed to the focusing mirror 2 in the same manner as above.
5b, a polygon mirror 26b, an Fθ lens 27b, and an objective mirror 28b.

The polygon mirrors 26a and 26b have, for example, 12 reflective surfaces that are mirror-finished with high precision, and are respectively fixed above and below a rotating shaft 32 supported by an air bearing 31. The rotating shaft 32 is connected to a motor 34 via a coupling 33. Therefore, the rotation of the motor 34 causes the polygon mirrors 26a and 26b to rotate at a predetermined number of rotations. Due to this rotation, the laser beam irradiated onto the sample 12 is scanned in the X direction perpendicular to the moving direction of the stage 11. Furthermore, a rotary encoder 35 is provided below the motor 34 to detect the rotation angle of the motor 34.

FIG. 5 is a schematic diagram showing extracted portions related to the control section provided in the main body IcL of the drawing apparatus. A drive signal DRV from a control system 1, which will be described later, is applied to the stage driver 16 in the X direction and the Y direction, and a rotation angle detection signal ENC of the encoder 35 is further sent to the control system 1. 41
is a laser length measurement system that measures the moving position of the sample stage 11, and its measurement signal PO8 is sent to the control system ILk. 42 is a switching driver that drives the AO element 24, and a switching signal AO is applied to this driver 42 from a control system 50. 43 is the AO element 2
A blanking signal BLK is applied to this driver 43 from the control system 1 stop. 44a.

44°b c. A start signal generating section that generates start signals MS1 and MS2 when the polygon mirrors 26a and 26b come to predetermined positions, and this start signal M
S1. MS2 is sent to the control system 1. 45 is a clamp driver that drives the clamp 14, and this driver 45 receives a clamp signal CLM from the control system 11.
P is given.

Here, the rotary encoder 35 is used as a means for knowing the current position of each of the polygon mirrors 26a and 26b.

Of course, it is possible to replace the detector with another detector as long as it can detect the mirror position. The rotary encoder 35 is also used as a clock signal generating means for reading blanking data during beam scanning on one mirror surface. Here, if the rotation unevenness of the motor 34 is small (wow and flutter -104 or less), the encoder 35 can be removed by using the clock pulse of the oscillator.

The start signal generators 44a and 44b generate a start signal to notify that one mirror surface of the polygon mirrors 26a and 26b has reached the laser beam scanning area, and for example, a slit is formed on each mirror surface of the polygon mirrors. Then, a start signal may be generated when the laser beam incident on the polygon mirror is irradiated onto the slit. The timing of this slit irradiation can be determined by setting the light receiving element at an appropriate position so that the light incident on the slit is incident on the light receiving element.

Note that when the encoder 35 described above is provided, it is also possible to obtain the start signal from the encoder pulse.

FIG. 6 is a block diagram showing the circuit configuration of the control system 11. In the figure, 51 is a CPU that issues various control commands. Compressed pattern data, which is geometric intermediate data created by CAD (not shown) or the like, is recorded on an MT (11 tape) 52. The pattern data recorded on the MT 52 is supplied to the disk unit 53 and stored in the disk unit 53 according to a command from the CPU 51. The pattern data stored in the disk unit 53 is read out at high speed by the DMA unit 54 and stored in the main memory 55.

On the other hand, the CPU 51 includes a stage sequence unit 5.
6 and an AO sequence unit 57 are connected.

The stage sequence unit 56 is supplied with stage position information PO8 from the laser length measurement system 41. Then, in accordance with this position information, a stage drive signal DRV is sent to the stage driver 16, and a clamp signal CLMP is sent to the clamp driver 45. The AO sequence unit 57 controls the vertical switching of the beam by the AO element 24, and sends an AO switching signal AO to the switching driver 42.

On the other hand, the pattern data stored in the main memory 55 includes a preprocessing unit (hereinafter abbreviated as PPLI) 611, a function generation unit (hereinafter abbreviated as FG) 612, a write control unit (hereinafter abbreviated as WCU) 613, etc. A data conversion unit 6 consisting of
1°, and is converted into rl and OJ bit data (blanking data) by this data converter 61. This converted bit data is stored in the buffer memory (hereinafter referred to as B
(abbreviated as UF) 62t, 622 is stored in the buffer memory section 62. The BUFs 621 and 622 each store bit data corresponding to an area of one cell that is data-converted by the data converter 61, and the converted data are stored alternately. The bit data stored in the memory section 62 is transferred to the shift register 6
Sent on 3rd. In reality, the data in the BuFs 62t and 622 is selectively sent to the shift register 63 by a read control unit (hereinafter abbreviated as RCLI) 65 operated by the clock circuit 64.

Here, the data converter 61 and the buffer memory 8j62
The action of is as follows. As mentioned above.

The MT 52 stores compressed data for each basic figure belonging to a basic drawing area called a cell. FIG. 7 shows an example of this basic figure, which is a trapezoid.

When the parameters representing a trapezoid are determined, the rectangle is ΔX1
=O, ΔX2-0, and the triangle has the values of parameters PXr, PY, ΔXt, ΔX2 . By taking specific values for Δg and Δh, it can be treated as a special case of a trapezoid. In the data conversion section 61, first, P
The PU 611 compresses pattern data DA (PXt) regarding a set of basic figures.

PY, ΔXr, ΔX2. Δ℃, Δh) in the main memory 5
5 via the data bus, and converts the data so that it is suitable for calculation in the FG 612. In the FG612, in order to create blanking command data for beam scanning when drawing a basic figure represented by the above-mentioned compressed data from six pieces of data, that is, a beam 0N-OFF command and the address of the blanking command. A data group is formed by covering all of its basic shapes. In WCU613, FG6
From the blanking command data and address data given from 12, blanking data corresponding to one cell area is written into the memory.

Then, the data converter 61 divides the area to be drawn on the sample 12 into cell units C as shown in FIG. 8, and converts the data one cell at a time in the Y direction. . Here, the width of the cell in the X direction was equal to the width of a frame obtained by dividing the area of the sample 12 to be drawn into strips. As the BLIF 62t, 622 of the memory section 62,
A memory equivalent to one of the above cells is prepared in advance. As a result, the converted bit data of the cell area C0□ is stored in, for example, the BUF 62s. The bit data stored in this BUF 62r is read out and drawing is performed. While the data in the BUF 621 is being read, the data converter 61 converts the pattern data of the next cell area CLI, and stores the converted data in the other BUF 622.

When drawing based on the bit data of BUF 621 is completed, the bit data stored in BUF 2 is read out and drawing is performed, and the next cell area tii is written to BLIF 62t.
Stores bit data of ICI8. Furthermore, CtS→
C1rl, Csn→Cz1. Cat→Csn,
Data is stored and read in the order of C+n→C41.

In this way, bit data is alternately stored in the BUFs 621 and 622, and the stored data is alternately read out.

Note that in the above explanation, the cell width is equal to the stripe width, but if the cell width is smaller than the stripe width, data conversion is performed for each of the minimum units of cells corresponding to one stripe width, and the data is converted to one stripe width. BU the corresponding data
The information may be stored sequentially in F621 and F622.

Further, correction signals are supplied to the RCU 65 from various correction amount control units 66. The correction amount control unit 66 is supplied with correction information from the CPU 51 and is also supplied with the start signal generating section 44a.

Start signals MSr, MS2 and rotation signal ENC signal from 44b are supplied. Here, the types of correction amounts include reproducible errors such as aberrations of the Fθ lens and manufacturing errors of the polygon mirror.

These errors are stored in memory in advance, and the irradiation position of the laser beam onto the sample 12 is controlled by taking into account the amount of correction from the memory. The control method is R
There are two methods, one is to give it as a command to the CU 65, and the other is to finely correct the AO element 24, and one of these methods can be selected as appropriate.

Next, the operation of the apparatus configured as described above will be explained.

In this embodiment, as shown in FIG. 9, the region to be drawn on the sample 12 is divided into a plurality of stripes 91. . . , 94, and drawing is performed for each stripe. Furthermore, the upper surface side of the sample 12 was drawn first, and then the lower surface side was drawn.

First, the data is stored in the disk unit 53 from the MT 52 in which the pattern data of the PCB to be drawn is recorded. A sample 12 is set on the sample stage 11, and the sample 12 is fixedly held by the clamp 14. Thereafter, while the stage is continuously moved in the Y direction, the laser beam is scanned in the X direction to draw a desired pattern. Here, the laser beam is switched upward using the AO element 24. Then, the IIJIII system 50 converts the pattern data described above into bit data, and
By rotating the polygon mirror 268 in synchronization with the movement of the stage and supplying blanking data to the AO element 22, a first stripe 91 on the upper surface of the sample is drawn using a so-called hybrid rask scan method, as shown in FIG. That is, the photoresist or the like coated on the sample 12 is exposed to light in accordance with the circuit pattern of the PCB to be drawn.

When the drawing of the first stripe 91 on the sample 12 is completed, the sample stage 11 is moved stepwise in the X direction, and then the stage 11 is moved in the -Y direction, and the blanking data is applied to the AO element 22. The second stripe 92 of the sample 12 is drawn in the same manner as described above. Repeat this operation until the third step. 4th stripe 93.94
are sequentially drawn to draw the entire upper surface of the sample 12.

When the drawing of the upper surface of the sample 12 is completed, the AO element 24
Switch the laser beam downwards.

Then, the stage 11 is continuously moved in the Y (-Y direction).

By step movement in the X direction and scanning of the laser beam, the lower surface of the sample 12 is drawn in the same manner as described above.

Thus, according to this embodiment, the sample 1 is
A desired pattern can be drawn on the upper and lower surfaces of 2. In this case, the data to be prepared in advance is C.
Since it is only necessary to prepare pattern data, which is geometric compressed data created by AD or the like, the amount of data to be prepared in advance can be significantly reduced. Here, although it takes a certain amount of time to convert the pattern data into bit data in the data converter 61, in this device, two buffer 7 memories 621 and 622 are prepared, and the bit data stored in one memory is read out. Since the next data conversion is performed and the bit data is stored in the other memory while drawing is being performed, there is no inconvenience such as the time required for data conversion reducing the drawing speed. Furthermore, as a buffer memory for storing bit data, there are two types of memory that have a capacity that can store bit data for one or more cell areas corresponding to the scanning width of the laser beam.
11ii1 is sufficient, so the memory capacity can be sufficiently small.

Furthermore, since the data to be prepared in advance may be pattern data, there are the following advantages. In other words, in order to improve the drawing accuracy, the pixel size is set to 0.11it (0,00
01 inch) with a relatively large area 1
In the case of drawing a PCB, many MTs must be used to record the bit data in the current apparatus, but this inconvenience does not occur in this embodiment. This is because the pattern data obtained from a CAD system is usually compressed to one-hundredth of the bit data obtained from it, and such pattern data must be recorded on the MT (if so, it will be compressed to several hundredths). Sheet~
This is because data for several dozen PCBs can be recorded.

In addition, since the area to be drawn on the sample 12 is divided into a plurality of stripes and the drawing is performed using a so-called hybrid rask scan method, the beam by the polygon mirror 26 is The scanning width can be shortened. Therefore, it is possible to improve drawing accuracy.

Roughly speaking, if the scanning width of the polygon mirror 26 is kept the same, it becomes possible to directly write a larger sample (multiple the number of stripes).

Also, polygon mirrors 26a, 26b, Fθ lens 27
Since two sets of optical systems such as a, 27b and an objective mirror 288° 28b are provided on the upper and lower sides, it is possible to draw images on both sides of the sample 12 without having to reset the sample 12 or the like. Therefore, production of the PCB becomes extremely easy, and throughput can be improved. As described above, it has great practical advantages and is extremely effective for direct writing on PCBs and the like.

FIG. 10 is a perspective view showing the main body structure of a laser drawing apparatus according to a second embodiment of the present invention. Note that the same parts as in FIG. 2 are given the same reference numerals, and detailed explanation thereof will be omitted. This embodiment differs from the first embodiment described above in that optical systems including mirrors, lenses, and blanking elements are provided on both the upper and lower sides of the sample in order to draw images on both the upper and lower surfaces of the sample at the same time. be. That is, on the upper side of the sample 12, the above-mentioned 21. .about., a laser oscillator 21a similar to 28.

AO element 22a, diffusion lens 23a, focusing mirror 25a
, a polygon mirror 26a, an Fθ lens 27a, and an objective mirror 28a. And the laser oscillator 21
The laser beam emitted from a is blanked by the AO element 22a, and is scanned on the upper surface of the sample 12 by a polygon mirror 268.

On the other hand, the lower side of the sample 12 has the above-mentioned angles of 218° to 28°.
A laser oscillator 21b, an AO element 22b, a diffusion lens 23b, and a focusing mirror 25b similar to that in a.

Polygon mirror 26b, Fθ lens 27b, mirror 28
b are arranged in the same relationship as above. The laser beam emitted from the laser oscillator 21b is blanked by the AO element 22b, and is scanned on the lower surface side of the sample 12 by the polygon mirror 28b.

Figure 11 shows l1Il 611 provided in the main body of the drawing device.
FIG. This structure is different from the one shown in FIG.
22b, and the rest is exactly the same.

FIG. 12 is a block diagram showing the circuit configuration of the control system of the second embodiment. Note that the same parts as in FIG. 6 are given the same reference numerals, and detailed explanation thereof will be omitted. The difference between this circuit and the one shown in Fig. 6 is that two sets of circuits are provided to create the above-mentioned image data in order to simultaneously draw the upper and lower surfaces of the sample. It is similar to that. That is, the above 61. corresponds to the upper AO element 22a. ~
65, a data conversion section 61a and a buffer memory section 6
2a, shift register 63a, clock circuit 64 and R
A CU 65a is provided respectively.

Then, blanking information I from the shift register 63a
BLKs are sent to the blanking driver 43a of the AO element 22a. Furthermore, corresponding to the lower AO element 22b, a data conversion section 61b similar to the above-mentioned 61a to 65a, a buffer memory section 62b,
A shift register 63b and an RCU 65b are provided, respectively. Blanking information BLK2 from the shift register 63b is sent to the blanking driver 42b of the AO element 22b.

With such a configuration, it is possible to scan both the upper and lower surfaces of the sample 12 with the laser beam, and furthermore, blanking data can be independently given to the upper and lower AO elements 22a and 22b. Therefore, it is possible to simultaneously draw on both the upper and lower surfaces of the sample 12, and it is possible to improve the drawing throughput. Furthermore, even if it is necessary to draw a pattern on only one main surface of the sample 12, in this example, by arranging the two samples one on top of the other, it is possible to draw the two samples at the same time. There are advantages such as

FIG. 13 is a system block for explaining the third embodiment of the present invention. In this embodiment, a plurality of laser drawing apparatus main bodies are installed on a conveyance line to improve productivity. A drawing device main body 101, ~, 1ON similar to the laser drawing device main body 10 described above is connected to the conveyance line 74
is installed on top. And these drawing device main bodies 1
01° to 1ON are controlled by a control system n that is larger than the control system L1. Note that reference numeral 71 indicates a PCB transport control device, 72 indicates an undrawn PCB stock area, and 73 indicates a PCB finished product stock area.

With such a configuration, the laser drawing of the sample 12 can be performed in parallel by each drawing apparatus main body 10s to 1ON. In this case, the control system IcL includes each drawing apparatus main body 101. ~.

MT and disk unit compared to the case where the same control system as the control system 50 is provided corresponding to 1ON.

Since the DMA unit, main memory, etc. can be shared, the overall configuration can be simplified. Furthermore, if one drawing device main body breaks down, it is possible to cover it up with another drawing device.

Note that the present invention is not limited to the embodiments described above. For example, it is not necessarily necessary to provide two sets of optical systems such as the polygon mirrors and lenses, and it is of course possible to use only one set when drawing is performed by laser beam irradiation from only one direction. In addition, in the first embodiment, the upper surface of the sample was drawn first and then the lower surface was drawn, but stripes on the upper surface side were drawn when the stage was continuously moved in the Y direction.
The stripes on the lower surface side may be drawn when the stage is continuously moved in the −Y direction. Moreover, as the buffer memory section, 21 [! ! The present invention is not limited to one having three memories, but may have three or more memories as shown in FIG. 14(a). In this case, even if the time it takes to convert the pattern data into one memory and store it as bit data is longer than the time it takes to read the bit data in one memory and draw a predetermined number of lines, the drawing speed This will not cause a decrease in Conversely, the time it takes to read and draw bit data from one memory is 1
If the time is significantly longer than the time required to convert the pattern data into one memory and store it as bit data, as shown in Figure 14(b).
As shown in FIG. 2, it is possible to combine the data conversion sections in the second embodiment into one set and make this correspond to two sets of buffer memory sections corresponding to the upper and lower AO elements. Further, the number of reflective surfaces of the polygon mirror is not limited to 12, and can be changed as appropriate according to specifications. Furthermore, the polygon mirror can also be formed by directly mirror-finishing a part of the motor shaft with a diamond cutter or the like, as shown in FIG.

Furthermore, the sample to be drawn is not limited to PCBs, but can be applied to panels of display devices and other devices that require direct drawing of patterns on relatively large surfaces. Further, the format of the pattern data is not limited to the trapezoidal format in any way, and can be changed as appropriate according to specifications. Furthermore, although laser light is optimal as the light beam for irradiating the sample, any light that sensitizes the resist can be used.

Further, instead of using a polygon mirror, it is also possible to arrange optical fibers facing the sample in a direction perpendicular to the sample movement direction, and to turn the light incident on each fiber ON-OFF. In addition, various modifications can be made without departing from the gist of the present invention.

〔Effect of the invention〕

According to the present invention, a laser drawing device that draws a desired pattern by scanning a laser beam in one direction on a sample by rotating a polygon mirror while moving the sample in one direction includes a data conversion unit and a plurality of buffer memories. Since the geometric pattern data is converted into bit data for drawing, the data input to the device itself is in the form of pattern data, which greatly reduces the amount of data that needs to be prepared in advance. can be reduced to Therefore, M.T.
It is possible to reduce the size of storage devices such as
A highly practical laser drawing device can be realized. Furthermore, by dividing the drawing area on the sample into a plurality of stripes for drawing, it is possible to shorten the beam scanning width by the polygon mirror, thereby improving drawing accuracy. Furthermore, if the drawing accuracy is kept the same, there is an effect that a larger sample can be directly drawn.

[Brief explanation of the drawing]

1 to 8 are for explaining the first embodiment of the present invention. FIG. 1 is a diagram showing the basic configuration, FIG. 2 is a perspective view showing the schematic configuration of the main body of the drawing device, and FIG. Figure 3 is a side cross-sectional view showing the structure of the sample stage, Figure 4 is a plan view showing the structure of the sample stage, Figure 5 is a block diagram showing the circuit configuration of the control section within the main body of the lithography apparatus, and Figure 6 is the overall diagram. IIJ
A block diagram showing the circuit configuration of the IIJ system, Fig. 7 is a schematic diagram showing an example of geometric pattern data, Fig. 8 is a schematic diagram to explain the data conversion action, and Fig. 9 is a schematic diagram showing the drawing state. 10 to 12 are for explaining the second embodiment, respectively. FIG. 10 is a perspective view showing a schematic configuration of the main body of the drawing device, and FIG. 11 is a circuit of the control section in the drawing device. FIG. 12 is a block diagram showing the circuit configuration of the entire control system, FIG. 13 is a system block diagram for explaining the third embodiment, and FIGS. 14 and 15 are FIG. 6 is a diagram for explaining each modification. lCL -- Laser drawing device main body, 11 -- Sample stage, 12 -- Sample, 16 -- Motor (stage driver), 21 -- Laser oscillator, 22 -- First AO element (block) ranking means), 23... diffusion lens, 24... second AO element (up/down switching means), 25
...Focusing mirror, 26...Polygon mirror, 27.
...Fθ lens, 28...Objective mirror, 50...Control system, 51...CPU, 52...MT, 53...
Disk unit, 54... DMA unit, 55...
...↓Memory, 56...Stage sequence unit, 57...AO sequence unit, 61...Data converter, 62...Buffer memory section, 63...Shift register, 67... Various correction amount control units. Applicant's Representative Patent Attorney Takehiko Suzue Figure 1 Figure 3 Figure 5 Figure 7 Figure 8 Figure 9 Figure 13 Figure 15

Claims (5)

[Claims] (1) In a laser drawing device that irradiates a sample placed on a sample stage with a laser beam to draw a desired pattern on the sample, the stage is continuously moved in one direction and in a direction perpendicular to this. means for stepwise movement; a polygon mirror for reflecting a laser beam from a laser oscillator and irradiating the reflected beam onto the sample; and rotating the polygon mirror to direct the reflected beam in a direction substantially perpendicular to the moving direction of the stage. a scanning means, a storage means for storing geometric pattern data of a figure to be drawn on the sample, and a storage means for storing the stored pattern data (
1, 0), a plurality of buffer memories that store the converted blanking data, and blanking data that is selected from one of these memories and stored in the memory. means for blanking the beam irradiated onto the sample based on the method, and dividing the drawing area on the sample into a plurality of rectangular stripes determined by the scanning width of the laser beam on the sample; A laser drawing device characterized by sequentially drawing these stripes. (2) The buffer memory stores blanking data obtained by data converting pattern data of an area having a width corresponding to a plurality of lines of scanning of the laser beam in one stripe by the data conversion unit, and 2. The laser according to claim 1, wherein the blanking data converted by the data converter is stored in another memory while the blanking data stored in the laser is being read out and drawn. drawing device. (3) Two sets of polygon mirrors are provided to irradiate the upper and lower surfaces of the sample with laser beams, and one of the polygon mirrors is selected to draw a desired pattern on the upper or lower surface of the sample. A laser drawing apparatus according to claim 1. (4) The laser drawing apparatus according to claim 3, wherein the upper surface of the sample is drawn during continuous movement of the sample stage, and the lower surface of the sample is drawn when the sample stage returns. (5) Two sets of the polygon mirror and the blanking means are provided to irradiate the upper and lower surfaces of the sample with laser beams, and two sets of the buffer memories are also provided according to the blanking means, 2. A laser drawing apparatus according to claim 1, wherein a desired pattern is drawn simultaneously on an upper surface and a lower surface of the laser drawing apparatus.