JPS62228124A - Spectroscopic apparatus - Google Patents

Abstract

PURPOSE:To measure the spatial distribution of light emitting sources with high energy efficiency, by a method wherein the lights emitted from light sources distributed in a space are incident to two adjacent surfaces of a regular polygonal rotary mirror and the reflected lights therefrom are separately condensed by a condensing means and at least two spectroscopic means spectrally diffracting the condensed light are provided. CONSTITUTION:The luminous flux reflected from the A-surface 2a of a polygonal rotary mirror 2 is converged by A-surface condensing matter 13 and condensed to an incident slit 18 by utilizing reflecting mirrors 14, 15, 17 and a condensing matter 16. Subsequently, the incident luminous flux is projected on a dispersing element 20 by a collimation mirror 19 and further incident on an emitting slit 22 by a collimation mirror 21. As mentioned above, only light having a specific wavelength is detected by an A-surface reflected light detector 10. The luminous flux reflected from the B-surface 2b of the polygonal rotary mirror 2 is converged by condensing matter 23 to be condensed to an incident slit 27 by utilizing reflecting mirrors 24, 26 and condensing matter 25, and dispersed by a dispersing element 28 through the incident slit 27 to be detected by a B-surface reflected light detector 11. By this method, the lights from light sources 1 distributed in a space can be simultaneously measured by utilizing different spectroscopes.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a spectroscopic device, and particularly to a spectroscopic device that measures the spatial distribution of a light emitting source.

[Background of the invention]

Although high-speed spectrometers for the purpose of one-hour resolution have been used in the past, there are almost no known devices for spectroscopically measuring the spatial distribution of light emitting sources such as plasma.

As a method to achieve spatial and temporal resolution at the same time,
One possible method is to rotate a regular polygonal rotating mirror m (hereinafter referred to as a polygonal rotating mirror) and condense the reflected light onto a spectrometer using a condensing optical system, but as the polygonal rotating mirror becomes larger, There is a limit due to the processing technology and the number of layers in the drive as the elastic moment increases, resulting in extremely low energy efficiency. A method of arranging a large number of spectrometers side by side is also considered, and although this method is advantageous in terms of energy, it has a problem in that the cost increases rapidly as the number of spatial resolution points increases.

[Purpose of the invention]

An object of the present invention is to provide a spectroscopic device that can measure the spatial distribution of a light emitting source with high energy efficiency using such a polygonal rotating mirror system.

[Summary of the invention]

The present invention provides a regular polygonal surface rotating mirror into which light emitted from a light source distributed in space is incident, and the light that is incident on two adjacent surfaces of the regular polygonal surface rotating mirror and reflected from the two surfaces, respectively. It is characterized by comprising a light condensing means for condensing light, and at least two spectroscopic means for dividing the light condensed by the condensing means/means.

The present invention allows light to simultaneously enter two adjacent surfaces of a multifaceted rotating mirror without using a light amount dividing means such as a semi-transparent mirror,
By guiding the reflected light in two different directions, and by using two small condensing optical systems, it is possible to condense the light into two spectroscopic means, for example, to achieve the desired purpose. It made it possible. Further, the effect can be significantly exhibited when substantially equal amounts of light are guided simultaneously to two or more spectroscopic means.

[Embodiments of the invention]

FIGS. 2 and 3 are explanatory diagrams of the basic configurations of different embodiments of the present invention. In these figures, 1 is black light @l
A light source distributed in a space consisting of a, lb..., etc., 2 rotates around a rotation center 3 and forms an A plane 2a.

A polygonal rotating mirror having 8 surfaces 2b, etc., 4 is the rotation direction of the polygonal rotating mirror 2, 5 is the center of the space where the light source is distributed, and the polygonal rotating mirror 2
Straight lines connecting the centers of , 6a and 6b.

2a, A side of 8th side 2b, 8th side offset, 8a.

8b is the A-plane and B-plane skin rays; 9 is the light source 1 distributed in space;
And multi-plane rotation! ! ! A condensing object provided between 2,
10.11 is the A surface for detecting the reflected light rays 8a and 8b from the A surface 2a and 13 surface 2b, respectively.

A B-plane reflected light detector is shown.

When the polygonal rotation tlt2 is arranged as shown in FIG. 1, the light emitted from the light source 1 distributed in space is considered to be a collection of point light sources such as black light @la, lb, etc., and 1, for example, The lights 6a and 6b emitted from the point light source 1a spread in the space as waves, and the light 6d emitted from the one point light source 1b, for example, similarly spreads in the space as waves. That is, these rays 6 a e 6 b y 6 c y 6
Each of d e 6 e has the property of light distributed in space. Therefore, when the polygon rotating mirror 2 is rotating in the rotation direction 4 around the rotation center 3, the A plane 2a,
The light irradiated onto the eight surfaces 2b is divided into an A surface skin light beam 8a and a B surface skin light beam AIJI8b based on the A surface offset 7a and the B surface offset 7b, and positional scanning of the light source is performed. That is, while performing the positional scanning of the light source in this way, there is an effect that the light beam can be divided simultaneously, under the same conditions, and with the same efficiency.

In Fig. 3, a condensing object 9 made of a lens or the like is provided between the light source 1 distributed in space and the polygonal rotating mirror 2 to enable more efficient measurement of the distribution characteristics. ．． If the B-plane reflected light detector 10 is provided, the same thing can be measured at the same time.

FIG. 1 is an explanatory diagram of the configuration of an embodiment of the spectroscopic apparatus of the present invention, and the same parts as in FIGS. 2 and 3 are given the same reference numerals. In this figure, reference numeral 12 indicates a reflecting mirror that guides the light beam 6 generated from the light source 1 distributed in space to the polygonal rotating mirror 2, and the optical path between the A surface 2a of the polygonal rotating mirror 2 and the A surface skin light detector 10 is , A picture condensing object 139 reflecting mirror 141 reflecting mirror 15. Focusing object 16° reflection fi17. Entrance slit 18. Collime mirror 19, two-distributed cord 20. The optical path between the 8 surfaces 2b of the polygonal rotating mirror 2, which is composed of collimating mirrors 21, and the B-surface reflected light detector 11 includes a B-image condensing object 239, a reflecting mirror 24. Focusing object 259 Reflector 26. It is composed of an entrance sleeve 82, two dispersion elements 28.

In the spectroscopic device of this embodiment, there is one point light source 1a.

A light source 1 distributed in a space that can be thought of as a collection of objects such as 1b, etc. is guided to a polygonal rotating mirror 2 using a 1-reflector 12, where it is divided into 2 beams by the A surface 2a and the 8th surface 2b, and each In other words, the light beam reflected on the A surface 2a of the polygonal rotation fi2 is narrowed down by the A image condensing object 13,
15.17 and the incident slit 18 using the condensing object 16
The light is focused on. At this time, depending on the spread of the light flux, a condensing object may be further provided to suppress the spread of the light flux. The light flux that entered through the entrance slit 18 is projected onto the dispersion element 20 by the collimating mirror 19.
Furthermore, the collimating mirror 21 enters the exit slit 22. By doing this, only light of a specific wavelength can be
It is detected by the surface reflection light detector 10.

In addition, the light flux reflected by the 8 surfaces 2b of the polygonal rotating mirror 2 is narrowed down by the B-image condensing object 23, and is
The light is then focused onto the entrance slit 27 using the light focusing object 25 . In this case, as in the case of the A-plane, a condensing object may be further provided.

Next, the light flux that entered through the entrance slit 27 is dispersed by a dispersion element 28 and detected by the B-plane pressure-injection photodetector 11.

In this way, the light emitted from the light source 1 distributed in space can be measured simultaneously using different spectrometers. Then, when the polygonal rotating mirror 2 is rotated in the rotational direction 4 using a pulse motor or the like, light emitted from the light source 1 distributed in space enters the A-image condensing object 13 and the B-image condensing object 23 in synchronization with the rotation. The field of view changes as shown in FIGS. 4(a), (b), (0), and (d). In FIG. 4, the same parts as in FIGS. 1 and 2 are given the same reference numerals. In this way, the field of view incident on the A-picture condensing object 13 and the B-picture condensing object 23 changes because of the polygonal rotating mirror 2 and the A-picture condensing object 13 or the B-picture condensing object 23.
There is a certain gap between the light source 1 which is distributed in space.
The range in which light emitted from a certain point 1, for example, a single point light source 1a, enters the A-image focusing object 13 and the B-image focusing object 23 is limited, and in (c) and (d) of FIG. This shows the case where it goes out of range, which means that
If we consider the light source 1 distributed in space as a collection of point light sources, we will show that the light source 1 distributed in space can be divided by rotating the polygonal rotating mirror 2. Therefore, by rotating the polygonal rotating mirror 2. In this case, a spatially resolved measurement of the light source 1 distributed in space is obtained by the A-plane or B-plane reflected light detection alo or 11. Then, spatially resolved data corresponding to the number of rotation steps necessary to change the -plane is obtained.

That is, by dividing the light source 1 distributed in space, spatially resolved measurement can be performed.

Also, this multi-sided rotation 1! ! When the adjacent corners of 2 are rotated onto the straight line connecting the center of space 1 where the light source is distributed and the center of polygonal rotating mirror 2, the state is the same as the beginning, so spatially resolved measurements are performed in the same manner as described above. . That is, spatially resolved measurement is performed after a certain period of time has elapsed. This is the reason why we use a polygonal rotating mirror.For example, the number of divisions per rotation is 8.
If it is a surface, eight pieces of time-resolved data at the same position, shifted by the time required for one surface to change, can be obtained from the reflected light detector during one rotation of the polygon rotating mirror. Therefore, when the need for spatial resolution is high, the number of faces of the polygonal rotating mirror can be reduced and the rotation step can be made small, and when the need for time resolution is high, the number of faces of the polygonal rotating mirror can be increased and the rotation step is reduced. You can achieve your goal by increasing .

Note that it is also possible to provide a light amount splitting means after the condensing optical system so that the light is condensed and incident on three or more spectroscopic means. At least two types of spectroscopic means are used. For example, when using spectroscopic means with spectral bands in the ultraviolet and visible ranges, when using those with spectral bands in the ultraviolet-visible range and in the infrared range, When at least two spectral bands partially or completely overlap, or when using a dispersive bone spectrometer and a non-dispersive spectrometer such as a Fourier spectrometer, a filter spectrometer and a Fourier spectrometer are used. Various devices can be used, such as when using a non-filter spectroscopic device such as the following.

According to the spectroscopic device of this embodiment, when performing positional division measurement of a spread light source or a composite light source consisting of a plurality of light sources, the light beam is equally divided into two while performing positional scanning. It is possible to carry out different types of measurements simultaneously. Then, one beam of light can be split into two under the same conditions and with the same efficiency. Therefore, simultaneous measurements can be performed. Also, since it is possible to measure light of different wavelengths at the same time by using a spectrometer,
In addition to shortening measurement time and increasing efficiency, simultaneous measurements can be performed and test results can be viewed simultaneously.

Compared to conventional methods, it is possible to achieve significantly higher efficiency.

〔Effect of the invention〕

INDUSTRIAL APPLICABILITY The present invention makes it possible to provide a spectroscopic device that can measure the spatial distribution of a light emitting source with high energy efficiency using a polygonal rotating mirror system, and has great industrial effects.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram of the configuration of an embodiment of the spectroscopic device of the present invention,
2 and 3 are similarly explanatory diagrams of the basic configuration of different embodiments, and FIG. 4 is an explanatory diagram of the principle. 1... Light source distributed in space (consisting of black light wXla, lb..., etc.), 2... Polygonal rotating mirror (having A surface 2a, B surface 2b, etc.), 6, 6a, 6b, 6c, 6d. 6e...Light rays, 8a, 8b...A surface, B surface reflected rays. 9... Focusing object, 10.11... A side, B side pressure radiation detector, 12... Reflecting mirror, 13... A image focusing object,
14゜15.17... Reflector, 1G... Focusing object,
18... Entrance slit, 19.21... Collimer mirror, 20... 2-dispersion element, 22... Output slit,
23...B image condensing object, 24.26...Reflector, 2
5...Condensing object, 27...Incidence slit, 28...
・Dispersion element. ·fish

Claims (1)

[Claims] 1. A regular polygonal rotating mirror into which light emitted from a light source distributed in space is incident, and the light incident on two adjacent surfaces of the regular polygonal rotating mirror and reflected from the two surfaces. What is claimed is: 1. A spectroscopic device comprising: a condensing means that separately condenses the light, and at least two spectroscopic means that separates the light condensed by the condensing means. 2. Claim 1, wherein the light condensing means is two light condensing means each having equal positive and negative deviations with respect to a straight line connecting the center of the space and the center of the regular polygonal rotating mirror.
3. The spectroscopic device according to claim 1 or 2, wherein the spatial device 3 and the spectroscopic means are at least two spectroscopic means having different spectral bands. 4. The spectroscopic device according to claim 1 or 2, wherein the spectroscopic means is at least two types of spectroscopic means having different spectroscopic operations. 5. The spectroscopic device according to claim 1 or 2, wherein the spectroscopic means has a light amount dividing means and three or more spectroscopic means.