JPS62229016A - Pattern inspecting device - Google Patents

Pattern inspecting device

Info

Publication number
JPS62229016A
JPS62229016A JP7347586A JP7347586A JPS62229016A JP S62229016 A JPS62229016 A JP S62229016A JP 7347586 A JP7347586 A JP 7347586A JP 7347586 A JP7347586 A JP 7347586A JP S62229016 A JPS62229016 A JP S62229016A
Authority
JP
Japan
Prior art keywords
line sensor
forming substrate
pattern
control
pattern forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7347586A
Other languages
Japanese (ja)
Inventor
Tomohide Watanabe
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP7347586A priority Critical patent/JPS62229016A/en
Publication of JPS62229016A publication Critical patent/JPS62229016A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To achieve a higher measuring efficiency and a lower equipment cost, by performing an inspection and a measurement at various parts based on image information obtained with one line sensor.
CONSTITUTION: A pattern forming substrate 16 as an object 4 to be measured is placed on a X-table 3, a Y-table 4 and a turn table 5 separately driven by a table control section 15 controlled with a computer 16 for control. Light emitted from an illumination light source 1 is converted by a lens 2 to light the pattern forming substrate 6. Pattern information on the pattern forming substrate 6 is focused on a line sensor 8 with a lens 7 and converted to an electrical signal according to the density thereof. The signal is read out by a line sensor control section 9 and inputted into a shape defect inspector section 10, a pattern edge detector section 11 and a image quality measuring section 12 separately.
COPYRIGHT: (C)1987,JPO&Japio
JP7347586A 1986-03-31 1986-03-31 Pattern inspecting device Pending JPS62229016A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7347586A JPS62229016A (en) 1986-03-31 1986-03-31 Pattern inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7347586A JPS62229016A (en) 1986-03-31 1986-03-31 Pattern inspecting device

Publications (1)

Publication Number Publication Date
JPS62229016A true JPS62229016A (en) 1987-10-07

Family

ID=13519339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7347586A Pending JPS62229016A (en) 1986-03-31 1986-03-31 Pattern inspecting device

Country Status (1)

Country Link
JP (1) JPS62229016A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6774945B1 (en) 1999-10-18 2004-08-10 Hewlett-Packard Development Company, L.P. Focusing apparatus for image recording system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6774945B1 (en) 1999-10-18 2004-08-10 Hewlett-Packard Development Company, L.P. Focusing apparatus for image recording system

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