JPS6222085B2 - - Google Patents
Info
- Publication number
- JPS6222085B2 JPS6222085B2 JP5548481A JP5548481A JPS6222085B2 JP S6222085 B2 JPS6222085 B2 JP S6222085B2 JP 5548481 A JP5548481 A JP 5548481A JP 5548481 A JP5548481 A JP 5548481A JP S6222085 B2 JPS6222085 B2 JP S6222085B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- recess
- sample stage
- groove
- specimen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 20
- 230000003746 surface roughness Effects 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 10
- 239000007787 solid Substances 0.000 claims description 7
- 238000005259 measurement Methods 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000004439 roughness measurement Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5548481A JPS57171203A (en) | 1981-04-15 | 1981-04-15 | Measuring method and device for surface coarseness of film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5548481A JPS57171203A (en) | 1981-04-15 | 1981-04-15 | Measuring method and device for surface coarseness of film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57171203A JPS57171203A (en) | 1982-10-21 |
| JPS6222085B2 true JPS6222085B2 (enrdf_load_stackoverflow) | 1987-05-15 |
Family
ID=12999891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5548481A Granted JPS57171203A (en) | 1981-04-15 | 1981-04-15 | Measuring method and device for surface coarseness of film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57171203A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2663116A1 (fr) * | 1990-06-07 | 1991-12-13 | Armines | Appareil de mesure de parametres physiques de surface d'un solide. |
| CN105547233B (zh) * | 2016-01-29 | 2018-01-26 | 山东省建筑科学研究院 | 一种装配式剪力墙粗糙面现场取样装置和取样方法 |
-
1981
- 1981-04-15 JP JP5548481A patent/JPS57171203A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57171203A (en) | 1982-10-21 |
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