JPS6224378B2 - - Google Patents
Info
- Publication number
- JPS6224378B2 JPS6224378B2 JP54126393A JP12639379A JPS6224378B2 JP S6224378 B2 JPS6224378 B2 JP S6224378B2 JP 54126393 A JP54126393 A JP 54126393A JP 12639379 A JP12639379 A JP 12639379A JP S6224378 B2 JPS6224378 B2 JP S6224378B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- sensitive body
- added
- moo
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 82
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 6
- 229910001887 tin oxide Inorganic materials 0.000 claims description 4
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 description 14
- 230000035945 sensitivity Effects 0.000 description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 7
- 239000001282 iso-butane Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- 238000001514 detection method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 1
- 150000003841 chloride salts Chemical class 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Compositions Of Oxide Ceramics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12639379A JPS5650168A (en) | 1979-10-02 | 1979-10-02 | Gas sensing body for reducing gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12639379A JPS5650168A (en) | 1979-10-02 | 1979-10-02 | Gas sensing body for reducing gas |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5650168A JPS5650168A (en) | 1981-05-07 |
| JPS6224378B2 true JPS6224378B2 (de) | 1987-05-28 |
Family
ID=14934021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12639379A Granted JPS5650168A (en) | 1979-10-02 | 1979-10-02 | Gas sensing body for reducing gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5650168A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR870001786B1 (ko) * | 1982-01-29 | 1987-10-10 | 카다 야마히도 하지로 | 냉난방 급탕장치 |
| JPS61186068U (de) * | 1985-05-10 | 1986-11-20 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51132893A (en) * | 1975-05-14 | 1976-11-18 | Toshiba Corp | Gas sensitive body |
-
1979
- 1979-10-02 JP JP12639379A patent/JPS5650168A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51132893A (en) * | 1975-05-14 | 1976-11-18 | Toshiba Corp | Gas sensitive body |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5650168A (en) | 1981-05-07 |
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