JPS6222576U - - Google Patents

Info

Publication number
JPS6222576U
JPS6222576U JP11367085U JP11367085U JPS6222576U JP S6222576 U JPS6222576 U JP S6222576U JP 11367085 U JP11367085 U JP 11367085U JP 11367085 U JP11367085 U JP 11367085U JP S6222576 U JPS6222576 U JP S6222576U
Authority
JP
Japan
Prior art keywords
substrate
absence
slit
light
transmitted light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11367085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11367085U priority Critical patent/JPS6222576U/ja
Publication of JPS6222576U publication Critical patent/JPS6222576U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Geophysics And Detection Of Objects (AREA)
JP11367085U 1985-07-26 1985-07-26 Pending JPS6222576U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11367085U JPS6222576U (enExample) 1985-07-26 1985-07-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11367085U JPS6222576U (enExample) 1985-07-26 1985-07-26

Publications (1)

Publication Number Publication Date
JPS6222576U true JPS6222576U (enExample) 1987-02-10

Family

ID=30995694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11367085U Pending JPS6222576U (enExample) 1985-07-26 1985-07-26

Country Status (1)

Country Link
JP (1) JPS6222576U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012179676A (ja) * 2011-03-01 2012-09-20 Disco Corp 透明板状物のエッジ検出装置及び研削装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012179676A (ja) * 2011-03-01 2012-09-20 Disco Corp 透明板状物のエッジ検出装置及び研削装置

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