JPS62230641A - Production of optical fiber preform - Google Patents
Production of optical fiber preformInfo
- Publication number
- JPS62230641A JPS62230641A JP7479386A JP7479386A JPS62230641A JP S62230641 A JPS62230641 A JP S62230641A JP 7479386 A JP7479386 A JP 7479386A JP 7479386 A JP7479386 A JP 7479386A JP S62230641 A JPS62230641 A JP S62230641A
- Authority
- JP
- Japan
- Prior art keywords
- gel
- refractive index
- alcohol
- optical fiber
- leaching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 11
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000000499 gel Substances 0.000 claims abstract description 28
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 26
- 239000011240 wet gel Substances 0.000 claims abstract description 8
- 239000007864 aqueous solution Substances 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- -1 silicon alkoxide Chemical class 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 4
- 238000003980 solgel method Methods 0.000 claims description 4
- 238000002386 leaching Methods 0.000 abstract description 20
- 235000019441 ethanol Nutrition 0.000 abstract description 16
- 238000009826 distribution Methods 0.000 abstract description 12
- 229910052734 helium Inorganic materials 0.000 abstract description 5
- 239000007788 liquid Substances 0.000 abstract description 5
- 229910052732 germanium Inorganic materials 0.000 abstract description 3
- 150000004703 alkoxides Chemical class 0.000 abstract description 2
- 229910052801 chlorine Inorganic materials 0.000 abstract description 2
- 229910052719 titanium Inorganic materials 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 238000000034 method Methods 0.000 description 12
- 239000011521 glass Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 6
- 239000010453 quartz Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 238000004017 vitrification Methods 0.000 description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 235000011114 ammonium hydroxide Nutrition 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- QIVUCLWGARAQIO-OLIXTKCUSA-N (3s)-n-[(3s,5s,6r)-6-methyl-2-oxo-1-(2,2,2-trifluoroethyl)-5-(2,3,6-trifluorophenyl)piperidin-3-yl]-2-oxospiro[1h-pyrrolo[2,3-b]pyridine-3,6'-5,7-dihydrocyclopenta[b]pyridine]-3'-carboxamide Chemical compound C1([C@H]2[C@H](N(C(=O)[C@@H](NC(=O)C=3C=C4C[C@]5(CC4=NC=3)C3=CC=CN=C3NC5=O)C2)CC(F)(F)F)C)=C(F)C=CC(F)=C1F QIVUCLWGARAQIO-OLIXTKCUSA-N 0.000 description 1
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 229910002012 Aerosil® Inorganic materials 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- XGZNHFPFJRZBBT-UHFFFAOYSA-N ethanol;titanium Chemical compound [Ti].CCO.CCO.CCO.CCO XGZNHFPFJRZBBT-UHFFFAOYSA-N 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 description 1
- GXMNGLIMQIPFEB-UHFFFAOYSA-N tetraethoxygermane Chemical compound CCO[Ge](OCC)(OCC)OCC GXMNGLIMQIPFEB-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/016—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by a liquid phase reaction process, e.g. through a gel phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
- C03B2201/42—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn doped with titanium
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、ゾルゲル法による光ファイノ(用母材の製造
方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for producing a base material for an optical fin by a sol-gel method.
従来の光ファイバ用母材の製造方法は、一般に次の様な
方法がある。Conventional methods for manufacturing optical fiber preforms generally include the following methods.
■ MC’VD法(同村は法)
石英管中に、四塩化ケイ素とドーパントの四塩化ゲルマ
ニウムと酸素ガスを送り込み、石英・gの外部から、酸
水素炎で加熱すると、ドーパントを含むシリカ微粒子が
付着する。その付着層ごとにドーパント611度を連続
的に変化させ、屈折率分布を得る。■ MC'VD method (the village's method) Silicon tetrachloride, the dopant germanium tetrachloride, and oxygen gas are fed into a quartz tube, and when heated with an oxyhydrogen flame from the outside of the quartz tube, silica fine particles containing the dopant are adhere to. The dopant is continuously changed by 611 degrees for each deposited layer to obtain a refractive index distribution.
(リ ovpo法(外付は法)
石英ガラスの心棒の表面に、火炎加水分解反応でシリカ
微粒子を形成し、その後心棒を除去して加熱溶融し、形
成ノーごとに組成制御して屈折率分布を得る。(Ovpo method (external method) Silica fine particles are formed on the surface of a quartz glass mandrel through a flame hydrolysis reaction, then the mandrel is removed and heated and melted, and the composition is controlled for each formation to create a refractive index distribution. get.
■ WAD法(気相軸付は法)
出発材の先端に、火炎中で生成したシリカ微粒子を堆噴
して多孔質母材を形成し、電気炉中で透明母材とするも
ので、多孔質母材形成時に、母材の表面温度分布を利用
して屈折率分布を得る。■ WAD method (vapor phase attachment method) Silica fine particles generated in a flame are deposited on the tip of the starting material to form a porous base material, which is made into a transparent base material in an electric furnace. When forming a solid base material, the refractive index distribution is obtained using the surface temperature distribution of the base material.
〔発明が解決しようとする間4点〕
しかし前述の従来法では、製造速度が遅く高コストであ
る。[4 points to be solved by the invention] However, in the conventional method described above, the manufacturing speed is slow and the cost is high.
屈折率分布を得る為に、原料流量及び酸水素炎の温度を
厳密にコントロールする必要があるが、制御が困難であ
る等の問題点な有する。In order to obtain a refractive index distribution, it is necessary to strictly control the flow rate of the raw material and the temperature of the oxyhydrogen flame, but there are problems such as difficult control.
そこで不発1!J4は、かかる問題点を解決するもので
、その目的とするところは、高m度な屈折率分布を有し
、製造速度が速く、安価な光ファイバ用母材の製造方法
を提供するところにある。Misfire 1 there! J4 is intended to solve this problem, and its purpose is to provide a method for manufacturing an optical fiber base material that has a high refractive index distribution, is fast in manufacturing speed, and is inexpensive. be.
本発明の光ファイバ用母材の裂遣方法砿、ケイ素のアル
コキシドを主原料とする、ゾルゲル法による光ファイバ
用母材の製造において、義母材の屈折率を変化せしめる
元素を、予め添加した管状ゲル(ウェットゲル、ドライ
ゲル、焼結ゲル)を作製し、該管状ゲルのリーチングを
、アルコール、又(dアルコール水溶液を用いて行なう
ことを特徴とする。Method for splitting optical fiber preforms according to the present invention In the production of optical fiber preforms by the sol-gel method, which uses alkoxides of silicon as main raw materials, a tubular preform to which an element that changes the refractive index of the preform material is added in advance is used. The method is characterized in that a gel (wet gel, dry gel, sintered gel) is produced, and leaching of the tubular gel is performed using alcohol or (d-alcohol aqueous solution).
〔実施例−1〕
以下実施例に基づき本発明について、具体的に説明する
。[Example-1] The present invention will be specifically described below based on Examples.
テトラエトキシ7ラン208f(ノモル)、テトラエト
キシゲルマニウム101P(a4モル)に、PH10の
アンモニア水60−、エチルアルコール500m/l添
加し、充分攪拌・混合を行ないゾルとする。To 208f (nomoles) of tetraethoxy 7 run and 101P (a4 moles) of tetraethoxygermanium, 60ml of aqueous ammonia having a pH of 10 and 500ml of ethyl alcohol are added and thoroughly stirred and mixed to form a sol.
このゾルを第1図に示すポリプロピレン裂中心棒付容器
に注入しゲル化させる。This sol is poured into a polypropylene container with a rod shown in FIG. 1 and allowed to gel.
ここで1は容器、2は中心棒付蓋、3はゾルを示す。Here, 1 is a container, 2 is a lid with a center rod, and 3 is a sol.
その後中心棒を引き抜き、50〜70℃の温度で乾燥し
ドライゲル(外径5蝙φ、内径1.8fiφ、長さS
O,)とした後60℃/I(の昇温速度で800CXI
Hの焼結を行ない焼結ゲルとする。After that, the center rod was pulled out and dried at a temperature of 50 to 70°C.
800CXI at a heating rate of 60℃/I (
H is sintered to form a sintered gel.
次に第2図に示す如くリーチングを行なう。Next, leaching is performed as shown in FIG.
ここで11は容器、12は蓋、13は焼結ゲル14はリ
ーチング液(ここではエチルアルコール:水=1:1の
溶液)
所定時間経過後、リーチング液中のケイ素及びゲルマニ
ウムイオン一度を、ICP発元発光分光分析装置り定型
分析を行なう。Here, 11 is a container, 12 is a lid, and 13 is a sintered gel 14 is a leaching solution (here, a solution of ethyl alcohol:water = 1:1). After a predetermined period of time, silicon and germanium ions in the leaching solution are removed by ICP. Perform standard analysis using a source emission spectrometer.
第5図に、この時の経過時間とイオン一度の相関を示す
。FIG. 5 shows the correlation between the elapsed time and one ion.
ここで21はケイ素、22はゲルマニウムを示す。Here, 21 represents silicon and 22 represents germanium.
リーチングを5時間行なった焼結ゲルを、−昼夜(18
時間)室温で乾燥し九後、電気炉に投入し、室温から6
00℃まで60℃/Hの速度で昇温し、4素ガスを1.
5L/M流しながら1時間保持し、同・家の昇i品速度
で900℃まで昇温し、酸素ガスを0.517M流しな
がら30分間保持した。The sintered gel that had been leached for 5 hours was heated - day and night (18
After drying at room temperature for 9 hours, put it in an electric furnace and dry it at room temperature for 6
The temperature was raised to 00°C at a rate of 60°C/H, and the 4-element gas was heated to 1.
The mixture was held for 1 hour while flowing 5 L/M, then the temperature was raised to 900° C. at the same rate of increase, and the temperature was held for 30 minutes while flowing 0.517 M oxygen gas.
更に950℃まで同様に昇温し、ヘリウムガスを1ti
yt(jrtしながら30分間保持してガラス化した。Furthermore, the temperature was raised to 950°C in the same way, and 1ti of helium gas was added.
It was vitrified by holding it for 30 minutes under yt (jrt).
、44図に、この時の内壁から外壁へ至る各部の屈折率
の値を示す。, Figure 44 shows the refractive index values of various parts from the inner wall to the outer wall at this time.
ここで31は内壁、32は外壁を示す。Here, 31 indicates an inner wall, and 32 indicates an outer wall.
次にこのガラスを中実化して線引きすると、グレーティ
ラドインデックス型の石英ファイバが得られ、伝?S損
失は20dB/らであった。Next, by solidifying this glass and drawing it, a gray rad index type quartz fiber is obtained. The S loss was 20 dB/etc.
〔実m列−2〕
テトラエトキシ7ラン208f(1モル)、テトラエト
キシチタン38f(12モル)に、1規定の塩酸を15
0 td添加し、充分攪拌・混合を行ない加水分解して
ゾルとする。[Actual m row-2] Add 15% of 1N hydrochloric acid to 208f (1 mol) of tetraethoxy 7 run and 38f (12 mol) of tetraethoxy titanium.
Add 0 td, stir and mix thoroughly, and hydrolyze to form a sol.
このゾルを実施例1と同様にゲル化する。This sol is gelled in the same manner as in Example 1.
中心棒を引き抜き、ウェットゲル状態のまま第2図に示
す形態でリーチングを行なう。The center rod is pulled out and leaching is performed in the form shown in FIG. 2 while the wet gel state is maintained.
リーチング液14はエチルアルコールを使用した。Leaching liquid 14 used ethyl alcohol.
第5図に、この時の経過時間とイオン蹟度の相関を示す
。FIG. 5 shows the correlation between the elapsed time and the ion density.
ここで41はケイ素、42はチタンな示す。Here, 41 is silicon and 42 is titanium.
リーチングな5時間行なったウェットゲルを、50〜7
0℃の温度で乾燥し、ドライゲル(外径6W、、内径2
.、長さ60 am)とした後峨気炉に投入し、室温か
ら600℃/Hの速度で昇温し、塩素ガスを1.5t/
M流しながら2時間保持し、同様の昇温速度で900℃
まで昇温し、dRfgガスを117M流しながら30分
間保持した。更に950℃まで同様に昇温し、ヘリウム
ガスヲ1t/Mfiしながら60分間保持してガラス化
した。Wet gel that has been soaked for 5 hours is 50~7
Dry at a temperature of 0°C, dry gel (outer diameter 6W, inner diameter 2
.. , length 60 am), then placed in a deep air furnace, heated from room temperature at a rate of 600°C/H, and chlorine gas added at 1.5 t/H.
Hold for 2 hours while flowing M, and raise to 900℃ at the same temperature increase rate.
and held for 30 minutes while flowing dRfg gas at 117M. The temperature was further raised to 950° C. in the same manner, and held for 60 minutes while supplying 1 t/Mfi of helium gas to vitrify it.
第6図に、この時の内壁から外壁へ至る各部の屈折率の
値を示す。FIG. 6 shows the refractive index values of various parts from the inner wall to the outer wall at this time.
ここで51は内壁、52は外壁を示すつ次にこのガラス
を中実化して罐引きすると、クレーティントインデック
ス型の石英ファイバが得られ、伝送損失は15dB/に
であった。Here, reference numeral 51 indicates an inner wall, and reference numeral 52 indicates an outer wall. When this glass was solidified and canned, a crated index type quartz fiber was obtained, and the transmission loss was 15 dB/.
なお、リーチング液に水な使用してドライゲルを作製し
ガラス化する場合と、エチルアルコールを使用する場合
を比絞すると、水を使用した場合にガラス化後、割れが
多く発生する(歩留50%)のに対シ、エチルアルコー
ルの場合殆んど割れが発生しなかった(歩留98チ)
〔実施例−3〕
テトラエト−f−ジシラン208t(1モル)、テトラ
フルオロホウ酸アンモニウム52f(0,5モル)に、
PH10のアンモニア水20−、エチルアルコール70
ゴを添加し、充分攪拌・混合を行ない加水分解する。In addition, when comparing the case where dry gel is prepared and vitrified using water as the leaching liquid and the case where ethyl alcohol is used, more cracks occur after vitrification when water is used (yield 50 %), almost no cracking occurred in the case of ethyl alcohol (yield: 98 cm). 0.5 mol) to
PH10 ammonia water 20%, ethyl alcohol 70%
Add the ingredients and stir and mix thoroughly to hydrolyze.
更に微粉末シリカ(Aerosll−Ox50: アエ
ロジル社の表面積50gf/fの商品名)を50?添加
し、再度攪拌・混合を行ないゾルとするうこのゾルを実
施例1と同様にゲル化する。Furthermore, 50% of fine powdered silica (Aerosll-Ox50: a product name of Aerosil Co., Ltd. with a surface area of 50gf/f) was added. The sol is then gelled in the same manner as in Example 1.
中心棒を引き抜き、ウェットゲル状態のまま第2図に示
す形態でリーチングを行なう。The center rod is pulled out and leaching is performed in the form shown in FIG. 2 while the wet gel state is maintained.
リーチング液14はエチルアルコール:水=3:1の溶
液を使用した。As the leaching liquid 14, a solution of ethyl alcohol:water=3:1 was used.
この時のり一チング経過時間とイオン製産の相関は、実
施例2とほぼ同様の値であった。At this time, the correlation between the elapsed time and ion production was approximately the same as in Example 2.
リーチングを3時間行なったウェットグルを、40〜6
0℃のm度で乾燥し、ドライゲル(外匝&2ms+、内
径2fi、長さ6QQ−)とした後冴気炉に投入し、室
温から600℃まで50℃/Hの速度で昇温し、塩素ガ
スを2t/M流しながら2時間保持し、同様の4温速変
で900℃まで昇温し、酸素ガスをj、5t/M流しな
がら30分間保持した。更忙950℃まで同様に昇温し
、ヘリウムガスを117M流しながら30分間保持して
ガラス化した。Wet glue that has been leached for 3 hours is 40 to 6
After drying at 0°C m degrees and forming a dry gel (outer casserole & 2ms+, inner diameter 2fi, length 6QQ-), it was placed in a saekiro furnace, heated at a rate of 50°C/H from room temperature to 600°C, and heated with chlorine. The temperature was maintained for 2 hours while flowing 2 t/M of gas, and the temperature was raised to 900° C. with the same 4-temperature change, and maintained for 30 minutes while flowing oxygen gas at 5 t/M. The temperature was further increased to 950° C. in the same manner, and the mixture was held for 30 minutes while flowing helium gas at 117M to vitrify it.
第7図に、この時の内壁から外壁へ至る各部の屈折率の
値を示す。FIG. 7 shows the refractive index values of various parts from the inner wall to the outer wall at this time.
ここで61は内壁、62は外壁を示す。Here, 61 indicates an inner wall, and 62 indicates an outer wall.
次にこのガラスを中実化して線引きすると、クレーティ
ントインデックス型の石英ファイバが得られ、伝送損失
は1hdn/Kmであった。Next, this glass was solidified and drawn to obtain a crated index type quartz fiber with a transmission loss of 1 hdn/Km.
な2% リーチング液として水な使用した場合、やはり
ガラス化後に割れが発生(歩?!¥50チ)するのに対
し、アルコール水溶液な゛使用すると大巾に割れが減少
(歩留97%)し九。2% When water is used as a leaching solution, cracks still occur after vitrification (steps?! ¥50), but when an alcohol aqueous solution is used, cracks are greatly reduced (yield: 97%). Nine.
〔実施例−4〕
テトライノプロポキシシラン264F(1モル)へキサ
フルオロケイ酸2882(l102モル)ニ11規定の
塩1・亥を150−添加し、光分攪拌a混合を行ない加
水分解してゾルとする。[Example-4] Tetrainopropoxysilane 264F (1 mol), hexafluorosilicic acid 2882 (l 102 mol), 150% of a 11N salt was added, and the mixture was hydrolyzed by optical stirring and mixing. Sol.
このゾルを円筒状容器に注入し、棒状のウェットゲルと
した後、50〜70Cの温度で乾燥し、ドライゲル(外
径4.6 fi、長さS O,)とする。This sol is poured into a cylindrical container to form a rod-shaped wet gel, which is then dried at a temperature of 50 to 70 C to form a dry gel (outer diameter 4.6 fi, length SO,).
イソプロピルアルコールを入れ7ヒ容器中に、該ドライ
ゲルを入れリーチングを行なう。Place the dry gel in a container containing isopropyl alcohol and perform leaching.
リーチング/&中の、ゲイ索イオン及びフッ素イオン一
度と経過時間の相関は、実施例1とはtf同様の傾向を
示し虎。The correlation between gay ions and fluorine ions and elapsed time during leaching/& shows a tendency similar to tf in Example 1.
リーチングを5時間行なったドライゲルな、−昼夜(1
7時間)室温で乾燥した後、電気炉に投入し、呈湛から
600℃まで30℃/Hの速度で昇温し、塩素ガスを1
.5 L / M流しながら、1時間保持し、同様の昇
温速度で900℃まで昇温し、酸素ガスをCL5t/M
流しながら30分間保持した。更にqsacまで同様に
昇温し、ヘリウムガスを117M流しながら30分間保
持してガラス化した。Dry gel that has been leached for 5 hours - day and night (1
7 hours) After drying at room temperature, it was placed in an electric furnace and heated at a rate of 30°C/H from the initial state to 600°C, and chlorine gas was added to the
.. While flowing 5 L/M, hold for 1 hour, raise the temperature to 900°C at the same temperature increase rate, and add oxygen gas to CL5t/M.
It was held for 30 minutes while flowing. The temperature was further raised to qsac in the same manner, and the mixture was held for 30 minutes while flowing helium gas at 117M to vitrify it.
第8図に、この時の中心から外壁へ至る各部の屈Fr率
の値を示す。FIG. 8 shows the values of the refractive index of each part from the center to the outer wall at this time.
ここで72は外壁を示す。Here, 72 indicates an outer wall.
次にこのガラスを線引ぎする之、クレーティントインデ
ックス型の石英ファイバが得られ、伝送損失は10dB
/Kmであった。Next, by drawing this glass, a crated index type quartz fiber is obtained, with a transmission loss of 10 dB.
/Km.
な2、リーチング液として水9f使用した場合、やはり
ガラス化後に割れが発生(歩留75%)するのに対し、
アルコールを使用すると大巾に割れが減少(歩留98チ
〕した。2. When using 9f of water as the leaching liquid, cracks still occur after vitrification (yield: 75%);
When alcohol was used, cracks were significantly reduced (yield: 98 cm).
以上述べたように本発明によれば、ケイ素のアルコキシ
ドを主原料とする、ゾルゲル法による光ファイバ用母材
の製造において、該母材の屈折率を変化せしめる元素を
、予め添加した管状ゲル(ウェットゲル、ドライゲル、
焼結ゲル)を炸裂し、該管状ゲルのリーチングな、アル
コール、又はアルコール水溶液を用いて行なうことによ
り、母材の屈折率を変化せしめる元素を溶出せしめる結
果、高精度な屈折率分布を有し、製造速度が速く、安価
な光ファイバ用母材の製造が可能となる。As described above, according to the present invention, in the production of an optical fiber base material by the sol-gel method using silicon alkoxide as the main raw material, a tubular gel ( wet gel, dry gel,
By exploding a sintered gel and leaching the tubular gel using alcohol or an aqueous alcohol solution, elements that change the refractive index of the base material are eluted, resulting in a highly accurate refractive index distribution. , it becomes possible to manufacture optical fiber preforms at high manufacturing speed and at low cost.
特にリーチング後に、アルコール、又はアルコール水溶
液を使用することにより、歩留の大巾向上及びリーチン
グ後の工程における条件中の拡大等各種の利点を有する
。In particular, by using alcohol or an aqueous alcohol solution after leaching, there are various advantages such as greatly improving the yield and expanding the conditions in the post-leaching process.
更に本発明の手法は、該光ファイバ用母材のみでなく、
セル7才ツクレンズ等各禰の光学部品にも適用可能であ
るという効果を有する。Furthermore, the method of the present invention applies not only to the optical fiber base material, but also to
It has the effect of being applicable to various types of optical components such as cell 7-year-old lenses.
第1図は本発明の実施例におけるゾル注入容器の断面図
。
W、2図は本発明の実施例におけるリーチングの概念図
。
第3図は本発明の実施例における、リーチング処理時間
とイオン濃度の相関図。
WX4図は本発明の実施例における、ガラス各部の屈折
率分布図。
第5図は本発明の他の実施例に2ける、リーチング処理
時間とイオン濃度の相関図。
86図は本発明の他の実施例における、ガラス各部の屈
折率分布図。
第7図は本発明の更に他の実施列における、ガラス各部
の屈折率分布図。
第8図は本発明の更に別の実施列に2げる、ガラス各部
の屈折率分布図。
以上
出願人 セイコーエプソン株式会社
4f劇人 弁理十冊ト 務 仙1名
第11
第2因
+41
く 。
?
0 72B+ 夕 6 (H)
祷 関
第3図
0 2 4 6 峙)
゛中、りからの臣寓象
第4yA
C) 1 2−345(H)時間
第5図
0 2 4 1;(m、)
甲戊°炉らの距離
第 6 (4
02特徴<、−−)
甲lしφらの距禽1
第7図
o z4 ζ−
YtCtPらの顕康−
第a図FIG. 1 is a sectional view of a sol injection container in an embodiment of the present invention. W. Figure 2 is a conceptual diagram of leeching in an embodiment of the present invention. FIG. 3 is a correlation diagram between leaching treatment time and ion concentration in an example of the present invention. Figure WX4 is a refractive index distribution diagram of each part of the glass in an example of the present invention. FIG. 5 is a correlation diagram of leaching treatment time and ion concentration in another example 2 of the present invention. Figure 86 is a refractive index distribution diagram of each part of the glass in another embodiment of the present invention. FIG. 7 is a refractive index distribution diagram of each part of the glass in still another embodiment of the present invention. FIG. 8 is a refractive index distribution diagram of each part of the glass according to still another embodiment of the present invention. Applicants: Seiko Epson Corporation 4F Drama, 10 patent attorneys, 1 attorney, 11, 2nd cause + 41. ? (m, ) Distance of Kobo et al. No. 6 (4 02 feature <, --) Koshishiφ et al.'s distance 1 Fig. 7
Claims (1)
る光ファイバ用母材の製造において、該母材の屈折率を
変化せしめる元素を、予め添加した管状ゲル(ウェット
ゲル、ドライゲル、焼結ゲル)を作製し、該管状ゲルの
リーチングを、アルコール、又はアルコール水溶液を用
いて行なうことを特徴とする光ファイバ用母材の製造方
法。In the production of optical fiber base materials using the sol-gel method, which uses silicon alkoxide as the main raw material, tubular gels (wet gels, dry gels, sintered gels) are created by adding elements that change the refractive index of the base material in advance. A method for producing an optical fiber base material, characterized in that the tubular gel is leached using alcohol or an alcohol aqueous solution.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7479386A JPS62230641A (en) | 1986-04-01 | 1986-04-01 | Production of optical fiber preform |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7479386A JPS62230641A (en) | 1986-04-01 | 1986-04-01 | Production of optical fiber preform |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62230641A true JPS62230641A (en) | 1987-10-09 |
Family
ID=13557530
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7479386A Pending JPS62230641A (en) | 1986-04-01 | 1986-04-01 | Production of optical fiber preform |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62230641A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02120247A (en) * | 1988-10-28 | 1990-05-08 | Shin Etsu Chem Co Ltd | Silica-titania glass and method producing the same |
-
1986
- 1986-04-01 JP JP7479386A patent/JPS62230641A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02120247A (en) * | 1988-10-28 | 1990-05-08 | Shin Etsu Chem Co Ltd | Silica-titania glass and method producing the same |
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