JPS62248116A - Manufacture of magnetic head - Google Patents

Manufacture of magnetic head

Info

Publication number
JPS62248116A
JPS62248116A JP28968986A JP28968986A JPS62248116A JP S62248116 A JPS62248116 A JP S62248116A JP 28968986 A JP28968986 A JP 28968986A JP 28968986 A JP28968986 A JP 28968986A JP S62248116 A JPS62248116 A JP S62248116A
Authority
JP
Japan
Prior art keywords
ferrite
magnetic
head
magnetic material
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28968986A
Other languages
Japanese (ja)
Other versions
JPH0370282B2 (en
Inventor
Yoshiaki Shimizu
良昭 清水
Masaru Doi
勝 土井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP28968986A priority Critical patent/JPS62248116A/en
Publication of JPS62248116A publication Critical patent/JPS62248116A/en
Publication of JPH0370282B2 publication Critical patent/JPH0370282B2/ja
Granted legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE:To obtain a head with high quality by forming groove to one face of a ferrite wafer, adhering the magnetic substance by etching processing and incorporating a couple of wafers so as to compensate the deficiency in the saturated magnetic flux density without losing the recording/reproducing characteristic. CONSTITUTION:The surface of ferrite cores 10, 11 with respect to magnetic substances 12, 13 has ruggedness in the track width direction of the head and does not have a plane substantially in parallel with the operating gap constituting face of the head. Further, the highs and lows of adhered faces 16, 17 are opposed to each other respectively. The ferrite water 20 is cut out from an ingot at the core adhering face, slots 21a, 21b in parallel are cut from one face by using a dicing blade, the surface of the wafer is subject to etching processing and the magnetic substance is connected to the wafer 20. In such a case, the mixture ratio of the ferrite is increased, the ratio of alloy magnetic material is increased gradually and only the alloy magnetic material is used finally. then the surface of the magnetic substance is subject to mirror surface processing to incorporate the couple and a head chip is obtained through the slicing process.

Description

【発明の詳細な説明】 本発明は合金テープの様に抗磁力の大さい磁性媒体用と
して好適な磁気ヘッドの製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a magnetic head suitable for use with magnetic media having a large coercive force, such as alloy tape.

合金テープはその抗磁力が極めて大き〈従来のクローム
テープの2倍強にあたる1000エルステツド程度であ
る。この様に大きな抗磁力を有効に利用するためには磁
気ヘッドはその飽和磁束密度が十分に大きくなければな
らない。フェライトは耐摩耗性に対して有利に働らくが
その飽和磁束密度が小さい欠点があり、一方センダスト
(登碌商標)の様な合金系磁性材料は飽和磁束密度が大
きい反面、耐摩耗性及び高周波特性に関して劣っている
。したがって、これら両系の磁性材料を結合して、たと
えば1対のフェライトコアの各作動ギャップ構成面側に
、該コア材であるフェライトよりも飽和磁束密度の大さ
い磁性体をそれぞれ結合して磁気ヘッドを構成すること
は有用である。
Alloy tape has an extremely high coercive force (approximately 1000 oersted, which is more than twice that of conventional chrome tape). In order to effectively utilize such a large coercive force, the magnetic head must have a sufficiently large saturation magnetic flux density. Ferrite has an advantage in wear resistance, but has the disadvantage of a low saturation magnetic flux density.On the other hand, alloy magnetic materials such as Sendust (registered trademark) have a high saturation magnetic flux density, but have poor wear resistance and high frequency It is inferior in terms of characteristics. Therefore, by combining these two types of magnetic materials, for example, a magnetic material having a higher saturation magnetic flux density than that of the ferrite core material is bonded to each working gap forming surface of a pair of ferrite cores. It is useful to configure the head.

しかしこの様に異質の磁性材料を結合すると、その結合
面間の空隙が疑似の作動ギャップとして作用して録音特
性を損なう欠点がある。すなわち一般に磁気へラドコア
のコア表面に異種の物質を蒸着等により結合する場合に
はそのコア表面を予め猿回研摩して加工歪層を除去して
から行なうのが普通であるが、その場合その結合面が磁
気ヘッドの作動ギャップ構成面と平行になってそれが疑
似ギャップとして作用するのである。第1図は従来の磁
気へ・ソドのへラドコアの要部斜視図を示したものであ
り、図中(1)(21はフェライトコア、 +31(4
1はセンダスト等の合金系磁性体、(5jは結合材であ
るガラスを充填した作動キャップである。ここで、フェ
ライトコアと合金系磁性体との各結合面+61(71は
作動ギャップ+51とそねそれ平行になっていて、いわ
ゆる疑似キャップを構成する。矢印(8)ヲテープ走行
方向とした場合、記録時においてはテープ浸入側の疑似
キャップ(6)の影響はあまりないが、退出側の疑似ギ
ャップ(7)では不必要な信号が記録される。そして再
生時においては、この不必要な信号が両方の疑似ギャッ
プf6++71によって再生される可能性がある。
However, when dissimilar magnetic materials are bonded in this way, the gap between the bonded surfaces acts as a pseudo working gap, impairing recording characteristics. In other words, in general, when bonding a different type of material to the core surface of a magnetic herad core by vapor deposition or the like, the core surface is usually polished beforehand to remove the strained layer. The coupling plane is parallel to the plane constituting the working gap of the magnetic head, which acts as a pseudo gap. Figure 1 shows a perspective view of the main parts of a conventional magnet core.In the figure, (1) (21 is a ferrite core, +31 (4)
1 is an alloy magnetic material such as sendust, (5j is an actuation cap filled with glass as a bonding material. Here, each bonding surface +61 between the ferrite core and the alloy magnetic material (71 is the actuation gap +51 and its They are parallel to each other and form a so-called pseudo cap.If the tape is running in the direction of arrow (8), the pseudo cap (6) on the tape entry side does not have much influence during recording, but the pseudo cap (6) on the exit side An unnecessary signal is recorded in the gap (7), and during reproduction, there is a possibility that this unnecessary signal is reproduced by both pseudo gaps f6++71.

本発明はこのような欠点を解消するためにフェライトコ
アの磁性体に対する表面の形状を磁気ヘッドの作動ギャ
ップ構成面に対して実質的に平行な平蘭をもたないよう
に構成した磁気ヘッドの製造方法において、フェライト
ウェハをインゴ、フトから切り出す工程と%該フェライ
トウェハの一面に鋸歯状の溝を研削形成する工程と、そ
の溝を施した面をエツチング加工する工程と、該エツチ
ング加工された面に前記磁性体を結合する工程と、該磁
性体の表面を鏡面加工する工程と、該鏡面加工処理され
たフェライトウェハの一対を結合材で一体化する工程と
、その一体化物をスライシング加工する工程とによって
前記磁気ヘッドを製造する。
In order to eliminate such drawbacks, the present invention provides a magnetic head in which the surface shape of the ferrite core relative to the magnetic material is configured so that it does not have a flat surface that is substantially parallel to the plane that constitutes the working gap of the magnetic head. The manufacturing method includes a step of cutting a ferrite wafer from an ingot or foam, a step of grinding and forming sawtooth grooves on one side of the ferrite wafer, a step of etching the grooved surface, and a step of etching the etched surface. A step of bonding the magnetic material to a surface, a step of mirror-finishing the surface of the magnetic material, a step of integrating a pair of mirror-finished ferrite wafers with a bonding material, and slicing the integrated product. The magnetic head is manufactured by the following steps.

第2図は本発明によシ製造された磁気ヘッドの要部斜視
図を示したものであり、utmnnはフェライトコア、
α2α3はフェライトよりも飽和磁束密度が大きいセン
ダスト等の合金磁性材を含む磁性体、α滲はガラスを充
填した作動キャップである。フェライトコア(1G(u
nの磁性体(ls!(13に対する表面の形状は図に於
いて誇張して表わした様に、磁気ヘッドのトラック幅方
向(矢印(151)に対して凹凸を持ち。
FIG. 2 shows a perspective view of the main parts of the magnetic head manufactured according to the present invention, where utmnn is a ferrite core,
α2α3 is a magnetic material containing an alloy magnetic material such as Sendust, which has a higher saturation magnetic flux density than ferrite, and α2 is an operating cap filled with glass. Ferrite core (1G (u
As exaggerated in the figure, the surface shape of the magnetic material (13) of n is uneven in the track width direction (arrow (151)) of the magnetic head.

磁気ヘッドの作動キャップ構成面に対して実質的に平行
な平面を持たないように構成している。そして図中の角
度(α)(β)は望ましくは10’以上となるようにし
ている。尚、この角度の上限は磁性体の結合力によシ制
約を受ける。また、各結合面Gl’1l(1710山部
並び忙谷部はそれぞれ対向するようにしている。この磁
気ヘッドはフェライトコアと磁性体の結合面が作動ギャ
ップに対して平行とならないようにして、いわゆるアジ
マス・ロスを利用するようにしているから、記録時に結
合面Cl61において記録された不必要な信号は再生時
には結合面a1)1及び作動ギャップa4では再生され
に〈<、特に取扱い周波数が高いときにその傾向が大き
い。結合面αηにおける再生の可能性は第1図のものと
変らないとしても、総合して不必要な信号の再生される
割合は従来に比べて極めて少なくすることができる。尚
α&はテープ走行方向である。
It is configured so that it does not have a plane that is substantially parallel to the surface that constitutes the operating cap of the magnetic head. The angles (α) and (β) in the figure are preferably 10' or more. Note that the upper limit of this angle is limited by the binding force of the magnetic material. In addition, each coupling surface Gl'1l (1710 peaks and valleys are arranged to face each other. In this magnetic head, the coupling surface between the ferrite core and the magnetic material is not parallel to the working gap, Since the so-called azimuth loss is utilized, unnecessary signals recorded on the coupling surface Cl61 during recording are not reproduced on the coupling surface a1)1 and the working gap a4 during reproduction, especially when the handling frequency is high. Sometimes this tendency is significant. Although the possibility of reproduction at the coupling surface αη is the same as that shown in FIG. 1, the overall proportion of unnecessary signals that are reproduced can be extremely reduced compared to the conventional method. Note that α& is the tape running direction.

次に本発明においてフェライトコアの結合面の加工法に
ついて説明する。先ずM3図(イ)に示す様なフェライ
トウェハ(20をインゴットから切り出す。
Next, a method of processing the bonding surface of the ferrite core in the present invention will be explained. First, a ferrite wafer (20) as shown in Fig. M3 (a) is cut out from an ingot.

次いでこのウェハの1面にダイシングブレードによって
平行なa (21a 021 b)−・・を研削する。
Next, parallel a (21a 021 b)... is ground on one surface of this wafer using a dicing blade.

溝のピッチ(P)及びMさくD)はそれぞれたとえば1
)00)t、10μm位にしている。次いで、この溝を
施したウェハの表面を塩酸等にてエツチング加工をする
。これは、ウェハ製出時の加工歪やマイクロクラック等
を除去するためであり、従来の漉面研摩加工に代るもの
であり、その九めエツチングの深さは10声m以上とな
るようにしている。
The groove pitch (P) and M depth D) are each 1, for example.
)00)t is set to about 10 μm. Next, the surface of the wafer provided with the grooves is etched using hydrochloric acid or the like. This is to remove processing distortions and microcracks during wafer production, and is an alternative to the conventional surface polishing process, and the depth of the etching is 10 m or more. ing.

この様にして得た第3図(ロ)K示す様なフェライトウ
ェハK、磁性体を結合する方法としてはたとえばプラズ
マ溶射を利用することができる。これは溶射すべき物質
をプラズマ状にして結合する方法であるが、その結合力
を増加させしかも作動ギャップ部における合金磁性材の
割合を増すためKは溶射すべき磁性体としてフェライト
と合金磁性材との混合物を利用するようにして、初めは
フェライトの混合比を大きくそして次第に合金磁性材の
割合を増すようにして行き最後は合金磁性材のみとなる
ようにフェライトウェハ九に結合するようにすれば良い
。次いで、通常の製法通り、磁性体の表面を鏡面加工し
てその1対をガラス等の結合材で1体化し、更にスライ
シング等の工程を経てヘッドチップを得るようKしてい
る。
Plasma spraying, for example, can be used as a method for bonding the magnetic material to the thus obtained ferrite wafer K as shown in FIG. 3(b)K. This is a method of bonding the material to be sprayed in the form of plasma, but in order to increase the bonding force and increase the proportion of the alloy magnetic material in the working gap, K is used as the magnetic material to be sprayed using ferrite and alloy magnetic material. At first, the mixing ratio of ferrite is increased, and then the proportion of alloy magnetic material is gradually increased, until finally only the alloy magnetic material is bonded to the ferrite wafer. Good. Next, as in the usual manufacturing method, the surface of the magnetic material is mirror-finished, the pair is combined with a bonding material such as glass, and a head chip is obtained through a process such as slicing.

この様に本発明によシ製造された磁気ヘッドはフェライ
トコアにそれよりも飽和磁束密度の大きい合金系磁性材
を含む磁性体を結合するに当り、その結合面が疑似のキ
ャップを構成1.ないように。
As described above, in the magnetic head manufactured according to the present invention, when a magnetic material containing an alloy-based magnetic material having a higher saturation magnetic flux density than the ferrite core is coupled to the ferrite core, the coupling surface forms a pseudo cap.1. As if not.

その結合面の形状を、磁気ヘッドのトラック幅方向に対
して磁気ヘッドの作動ギャップ構成面に対して平行な平
面を持たないようにしたから、録再特性を損なうことな
く、フェライトコアの特長を活かししかもその欠点であ
るr!1和磁束密度の不足を補なうことができ、特に抗
磁力が大きく残留磁束密度の大きいいわゆる合金テープ
に対するものとして有用である。
The shape of the coupling surface is such that it does not have a plane parallel to the working gap structure plane of the magnetic head in the track width direction of the magnetic head, so the features of the ferrite core can be achieved without impairing the recording/reproducing characteristics. Take advantage of it and its drawbacks r! It can compensate for the lack of sum magnetic flux density, and is particularly useful for so-called alloy tapes that have a large coercive force and a large residual magnetic flux density.

そして、前記フェライトコアの前記磁性体に対する表面
の形状を磁気ヘッドの作動ギャップ構成面に対して平行
な平面をもたないようにするのに、上記実施例の如く凹
凸形状としているが、これは作動ギャップに対し直線的
に所定角度である場合(凹凸形状なき場合)に比し、6
性体の厚みを比較的均一に1つ薄くできるという利点が
わす、小型のビデオヘッドに有効となる。
In order to prevent the surface of the ferrite core from facing the magnetic body from having a plane parallel to the surface constituting the working gap of the magnetic head, it is made into an uneven shape as in the above embodiment. 6 compared to the case where the operating gap is at a predetermined angle linearly (without uneven shape).
This is effective for small-sized video heads, which has the advantage of being able to reduce the thickness of the magnetic body relatively uniformly by one level.

1だ、本発明の磁気ヘッドの製造方法では、鋸歯状の溝
加工の後にエツチング処理を施しているので、フェライ
トウェハの加工歪やマイクロクラック等が好適に除去さ
れ、その後のフェライトウェハに対する磁性体結合にお
ける結合力が増大して磁性体層の膜剥れや結合面におけ
る磁気抵抗の増大を防止−l゛ることができ、品質の良
い磁気ヘッドが得られる。
1. In the magnetic head manufacturing method of the present invention, etching is performed after sawtooth groove processing, so processing distortions and microcracks on the ferrite wafer are suitably removed, and the magnetic material is then removed from the ferrite wafer. The bonding force in the bonding is increased, and peeling of the magnetic layer and increase in magnetic resistance at the bonding surface can be prevented, and a high quality magnetic head can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の磁気ヘッドの要部斜視図である。 第2図は本発明の磁気ヘッドの要部斜視図である。 第3図(イ)(ロ)は溝加工を施こす前後のフェライト
ウェハの斜視図である。 αI(Iυ・・・1対のフェライトコア、 (12(1
3・・・磁性体、(161αη・・・凹凸を持ったコア
の結合面。
FIG. 1 is a perspective view of essential parts of a conventional magnetic head. FIG. 2 is a perspective view of essential parts of the magnetic head of the present invention. FIGS. 3A and 3B are perspective views of the ferrite wafer before and after groove processing. αI(Iυ...1 pair of ferrite cores, (12(1
3...Magnetic material, (161αη...Coupling surface of core with unevenness.

Claims (1)

【特許請求の範囲】[Claims] (1)対向する一対のフェライトコアの各作動ギャップ
構成面に該コア材であるフェライトよりも飽和磁束密度
の大きい磁性体をそれぞれ結合し、且つ前記フェライト
コアの前記磁性体に対する表面の形状を磁気ヘッドの作
動ギャップ構成面に対して実質的に平行な平面をもたな
いように構成した磁気ヘッドの製造方法であって、フェ
ライトウェハをインゴットから切り出す工程と、該フェ
ライトウェハの一面に鋸歯状の溝を研削形成する工程と
、その溝を施した面をエッチング加工する工程と、該エ
ッチング加工された面に前記磁性体を結合する工程と、
該磁性体の表面を鏡面加工する工程と、該鏡面加工処理
されたフェライトウェハの一対を結合材で一体化する工
程と、その一体化物をスライシング加工する工程とから
なる磁気ヘッドの製造方法。
(1) A magnetic material having a higher saturation magnetic flux density than the ferrite core material is bonded to each working gap forming surface of a pair of opposing ferrite cores, and the shape of the surface of the ferrite core relative to the magnetic material is magnetically A method of manufacturing a magnetic head configured to have no plane substantially parallel to a surface constituting an operating gap of the head, the method includes the steps of: cutting a ferrite wafer from an ingot; a step of forming a groove by grinding, a step of etching the grooved surface, and a step of bonding the magnetic material to the etched surface;
A method for manufacturing a magnetic head comprising the steps of mirror-finishing the surface of the magnetic material, integrating a pair of mirror-finished ferrite wafers with a bonding material, and slicing the integrated product.
JP28968986A 1986-12-04 1986-12-04 Manufacture of magnetic head Granted JPS62248116A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28968986A JPS62248116A (en) 1986-12-04 1986-12-04 Manufacture of magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28968986A JPS62248116A (en) 1986-12-04 1986-12-04 Manufacture of magnetic head

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP13135878A Division JPS5558824A (en) 1978-10-24 1978-10-24 Magnetic head

Publications (2)

Publication Number Publication Date
JPS62248116A true JPS62248116A (en) 1987-10-29
JPH0370282B2 JPH0370282B2 (en) 1991-11-07

Family

ID=17746470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28968986A Granted JPS62248116A (en) 1986-12-04 1986-12-04 Manufacture of magnetic head

Country Status (1)

Country Link
JP (1) JPS62248116A (en)

Also Published As

Publication number Publication date
JPH0370282B2 (en) 1991-11-07

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