JPS6225244A - Method and instrument for measuring sticking dust - Google Patents
Method and instrument for measuring sticking dustInfo
- Publication number
- JPS6225244A JPS6225244A JP16407785A JP16407785A JPS6225244A JP S6225244 A JPS6225244 A JP S6225244A JP 16407785 A JP16407785 A JP 16407785A JP 16407785 A JP16407785 A JP 16407785A JP S6225244 A JPS6225244 A JP S6225244A
- Authority
- JP
- Japan
- Prior art keywords
- dust
- adhesive tape
- tape
- adhesive
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は部品に付着する塵埃を、粘着テープに転写して
顕微鏡で観察する付着塵埃の測定方法に係り）顕微鏡の
焦点合せ１容易にし、かつ、測定対象以外の塵埃に影響
されない測定方法を提案するものである。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a method for measuring adhering dust by transferring the adhering dust to an adhesive tape onto an adhesive tape and observing it with a microscope. , proposes a measurement method that is not affected by dust other than the measurement target.
部品の表面に付着する微細な塵埃が製品の性能上問題と
なることが多い。半導体ウェーハー・の如く表面が極め
て平滑な場合は、光を利用して付着塵埃を測定する方法
は行われているが、通常の金属や樹脂の表面に付着する
塵埃に関しては１測定がむずかしく、直接顕微鏡で観察
しようとしても、部品の材質、表面の色相や光沢に影響
されて必ずしも正しい観察ができない。Fine dust that adheres to the surface of parts often causes problems in terms of product performance. When the surface is extremely smooth, such as a semiconductor wafer, there is a method of measuring adhering dust using light, but when it comes to dust adhering to ordinary metal or resin surfaces, it is difficult to measure it directly. Even if you try to observe it with a microscope, it is not always possible to observe it correctly because it is affected by the material of the parts and the hue and gloss of the surface.
そこで、部品に付着する塵埃を、一旦、粘着テープに転
写して、そのテープをクリーンルーム内にて顕微鏡で観
察して、間接的に部品に付着する塵埃の数や大きさを調
べる方法が一般に行われている。Therefore, a common method is to first transfer the dust that adheres to parts onto adhesive tape, and then observe the tape under a microscope in a clean room to indirectly determine the number and size of the dust that adheres to parts. It is being said.
しかし、この方法には次の欠点があった。However, this method had the following drawbacks.
（１）塵埃がａ細で、数が少ない場合、顕微鏡の焦点合
せかやりにくい。(1) When the dust particles are small and small in number, it is difficult to focus the microscope.
（２）測定中に新たな塵埃がテープに付着しないように
クリーンルーム内で観察する必要がある６（５） 単
位面積当りの塵埃の数を観測するために顕微鏡の視野に
マス目や目盛を持つ特別のものが必要である。(2) It is necessary to observe in a clean room to prevent new dust from adhering to the tape during measurement.6 (5) A grid or scale is provided in the field of view of the microscope to observe the number of dust per unit area. You need something special.
本発明の目的は、従来性われている粘着テープによる塵
埃測定方法の１かかる欠点ご改善しく容易で、かつ正確
な測定方法ないしは装置を提案するものである０
〔発明の概要〕
本発明においては、部品に付着する塵埃を、たとえば粘
着面にマス目等の印刷を施した不透明な粘着テープに転
写し、これを直接１又は透明なガラスや樹脂を通して観
察することにより、容易な測定を行なおうとするもので
ある。The purpose of the present invention is to overcome one of the drawbacks of the conventional dust measuring method using an adhesive tape and to propose an easy and accurate measuring method or device. For example, dust adhering to parts can be easily measured by transferring it to an opaque adhesive tape with grids printed on the adhesive surface and observing it directly or through transparent glass or resin. This is what I am trying to do.
以下、本発明の一実施例を第１図〜第３図により説明す
る。An embodiment of the present invention will be described below with reference to FIGS. 1 to 3.
粘着面にマス目等の印刷を施した不透明な粘着テープ１
を適当な長さＧこ切断し、付Ｎ塵埃？測定しようとする
部品３に螢りつけ、部品に付着する塵埃を、テープ２に
転写する。このテープご清浄な透明ガラスまたは透明プ
ラスチック５に張り付ける。浮遊塵埃が付着しないよう
に、これまでの作業はクリーンルーム内で行う。テープ
の粘着面に転写された塵埃７を、透明ガラスまたは透明
プラスチックを透して顕微鏡４で観察する。Opaque adhesive tape 1 with squares printed on the adhesive side
Cut it to an appropriate length and attach it to dust. It is applied to the part 3 to be measured, and the dust adhering to the part is transferred to the tape 2. Affix this tape to clean transparent glass or transparent plastic 5. The work to date will be carried out in a clean room to prevent airborne dust from adhering. The dust 7 transferred to the adhesive surface of the tape is observed with a microscope 4 through transparent glass or transparent plastic.
第４図は本発明の他の実施例を示したｂのである。すな
わち１観察に使用する透明ガラスまたは透明プラスチッ
ク１０の片面に、マス目等の印刷を施したものを使用す
ることにより、粘潅テープに印刷したもの企使うことな
く、同様に効果をあげることができる。FIG. 4b shows another embodiment of the present invention. In other words, by using transparent glass or transparent plastic 10 used for 1 observation, with grids printed on one side, the same effect can be achieved without using adhesive tape printed on it. can.
本発明によれば、マス目印刷に焦点合せ？行うことによ
り測定対象部品から粘着テープに転写された塵埃を、容
易かつ迅速に顕微鏡で観察２゜することができ、またマ
ス目印刷を所定の寸法にすることにより、単位面積当り
の塵埃の数を容易に測ることができる。According to the present invention, focusing on grid printing? By doing this, it is possible to easily and quickly observe the dust transferred from the part to be measured onto the adhesive tape using a microscope, and by printing the squares to a predetermined size, the number of dust particles per unit area can be easily and quickly observed. can be easily measured.
更に、前述の如く透明ガラスまたは透明樹脂に張りつけ
て観察することにより、次の利点が。Furthermore, as mentioned above, observing by attaching it to transparent glass or transparent resin provides the following advantages.
ある。すなわち、観察したい塵埃７に顕微鏡の焦点を合
せているｔめ、ガラスまたは樹脂の厚みを充分とること
により表面の塵埃９は焦点深度外となり１明らかに区別
でき、また、不透明な粘着テープご使用することによっ
て、テープ粘着面の反対側の塵埃１０は、視野に映らな
い。be. In other words, when the microscope is focused on the dust 7 to be observed, by making the glass or resin sufficiently thick, the dust 9 on the surface will be out of the depth of focus and can be clearly distinguished, and when using opaque adhesive tape. By doing so, the dust 10 on the opposite side of the tape adhesive surface is not visible in the field of view.
このことは、顕微鏡による観察を、クリーンルーム外の
一般の環境で行うことができ、本発明の利点の一つとな
る。This allows observation using a microscope to be performed in a general environment outside a clean room, which is one of the advantages of the present invention.
第１図は粘着面に印刷を施した粘着テープの斜視図。第
２図はこの粘着テープ？使って、対象部品から塵埃を転
写しているところを表す斜視図。第３図は顕微鏡観測の
原理を表わす断面図。第４図は印刷を施したガラスに粘
着テープを張りつけているところを表わす斜視図。
１・・・粘着テープ
２・・・切断した粘着テープ
３・・・塵埃測定対象部品
４・・・顕微鏡
５・・・透明ガラス
６・・・粘着テープ
７・・・測定対象塵埃
８・・・印刷線
９．１０ ・・・測定対象外塵埃
１１・・・印刷を施したガラス
１２・・・粘着テープ
、−゛へFIG. 1 is a perspective view of an adhesive tape whose adhesive surface is printed. Is this the adhesive tape in Figure 2? FIG. Figure 3 is a cross-sectional view showing the principle of microscopic observation. FIG. 4 is a perspective view showing adhesive tape being attached to printed glass. 1... Adhesive tape 2... Cut adhesive tape 3... Parts to be measured for dust 4... Microscope 5... Transparent glass 6... Adhesive tape 7... Dust to be measured 8... Printed line 9.10 ... Dust not to be measured 11 ... Printed glass 12 ... Adhesive tape, to -゛
Claims (1)
の粘着テープを透明な板材に張りつけ、粘着テープもし
くは板材に付したマス目の中の塵埃を顕微鏡で観察して
少なくともその個数を計測する測定方法。 ２、塵埃を転写するための粘着面を有する粘着テープと
、この粘着テープの粘着面側を張りつける透明な板材と
、粘着テープにおける粘着面側および板材における粘着
テープ側のいずれか一方に表示されたマス目と、マス目
内の塵埃を板材を通して観察するための顕微鏡を有する
付着塵埃の測定装置。 ３、粘着テープを不透明なものとした特許請求の範囲第
２項記載の付着塵埃の測定装置。[Claims] 1. Transfer the dust adhering to the object to be measured onto an adhesive tape, apply the adhesive tape to a transparent plate, and observe the dust in the squares attached to the adhesive tape or the plate using a microscope. A measurement method that measures at least the number of pieces. 2. An adhesive tape with an adhesive surface for transferring dust, a transparent plate material to which the adhesive side of the adhesive tape is attached, and a label on either the adhesive side of the adhesive tape or the adhesive tape side of the plate material. A measurement device for adhering dust that has squares and a microscope for observing the dust within the squares through the plate material. 3. The attached dust measuring device according to claim 2, wherein the adhesive tape is opaque.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16407785A JPS6225244A (en) | 1985-07-26 | 1985-07-26 | Method and instrument for measuring sticking dust |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16407785A JPS6225244A (en) | 1985-07-26 | 1985-07-26 | Method and instrument for measuring sticking dust |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6225244A true JPS6225244A (en) | 1987-02-03 |
Family
ID=15786341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16407785A Pending JPS6225244A (en) | 1985-07-26 | 1985-07-26 | Method and instrument for measuring sticking dust |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6225244A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1495304A1 (en) * | 2002-04-01 | 2005-01-12 | Convey Technology Incorporated | Surface cleaning and particle counting |
| JP2017535768A (en) * | 2014-10-22 | 2017-11-30 | ジェデックス インコーポレイテッド | Test film for detection of surface particles in clean rooms |
| EP2834709B1 (en) * | 2012-04-02 | 2020-05-27 | ASML Netherlands B.V. | Particulate contamination measurement method and apparatus |
| JP2020079738A (en) * | 2018-11-13 | 2020-05-28 | ダイハツ工業株式会社 | Dirt evaluation method of vehicle component |
| US10845542B1 (en) | 2019-08-19 | 2020-11-24 | Afl Telecommunications Llc | Cable node transition assemblies |
-
1985
- 1985-07-26 JP JP16407785A patent/JPS6225244A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1495304A1 (en) * | 2002-04-01 | 2005-01-12 | Convey Technology Incorporated | Surface cleaning and particle counting |
| EP1495304A4 (en) * | 2002-04-01 | 2009-11-18 | Convey Technology Inc | Surface cleaning and particle counting |
| EP2834709B1 (en) * | 2012-04-02 | 2020-05-27 | ASML Netherlands B.V. | Particulate contamination measurement method and apparatus |
| JP2017535768A (en) * | 2014-10-22 | 2017-11-30 | ジェデックス インコーポレイテッド | Test film for detection of surface particles in clean rooms |
| JP2020079738A (en) * | 2018-11-13 | 2020-05-28 | ダイハツ工業株式会社 | Dirt evaluation method of vehicle component |
| US10845542B1 (en) | 2019-08-19 | 2020-11-24 | Afl Telecommunications Llc | Cable node transition assemblies |
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