JPS622538U - - Google Patents

Info

Publication number
JPS622538U
JPS622538U JP9281985U JP9281985U JPS622538U JP S622538 U JPS622538 U JP S622538U JP 9281985 U JP9281985 U JP 9281985U JP 9281985 U JP9281985 U JP 9281985U JP S622538 U JPS622538 U JP S622538U
Authority
JP
Japan
Prior art keywords
wafers
advancing
suction pad
elevating section
retracting mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9281985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH038660Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9281985U priority Critical patent/JPH038660Y2/ja
Publication of JPS622538U publication Critical patent/JPS622538U/ja
Application granted granted Critical
Publication of JPH038660Y2 publication Critical patent/JPH038660Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP9281985U 1985-06-19 1985-06-19 Expired JPH038660Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9281985U JPH038660Y2 (cs) 1985-06-19 1985-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9281985U JPH038660Y2 (cs) 1985-06-19 1985-06-19

Publications (2)

Publication Number Publication Date
JPS622538U true JPS622538U (cs) 1987-01-09
JPH038660Y2 JPH038660Y2 (cs) 1991-03-04

Family

ID=30649953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9281985U Expired JPH038660Y2 (cs) 1985-06-19 1985-06-19

Country Status (1)

Country Link
JP (1) JPH038660Y2 (cs)

Also Published As

Publication number Publication date
JPH038660Y2 (cs) 1991-03-04

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