JPS62242836A - Standard grain dispersing device - Google Patents

Abstract

PURPOSE:To produce a standard sample under atmospheric pressure by providing a dispersing chamber, a cleaner, a separator, etc. CONSTITUTION:Clean air is injected into the dispersing chamber 1 from the cleaner 3 and discharged from its internal dust discharge port 6. The air from the cleaner 3 flows in the dispersing chamber 1 along the annular internal wall surface to send out dust sticking on the internal peripheral surface toward the discharge port 6 and the dust is discharged from the chamber with centrifugal force, thereby cleaning the inside of the chamber. Then a sample 5 is set on a sample table 4 from a sample intake outlet 7, the opening/closing door 7a of the intake outlet 7 is closed, and clean high-temperature air is supplied from the separator 2 at a high speed, thereby dispersing and atomizing standard grains or standard grains 8 diluted with an organic solvent at an orifice part 10. Thus, the grains are scattered in the dispersing chamber 1 in an uniform state and stick on the surface of the sample 5, thus producing the standard sample. The grains 8 are dispersed over the sample 5 uniformly and the door 7a is opened to take the sample 5 out of the intake outlet 7.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for preparing a standard sample used for adjusting and calibrating the dust detection sensitivity of a dust inspection apparatus.

[Prior art] Conventionally, this type of standard particle dispersion device has been used to maintain a high vacuum in a dispersion chamber, supply standard particles diluted with an organic solvent into the chamber, and use the pressure generated when the organic solvent evaporates to spread the standard particles. A method has been developed in which particles are dispersed onto the sample surface.

[Problems to be solved by the invention] The conventional method requires airtightness of the dispersion chamber and an expensive vacuum pump, resulting in an expensive and complicated device structure. There was a risk that the dust in the spraying chamber would be scattered due to the pressure change during the process of returning to atmospheric pressure, and that it would adhere to the sample.

SUMMARY OF THE INVENTION An object of the present invention is to provide a standard particle dispersion device that enables the preparation of standard samples under atmospheric pressure.

[Means for Solving the Problems] The standard particle dispersion device of the present invention includes a dispersion chamber that accommodates a sample;
Standard particles characterized by having a cleaner that cleans the dispersion chamber by supplying clean gas to the interior while exhausting the interior of the dispersion chamber, and a separator that disperses and atomizes the standard particles with pressurized gas and scatters the same into the dispersion chamber. It is a spraying device.

[Example] Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

In Figures 1 and 2, the dispersion chamber 1 has parallel side walls, and the inner wall between the two walls is annular. The lower is opened and an opening/closing door 7a is provided on the entrance/exit lower. Further, an exhaust port 6 is opened in the tangential direction of the annular inner wall at the bottom of the dispersion chamber, and an air inlet 3a is opened along the annular inner wall surface, and the air inlet 3a is connected to a cleaner 3 that pumps clean gas.

A pipe 9 is roughly connected to the dispersion chamber 1, a part of which is reduced in diameter to form an orifice part 10, a nozzle 12 extending from a tank 11 is opened to the orifice part 10, and standard particles 8 are placed in the tank 11. Alternatively, standard particles 8 diluted with an organic solvent are filled, thereby forming the separator 2. Also pipe 9
A gas pressure feeder 13 is connected to one end of the .

In the embodiment, first, clean gas is ejected from the cleaner 3 into the dispersion chamber 1 at high speed, and the dust inside is discharged from the exhaust port 6. Since the air supply port 3a from the cleaner 3 opens along the annular inner wall surface of the dispersion chamber 1, the gas flows inside the dispersion chamber 1 along the annular inner wall surface and adheres to the inner peripheral surface due to the action of centrifugal force. The dust or the dust floating in the room is sent out to the exhaust port 6 side, and since the exhaust port 6 is opened in the tangential direction of the annular inner wall surface of the dispersion chamber 1, the dust is discharged to the outside by the action of centrifugal force. The room becomes clean and clean.

Next, set the sample 5 on the sample stand 4 from the sample entrance/exit lower, close the opening/closing door 7a of the sample entrance/exit lower, and flow clean, high-temperature gas through the disperser 2 at high speed to dilute it with standard particles or organic solvent. The standard particles 8 are dispersed and atomized by the orifice portion 1G, uniformly scattered into the dispersion chamber 1, and deposited on the surface of the sample 5, thereby creating a standard sample.

After the standard particles are uniformly dispersed on the sample 5, the opening/closing door 7a is opened and the sample 5 is taken out from the sample entrance/exit lower, thereby completing the operation of this embodiment. In the present invention, standard particles are sprayed under atmospheric pressure inside and outside the spraying chamber 1, so when the sample 5 is taken out from the spraying chamber 1, excess standards remaining on the inner peripheral surface or bottom of the spraying chamber are removed. Dust such as particles is not scattered and attached to the sample 5. Cleaner 3 after the operation is finished
The inside of the dispersion chamber 1 is cleaned again in preparation for the next operation.

In the embodiment of the present invention, the gas from the disperser 2 was heated to a high temperature, but any clean gas may be used.

[Effects of the Invention] As explained above, the present invention uses a disperser and a cleaner to uniformly spray standard particles onto a sample one by one in a clean spraying chamber at atmospheric pressure, and the structure of the scattering chamber is This not only simplifies the process, but also eliminates the need for an expensive vacuum pump, and because the pressure inside and outside of the spraying chamber is atmospheric, when taking out the sample, excess standard particles that adhere to the spraying chamber and remain will be scattered as dust. This has the effect of making it possible to create a standard sample that does not adhere again and is optimal for adjusting and calibrating dust detection sensitivity.

[Brief explanation of drawings]

FIG. 1 is a sectional view of an embodiment of the present invention, and FIG. 2 is a left side view. 1...Dispersion chamber 2...Disperser 3...Cleaner 4...Sample stage 5...Sample 8...Standard particle Patent applicant Kyushu NEC Co., Ltd. Agent Patent attorney Naka Kanno, '/' Figure 1 Figure 2

Claims (1)

[Claims] (1) A dispersion chamber that houses the sample, a cleaner that purifies the dispersion chamber by sending clean gas into it while evacuating the interior, and a separation that disperses and atomizes standard particles using pressurized gas and scatters them into the dispersion chamber. A standard particle dispersion device characterized by having a container.