JPS62216411A - Unidirection converter for surface acoustic wave - Google Patents

Unidirection converter for surface acoustic wave

Info

Publication number
JPS62216411A
JPS62216411A JP3316387A JP3316387A JPS62216411A JP S62216411 A JPS62216411 A JP S62216411A JP 3316387 A JP3316387 A JP 3316387A JP 3316387 A JP3316387 A JP 3316387A JP S62216411 A JPS62216411 A JP S62216411A
Authority
JP
Japan
Prior art keywords
electrodes
electrode
surface acoustic
converter
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3316387A
Other languages
Japanese (ja)
Other versions
JPS6350883B2 (en
Inventor
Kimio Shibayama
柴山 乾夫
Hiroaki Sato
弘明 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP3316387A priority Critical patent/JPS62216411A/en
Publication of JPS62216411A publication Critical patent/JPS62216411A/en
Publication of JPS6350883B2 publication Critical patent/JPS6350883B2/ja
Granted legal-status Critical Current

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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To obtain a unidirection converter having no spurious by defining the section of one cycle of an array of earth electrodes as a fundamental section and equalizing the length of this fundamental section to an even-fold wavelength of a surface acoustic wave and equalizing lengths of inter-electrode gaps in the fundamental section to one another and specifying the gap and the length between electrodes CONSTITUTION:Gaps (d) between electrodes are equal to one another, and a length l1 between the center of the gap between electrodes 1 and 3 and that between electrodes 1 and 2 is equal to a length l2 between the center of the gap between electrodes 3 and 1 and that between electrodes 2 and 1. Electrodes are arranged periodically with a section L1 from the wider meandering electrode to the following wider meandering electrode 1 or a section L2 from the center of the narrower meandering electrode 1 to the following narrower meandering electrode 1 as the fundamental section. Electrodes 1 and 3 are so formed that a length (y) between centers of gaps on both dies of the electrode 3 is equal to lambda0/2 where lambda0 is the wavelength of an excited or received surface acoustic wave.

Description

【発明の詳細な説明】 弾性表面波変換器は、現在電気通信用フィルタ、遅延線
、光IC回路、実時間フーリエ変換器、テレビ用ゴース
トキャンセラー等に幅広く使われている。
DETAILED DESCRIPTION OF THE INVENTION Surface acoustic wave transducers are currently widely used in telecommunication filters, delay lines, optical IC circuits, real-time Fourier transformers, ghost cancellers for televisions, and the like.

しかし乍ら、従来の変換器は圧電基板上に単にすだれ状
電極を配置し、電気的には、全面にわたって同相で励振
する方法が主にとられているため、励振及び受信変換器
の内部に強い定在波が発生し、その前後に波を出すいわ
ゆる双方向性特性になる。
However, conventional transducers simply place interdigital electrodes on a piezoelectric substrate, and electrically, the main method is to excite in the same phase over the entire surface, so the inside of the excitation and reception transducer A strong standing wave is generated, and waves are emitted before and after the standing wave, resulting in a so-called bidirectional characteristic.

このため、不要部に波を放出したり多重反射を生じる等
の問題を起し、低損失特性や低リツプル特性が得られな
くなる。
This causes problems such as emitting waves to unnecessary parts and causing multiple reflections, making it impossible to obtain low loss characteristics and low ripple characteristics.

この問題を解決する方法として、電気的励振位相を適当
に異ならせて一方向特性を得る方法が開発され好結果が
得られている。しかし乍ら、この方法は一つの基板上に
少なくとも三種類の相異る電極を設ける必要があるため
、電極を引き出す際に問題が生じ、各電極を低結合状態
で交叉させる方法をとるかどれか一本を変換器内で蛇行
させる方法をとらねばならない。前者には、電極の空隙
交叉という問題があり、後者には従来励振源の一部に空
白部分が生じたり又、振源の大きさが不揃いになる等の
問題があった。
As a method of solving this problem, a method of obtaining unidirectional characteristics by appropriately varying the electrical excitation phase has been developed, and good results have been obtained. However, this method requires at least three different types of electrodes to be provided on one substrate, which causes problems when drawing out the electrodes, and it is difficult to find a way to intersect each electrode in a low-coupling state. A method must be adopted in which one of the two wires is made to meander within the converter. The former has the problem of intersecting gaps between the electrodes, and the latter has conventional problems such as a blank area appearing in a part of the excitation source and irregularities in the size of the excitation source.

本発明は、後者の方法の欠点をなくすために、電極間の
ギャップの大きさ及び配置に工夫をこらしたもので、振
源の大きさ及び位相の不揃いをなくすることを特徴とす
る。
In order to eliminate the drawbacks of the latter method, the present invention is characterized by devising the size and arrangement of the gap between the electrodes, and eliminating irregularities in the size and phase of the vibration sources.

この様にすることにより、通過域付近では十分な方向性
をもつ低リツプル特性が得られ広い周波数範囲でスプリ
アス特性のない一方向変換器が得られる。
By doing so, a unidirectional converter can be obtained that has low ripple characteristics with sufficient directivity near the passband and has no spurious characteristics in a wide frequency range.

本発明の一方向性変換器の構成及び動作を詳述すると次
の様になる。
The structure and operation of the unidirectional converter of the present invention will be described in detail as follows.

第1図は、圧電基板上に作成された本発明の変換器であ
る。電極1は蛇行接地電極であり、電極2は基準となる
励振用電極である。電極3は電極2に加えられる電気的
信号よりθ(ラジアン)位相を遅らせた信号を与えるた
めの励振用電極である。第2図は実際に弾性表面波を励
振する部分の断面図であり電、極1.2J、はそれぞれ
第1図の電極1.2.3.に相当する。ここで、各電極
間のギャップdは全て等しく、さらに電極1.30間の
ギャップの中心と電極1.21間のギャップの中心間の
距離は、電極3.11間のギャップの中心と電極2.1
1間のギャップの中心間距離に等しく、その大きさはe
とする。又、この電極は基本区間をLl又はL2として
周期的になっている。
FIG. 1 is a transducer of the invention fabricated on a piezoelectric substrate. Electrode 1 is a meandering ground electrode, and electrode 2 is a reference excitation electrode. The electrode 3 is an excitation electrode for providing a signal whose phase is delayed by θ (radians) from the electrical signal applied to the electrode 2. FIG. 2 is a cross-sectional view of the part that actually excites surface acoustic waves, and the electrodes 1.2J and 1.2J in FIG. 1 are respectively the electrodes 1.2.3. corresponds to Here, the gaps d between the electrodes are all equal, and the distance between the center of the gap between electrodes 1.30 and the center of the gap between electrodes 1.21 and 2. .1
is equal to the center-to-center distance of the gap between 1 and its size is e
shall be. Further, this electrode is periodic with the basic section being Ll or L2.

一般に弾性波の伝搬定数をβとするとき、位相がθだけ
遅れた電気信号で誘起される弾性的応力は見掛上(θ/
β)だけ遠い点で位相遅れのない信号で誘起された応力
に等しくなる。従って波の伝搬方向をXとするとき、X
の正方向からみた見掛のS振源分布は第3図のようにな
り、Xの負方向からみた振源分布は第4図のようになる
。両図で点線は、電極3によって生じた振源であり、実
線は電極2によって生じた振源である。今基本区間L1
又はL2を2周期とする波(波長λ0)について考える
と !−λo / n−・・・・・・−・・・ (1)とし
て (但し、iは正整数) −・・・ (2)なるときに第
4図で示される振源が全て相殺されるので、第3図で示
されるXの正方向成分のみ残り、一方向特性が得られる
Generally, when the propagation constant of an elastic wave is β, the elastic stress induced by an electrical signal whose phase is delayed by θ is apparently (θ/
β) is equal to the stress induced by a signal with no phase lag at a point far away. Therefore, when the direction of wave propagation is X,
The apparent S source distribution viewed from the positive direction is as shown in Figure 3, and the apparent source distribution viewed from the negative X direction is as shown in Figure 4. In both figures, the dotted line is the vibration source caused by electrode 3, and the solid line is the vibration source caused by electrode 2. Now basic section L1
Or if we consider a wave (wavelength λ0) with two periods of L2! -λo/n-・・・・・・-... (1) (where i is a positive integer) -... (2) When it becomes, all the oscillation sources shown in Figure 4 are canceled out. Therefore, only the positive direction component of X shown in FIG. 3 remains, and a unidirectional characteristic is obtained.

特にn=4/#、θ−π/2の場合は、第3図で示され
る振源は、全体に亘って振巾及び位相関係を揃えること
が出来るので周波数特性は第5図の実線のようにスプリ
アス成分のない特性が得られる。
In particular, in the case of n=4/#, θ-π/2, the amplitude and phase relationship of the vibration source shown in Figure 3 can be made uniform throughout, so the frequency characteristics are as shown by the solid line in Figure 5. Characteristics free of spurious components can be obtained.

第5図の実線は変換器の順方向(この場合Xの正方向)
に対する特性であり、点線は逆方向(Xの負方向)に対
する特性である。一点鎖線は従来の蛇行型の一方向変換
器の特性例でa点、b点に大きなスプリアス特性が生じ
ている。
The solid line in Figure 5 is the forward direction of the converter (in this case, the positive direction of X)
The dotted line is the characteristic for the opposite direction (negative direction of X). The dashed-dotted line is an example of the characteristics of a conventional meandering type unidirectional converter, in which large spurious characteristics occur at points a and b.

上述の方法と同様の考え方で第6図のように各位相の電
極を数個まとめて配置し、そのギャップ間の距離i)を
θ−7として式(1) 、(2)が成立するようにして
も同様の良好な特性が得られる。
Using the same concept as the above method, several electrodes of each phase are arranged together as shown in Fig. 6, and the distance i) between the gaps is set as θ-7, so that equations (1) and (2) hold. However, similar good characteristics can be obtained.

励振の場合を主に述べたが、受信側では、弾性表面波は
圧電作用によって上述の励振機構と逆の過程で電気量に
変換されるので、上述の構成をとることにより一方向性
の受信変換器になる。
Although we have mainly described the case of excitation, on the receiving side, surface acoustic waves are converted into electrical quantities by piezoelectric action in a process opposite to the above-mentioned excitation mechanism, so by adopting the above configuration, unidirectional reception can be achieved. Become a converter.

このように本発明の変換器は、電極間のギヤツする条件
を代表としてn=2π/(θ+(21−1)π)(if
;を正整数)、θ=π/2なる関係をトjjつようにし
たものであり、θの許容値として±10%が許される。
In this way, the converter of the present invention has the following conditions: n = 2π/(θ+(21-1)π)(if
; is a positive integer) and θ=π/2, and the allowable value of θ is ±10%.

さらに同様の構成で、変換器部の電界の漏洩を防ぐため
第7図のように部分的に誘電体薄膜10をつけ、その上
に共通接地電極11を蒸着する方法で作成された変換器
及び幅の広い電極部分を第8図のように2分割、3分割
して構成した変換器も本発明の中に含まれるものとする
Furthermore, a converter and a converter with the same structure were fabricated by applying a dielectric thin film 10 partially as shown in FIG. The present invention also includes a converter in which a wide electrode portion is divided into two or three parts as shown in FIG.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、弾性表面波用一方向性変換器の構造。 第2図は、変換器の断面と各電極及びギャップの配置。 第3図は、弾性表面波の進行方向(順方向)に対する励
振源の分布。 第4図は、弾性表面波の進行方向と逆の方向(逆方向)
に対する励振源の分布。 第5図は、本発明の変換器の順方向及び逆方向の周波数
特性例と従来の一方向変換器の順方向周波数特性例。 第6図は、第2図の基本型と同−考え方を用い、各位相
の電極をまとめて配置した例。 第7図は、電気的シールド用電極を備けた場合の構造。 第8図は、各電極を細分化して実施した場合の構造を示
す。 1、  蛇行型の接地用電極、2.  基準となる励振
用電極、3.   θだけ位相の遅れた信号を加えるた
めの電極、4.・−・圧電又は電歪基板、“  5.?
!電極による振源、6.・−電極3による振源、7. 
 本発明の変換器による順方向特性、8.−  本発明
の変換器による逆方向特性、9、−  従来の一方向変
換器による順方向特性、10、 − 誘電体薄膜、11
.  ・金属薄膜からなる接地電極
Figure 1 shows the structure of a unidirectional transducer for surface acoustic waves. Figure 2 shows the cross section of the transducer and the arrangement of each electrode and gap. Figure 3 shows the distribution of excitation sources in the direction of travel (forward direction) of surface acoustic waves. Figure 4 shows the direction opposite to the traveling direction of surface acoustic waves (opposite direction).
distribution of excitation sources for FIG. 5 shows an example of forward and reverse frequency characteristics of the converter of the present invention and an example of forward frequency characteristics of a conventional unidirectional converter. FIG. 6 is an example in which the electrodes of each phase are arranged together using the same concept as the basic type shown in FIG. 2. FIG. 7 shows a structure provided with an electrical shielding electrode. FIG. 8 shows a structure in which each electrode is subdivided. 1. Meandering grounding electrode; 2. An excitation electrode serving as a reference; 3. an electrode for adding a signal whose phase is delayed by θ; 4.・--Piezoelectric or electrostrictive substrate, " 5.?
! Vibration source using electrodes, 6. - Vibration source by electrode 3, 7.
Forward characteristics by the converter of the present invention, 8. - Reverse characteristics by the converter of the present invention, 9, - Forward characteristics by the conventional unidirectional converter, 10, - Dielectric thin film, 11
..・Ground electrode made of metal thin film

Claims (1)

【特許請求の範囲】[Claims]  蛇行接地電極1を有する圧電型弾性表面波用一方向変
換器において、基準になる励振電極2と接地電極1の間
のギャップの大きさがθ(ラジアン)だけ位相の遅れた
信号を加えるための励振電極3と接地電極1の間のギャ
ップの大きさに等しく、且つ、ギャップの中心間距離(
l)がn分の一波長とするとき、n=2π/(θ+(2
i−1)π)、(但しiは正整数)、で且つθ=π/2
なる関係にある弾性表面波用一方向変換器及び、θが上
記条件より±10゜以内にある弾性表面波用一方向変換
器。
In a piezoelectric surface acoustic wave unidirectional transducer having a meandering ground electrode 1, the size of the gap between the reference excitation electrode 2 and the ground electrode 1 is such that a signal whose phase is delayed by θ (radians) is added. equal to the size of the gap between the excitation electrode 3 and the ground electrode 1, and the distance between the centers of the gap (
l) is one-nth wavelength, n=2π/(θ+(2
i-1) π), (where i is a positive integer), and θ=π/2
A unidirectional transducer for surface acoustic waves having the following relationship, and a unidirectional transducer for surface acoustic waves in which θ is within ±10° from the above condition.
JP3316387A 1987-02-18 1987-02-18 Unidirection converter for surface acoustic wave Granted JPS62216411A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3316387A JPS62216411A (en) 1987-02-18 1987-02-18 Unidirection converter for surface acoustic wave

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3316387A JPS62216411A (en) 1987-02-18 1987-02-18 Unidirection converter for surface acoustic wave

Publications (2)

Publication Number Publication Date
JPS62216411A true JPS62216411A (en) 1987-09-24
JPS6350883B2 JPS6350883B2 (en) 1988-10-12

Family

ID=12378881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3316387A Granted JPS62216411A (en) 1987-02-18 1987-02-18 Unidirection converter for surface acoustic wave

Country Status (1)

Country Link
JP (1) JPS62216411A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4918758B2 (en) * 2005-07-06 2012-04-18 凸版印刷株式会社 Temperature calibration method for spherical surface acoustic wave device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3866154A (en) * 1973-12-03 1975-02-11 Westinghouse Electric Corp Broadband unidirectional surface wave transducer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3866154A (en) * 1973-12-03 1975-02-11 Westinghouse Electric Corp Broadband unidirectional surface wave transducer

Also Published As

Publication number Publication date
JPS6350883B2 (en) 1988-10-12

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