JPS62257032A - 可変干渉装置 - Google Patents

可変干渉装置

Info

Publication number
JPS62257032A
JPS62257032A JP10298986A JP10298986A JPS62257032A JP S62257032 A JPS62257032 A JP S62257032A JP 10298986 A JP10298986 A JP 10298986A JP 10298986 A JP10298986 A JP 10298986A JP S62257032 A JPS62257032 A JP S62257032A
Authority
JP
Japan
Prior art keywords
interference device
variable interference
electrodes
cavity
reflectors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10298986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0446369B2 (zh
Inventor
Masanori Watanabe
昌規 渡辺
Masayuki Katagiri
片桐　真行
Masaya Hijikigawa
枡川　正也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP10298986A priority Critical patent/JPS62257032A/ja
Priority to GB8628157A priority patent/GB2186708B/en
Priority to US06/934,843 priority patent/US4859060A/en
Priority to DE19863640340 priority patent/DE3640340C2/de
Priority to DE3645238A priority patent/DE3645238C2/de
Publication of JPS62257032A publication Critical patent/JPS62257032A/ja
Priority to GB8911757A priority patent/GB2217839B/en
Publication of JPH0446369B2 publication Critical patent/JPH0446369B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP10298986A 1985-11-26 1986-04-30 可変干渉装置 Granted JPS62257032A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP10298986A JPS62257032A (ja) 1986-04-30 1986-04-30 可変干渉装置
GB8628157A GB2186708B (en) 1985-11-26 1986-11-25 A variable interferometric device and a process for the production of the same
US06/934,843 US4859060A (en) 1985-11-26 1986-11-25 Variable interferometric device and a process for the production of the same
DE19863640340 DE3640340C2 (de) 1985-11-26 1986-11-26 Variable Interferometeranordnung
DE3645238A DE3645238C2 (de) 1985-11-26 1986-11-26 Optischer Sensor
GB8911757A GB2217839B (en) 1985-11-26 1989-05-22 An optical sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10298986A JPS62257032A (ja) 1986-04-30 1986-04-30 可変干渉装置

Publications (2)

Publication Number Publication Date
JPS62257032A true JPS62257032A (ja) 1987-11-09
JPH0446369B2 JPH0446369B2 (zh) 1992-07-29

Family

ID=14342111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10298986A Granted JPS62257032A (ja) 1985-11-26 1986-04-30 可変干渉装置

Country Status (1)

Country Link
JP (1) JPS62257032A (zh)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4973120A (en) * 1989-05-01 1990-11-27 At&T Bell Laboratories Optical isolator with resonant cavity having gyrotropic material
JPH11167076A (ja) * 1997-09-19 1999-06-22 Commiss Energ Atom 集積型同調可能型ファブリペロット形干渉計
JP2010266876A (ja) * 2010-06-18 2010-11-25 Seiko Epson Corp 光学デバイス、光学デバイスの製造方法、波長可変フィルタ、波長可変フィルタモジュール、および光スペクトラムアナライザ
JP2013218194A (ja) * 2012-04-11 2013-10-24 Seiko Epson Corp 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、電子機器、及び波長可変干渉フィルターの駆動方法
JP2013242359A (ja) * 2012-05-18 2013-12-05 Seiko Epson Corp 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
JP2014074754A (ja) * 2012-10-03 2014-04-24 Seiko Epson Corp 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
US9372293B2 (en) 2012-08-30 2016-06-21 Seiko Espon Corporation Variable wavelength interference filter, optical module, electronic apparatus, and method of manufacturing variable wavelength interference filter
WO2016147908A1 (ja) * 2015-03-13 2016-09-22 国立大学法人豊橋技術科学大学 物理・化学センサ、物理・化学センサアレイおよび物理・化学センシングデバイス
US9658446B2 (en) 2013-03-18 2017-05-23 Seiko Epson Corporation Sealing structure, interference filter, optical module, and electronic apparatus
CN107250741A (zh) * 2014-12-29 2017-10-13 芬兰国家技术研究中心股份公司 用于光学干涉计的镜板及光学干涉计
CN110809711A (zh) * 2017-07-03 2020-02-18 芬兰国家技术研究中心股份公司 微机电(mems)法布里-珀罗干涉仪、其制造装置和方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63241434A (ja) * 1987-03-30 1988-10-06 Sharp Corp 可変干渉装置

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4973120A (en) * 1989-05-01 1990-11-27 At&T Bell Laboratories Optical isolator with resonant cavity having gyrotropic material
JPH11167076A (ja) * 1997-09-19 1999-06-22 Commiss Energ Atom 集積型同調可能型ファブリペロット形干渉計
JP4578587B2 (ja) * 1997-09-19 2010-11-10 コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ 集積型同調可能型ファブリペロット形干渉計
JP2010266876A (ja) * 2010-06-18 2010-11-25 Seiko Epson Corp 光学デバイス、光学デバイスの製造方法、波長可変フィルタ、波長可変フィルタモジュール、および光スペクトラムアナライザ
JP2013218194A (ja) * 2012-04-11 2013-10-24 Seiko Epson Corp 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、電子機器、及び波長可変干渉フィルターの駆動方法
US9389412B2 (en) 2012-05-18 2016-07-12 Seiko Epson Corporation Variable-wavelength interference filter, optical filter device, optical module and electronic apparatus
JP2013242359A (ja) * 2012-05-18 2013-12-05 Seiko Epson Corp 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
US9372293B2 (en) 2012-08-30 2016-06-21 Seiko Espon Corporation Variable wavelength interference filter, optical module, electronic apparatus, and method of manufacturing variable wavelength interference filter
JP2014074754A (ja) * 2012-10-03 2014-04-24 Seiko Epson Corp 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
US9658446B2 (en) 2013-03-18 2017-05-23 Seiko Epson Corporation Sealing structure, interference filter, optical module, and electronic apparatus
CN107250741A (zh) * 2014-12-29 2017-10-13 芬兰国家技术研究中心股份公司 用于光学干涉计的镜板及光学干涉计
CN107250741B (zh) * 2014-12-29 2018-06-05 芬兰国家技术研究中心股份公司 用于光学干涉计的镜板及光学干涉计
US10088362B2 (en) 2014-12-29 2018-10-02 Teknologian Tutkimuskeskus Vtt Oy Mirror plate for an optical interferometer and an optical interferometer
WO2016147908A1 (ja) * 2015-03-13 2016-09-22 国立大学法人豊橋技術科学大学 物理・化学センサ、物理・化学センサアレイおよび物理・化学センシングデバイス
CN110809711A (zh) * 2017-07-03 2020-02-18 芬兰国家技术研究中心股份公司 微机电(mems)法布里-珀罗干涉仪、其制造装置和方法

Also Published As

Publication number Publication date
JPH0446369B2 (zh) 1992-07-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees