JPS6222085B2 - - Google Patents

Info

Publication number
JPS6222085B2
JPS6222085B2 JP5548481A JP5548481A JPS6222085B2 JP S6222085 B2 JPS6222085 B2 JP S6222085B2 JP 5548481 A JP5548481 A JP 5548481A JP 5548481 A JP5548481 A JP 5548481A JP S6222085 B2 JPS6222085 B2 JP S6222085B2
Authority
JP
Japan
Prior art keywords
film
recess
sample stage
groove
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5548481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57171203A (en
Inventor
Yukihisa Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP5548481A priority Critical patent/JPS57171203A/ja
Publication of JPS57171203A publication Critical patent/JPS57171203A/ja
Publication of JPS6222085B2 publication Critical patent/JPS6222085B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
JP5548481A 1981-04-15 1981-04-15 Measuring method and device for surface coarseness of film Granted JPS57171203A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5548481A JPS57171203A (en) 1981-04-15 1981-04-15 Measuring method and device for surface coarseness of film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5548481A JPS57171203A (en) 1981-04-15 1981-04-15 Measuring method and device for surface coarseness of film

Publications (2)

Publication Number Publication Date
JPS57171203A JPS57171203A (en) 1982-10-21
JPS6222085B2 true JPS6222085B2 (enrdf_load_html_response) 1987-05-15

Family

ID=12999891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5548481A Granted JPS57171203A (en) 1981-04-15 1981-04-15 Measuring method and device for surface coarseness of film

Country Status (1)

Country Link
JP (1) JPS57171203A (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2663116A1 (fr) * 1990-06-07 1991-12-13 Armines Appareil de mesure de parametres physiques de surface d'un solide.
CN105547233B (zh) * 2016-01-29 2018-01-26 山东省建筑科学研究院 一种装配式剪力墙粗糙面现场取样装置和取样方法

Also Published As

Publication number Publication date
JPS57171203A (en) 1982-10-21

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