JPS62255808A - 膜厚測定装置 - Google Patents

膜厚測定装置

Info

Publication number
JPS62255808A
JPS62255808A JP10006886A JP10006886A JPS62255808A JP S62255808 A JPS62255808 A JP S62255808A JP 10006886 A JP10006886 A JP 10006886A JP 10006886 A JP10006886 A JP 10006886A JP S62255808 A JPS62255808 A JP S62255808A
Authority
JP
Japan
Prior art keywords
scanning
signal
light beam
receiving element
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10006886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441924B2 (enrdf_load_stackoverflow
Inventor
Toshishige Nagao
永尾　俊繁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10006886A priority Critical patent/JPS62255808A/ja
Publication of JPS62255808A publication Critical patent/JPS62255808A/ja
Publication of JPH0441924B2 publication Critical patent/JPH0441924B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP10006886A 1986-04-29 1986-04-29 膜厚測定装置 Granted JPS62255808A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10006886A JPS62255808A (ja) 1986-04-29 1986-04-29 膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10006886A JPS62255808A (ja) 1986-04-29 1986-04-29 膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS62255808A true JPS62255808A (ja) 1987-11-07
JPH0441924B2 JPH0441924B2 (enrdf_load_stackoverflow) 1992-07-09

Family

ID=14264144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10006886A Granted JPS62255808A (ja) 1986-04-29 1986-04-29 膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS62255808A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0441924B2 (enrdf_load_stackoverflow) 1992-07-09

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