JPS622538U - - Google Patents

Info

Publication number
JPS622538U
JPS622538U JP9281985U JP9281985U JPS622538U JP S622538 U JPS622538 U JP S622538U JP 9281985 U JP9281985 U JP 9281985U JP 9281985 U JP9281985 U JP 9281985U JP S622538 U JPS622538 U JP S622538U
Authority
JP
Japan
Prior art keywords
wafers
advancing
suction pad
elevating section
retracting mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9281985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH038660Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9281985U priority Critical patent/JPH038660Y2/ja
Publication of JPS622538U publication Critical patent/JPS622538U/ja
Application granted granted Critical
Publication of JPH038660Y2 publication Critical patent/JPH038660Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP9281985U 1985-06-19 1985-06-19 Expired JPH038660Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9281985U JPH038660Y2 (enrdf_load_html_response) 1985-06-19 1985-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9281985U JPH038660Y2 (enrdf_load_html_response) 1985-06-19 1985-06-19

Publications (2)

Publication Number Publication Date
JPS622538U true JPS622538U (enrdf_load_html_response) 1987-01-09
JPH038660Y2 JPH038660Y2 (enrdf_load_html_response) 1991-03-04

Family

ID=30649953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9281985U Expired JPH038660Y2 (enrdf_load_html_response) 1985-06-19 1985-06-19

Country Status (1)

Country Link
JP (1) JPH038660Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH038660Y2 (enrdf_load_html_response) 1991-03-04

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