JPS62215850A - Photometric apparatus for emission spectrum analysis - Google Patents

Photometric apparatus for emission spectrum analysis

Info

Publication number
JPS62215850A
JPS62215850A JP6030386A JP6030386A JPS62215850A JP S62215850 A JPS62215850 A JP S62215850A JP 6030386 A JP6030386 A JP 6030386A JP 6030386 A JP6030386 A JP 6030386A JP S62215850 A JPS62215850 A JP S62215850A
Authority
JP
Japan
Prior art keywords
output
photomultiplier tube
voltage
converted
photometric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6030386A
Other languages
Japanese (ja)
Other versions
JPH0668467B2 (en
Inventor
Naoki Imamura
直樹 今村
Isao Fukui
福井 勲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP6030386A priority Critical patent/JPH0668467B2/en
Publication of JPS62215850A publication Critical patent/JPS62215850A/en
Publication of JPH0668467B2 publication Critical patent/JPH0668467B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

PURPOSE:To attain to perfectly automate the adjustment of sensitivity, by feeding back the detection output of a photomultiplier tube to the voltage applied to the photomultiplier tube and operating a photometric value from the amplifying degree, which is converted using the correlation data of the applied voltage and an amplifying degree, and the detection output. CONSTITUTION:The output of a photomultiplier tube 1 is converted to a voltage signal by a parallel circuit of a resistor R and a condenser C, and the voltage signal is amplified by an amplifier 2 to obtain detection output Va which is, in turn, compared with reference voltage Vb by a differential amplifier 3 and the comparing output is inputted to a negative high voltage power source circuit 4. The voltage Vd applied to the photomultiplier tube 1 is controlled by the output of the circuit 4 and the amplifying degree (f) of the photomultiplier tube 1 is changed. The voltage Vd is converted to a digital value by an A/D converter 5 to be read in a microprocessor 6 and said digital value is converted to the amplifying degree (f) using the correlation data of the voltage Vd and amplifying degree (f) preliminarily stored in a memory. The output Va is divided by the amplifying degree (f) to output a photometric value to an output apparatus 7. By this method, the adjustment of the sensitivity of a photometric apparatus can be automated perfectly.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は高周波プラズマ発光のような発光分光分析に用
いる測光装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a photometric device used for emission spectroscopic analysis such as high-frequency plasma emission.

(従来技術) 高周波誘導プラズマ等で試料を発光させ、試料中に含有
されている元素の足指分析を行う場合、h−慟^h1し
仏血上jl’ll亭・ −書、プハ鴫 々二専償に推定
含有量に合わせてそれぞれ異なった測定感度を設定する
必要がある。例えば特開昭59−99336号で提案さ
れた装置は、標準試料における各元素の測定出力の目標
値をあらかじめメモリに記憶させておき、順次プログラ
ムによってメモリから読み出したデータに基づいて光電
子増倍管の感度を自動調整するものであり、オペレータ
の作業負担を軽減するという利点があるが、あらかじめ
各試料について目標推定値を設定しておく必要がある上
に、実際の含有量が推定範囲を超えると分析ができなく
なるという欠点がある。
(Prior art) When performing toe analysis of elements contained in a sample by making the sample emit light using high-frequency induced plasma, etc., it is necessary to analyze the elements contained in the sample. It is necessary to set different measurement sensitivities depending on the estimated content. For example, in the device proposed in JP-A No. 59-99336, target values for the measurement output of each element in a standard sample are stored in memory in advance, and a photomultiplier tube is sequentially read out from the memory using a program. This method automatically adjusts the sensitivity of the sample and has the advantage of reducing the operator's workload, but it requires setting a target estimated value for each sample in advance, and the actual content may exceed the estimated range. The disadvantage is that analysis cannot be performed.

(発明が解決しようとする問題点) 本発明は、上述のようにあらかじめ目標値を設定してお
かなくても、常に光電子増倍管を最適感度に自動調整で
きる発光分光分析用測光装置を提供することを目的とす
るものである。
(Problems to be Solved by the Invention) The present invention provides a photometric device for emission spectrometry that can always automatically adjust a photomultiplier tube to the optimum sensitivity without setting a target value in advance as described above. The purpose is to

(問題点を解決するための手段) 上記の目的を達成するために本発明による測光装置は、
光電子増倍管の検出出力を一定値または一定範囲の値と
比較し、該比較出力を光電子増倍管の印加電圧にフィー
ドバックして光電子増倍管の増幅度を変化させる手段と
、上記印加電圧を検出し、これをあらかじめ記憶してあ
る印加電圧と増幅度の相関データにより増幅度に変換し
て、上記検出出力と増幅度の比として測光値を算出する
手段を備えたものである。
(Means for Solving the Problems) In order to achieve the above object, the photometric device according to the present invention has the following features:
A means for comparing the detection output of the photomultiplier tube with a fixed value or a value in a fixed range, and feeding back the comparison output to the applied voltage of the photomultiplier tube to change the amplification degree of the photomultiplier tube, and the applied voltage The apparatus is equipped with a means for detecting this, converting it into an amplification degree based on pre-stored correlation data between the applied voltage and the amplification degree, and calculating a photometric value as a ratio of the detection output and the amplification degree.

(作用) 上記の構成によれば、光電子増倍管の増幅度が無段階に
制御されて、光入力に対して常に最適の感度に維持され
るので、従来のように入力レベルに応じて測定レンジを
切り替える必要がなく、またSN比ら向上する。
(Function) According to the above configuration, the amplification degree of the photomultiplier tube is controlled steplessly and the optimal sensitivity is always maintained for optical input, so that measurement can be performed according to the input level as in the conventional method. There is no need to switch ranges, and the SN ratio is improved.

(実施例) 第1図は本発明の一実施例を示したもので、光電子増倍
管Iの出力を抵抗RとコンデンサCとの並列回路により
電圧信号に変換したのち増幅器2で増幅し、得られた検
出出力Vaを差動増幅器3により基準電圧vbと比較し
て、差動増幅器3の出力を負高圧電源回路4に入力する
ことにより、光電子増倍管1の印加電圧Vdを制御して
光電子増倍管lの増幅度r(v)を変化させている。ま
た光電子増倍管1の印加電圧Vdは、A/D変換器5で
ディジタル値に変換されてマイクロプロセッサ6に読み
込まれ、これがあらかじめメモリに記憶させである印加
電圧Vdと増幅度f(V)との相関データを用いて増幅
度f(V)に変換され、この増幅度f(V)で上記検出
出力Vaが割り算されて測光値が算出される。こうして
得られた測光値はCRTやペンレコーダ等の出力装置7
に出力される。
(Embodiment) FIG. 1 shows an embodiment of the present invention, in which the output of a photomultiplier tube I is converted into a voltage signal by a parallel circuit of a resistor R and a capacitor C, and then amplified by an amplifier 2. The obtained detection output Va is compared with a reference voltage vb by a differential amplifier 3, and the output of the differential amplifier 3 is inputted to a negative high voltage power supply circuit 4, thereby controlling the voltage Vd applied to the photomultiplier tube 1. The amplification degree r(v) of the photomultiplier tube l is changed. Further, the applied voltage Vd of the photomultiplier tube 1 is converted into a digital value by the A/D converter 5 and read into the microprocessor 6, and this is stored in the memory in advance as the applied voltage Vd and the amplification degree f (V). The detected output Va is divided by the amplification degree f(V) to calculate the photometric value. The photometric values obtained in this way are output to an output device 7 such as a CRT or pen recorder.
is output to.

第2図は印加電圧Vdと増幅度f(V)との相関特性を
示したもので、この特性を関数式または換算テーブルと
して、あらかじめマイクロプロセッサ6のメモリ内に記
憶させておくのである。
FIG. 2 shows the correlation characteristic between the applied voltage Vd and the amplification factor f(V), and this characteristic is stored in advance in the memory of the microprocessor 6 as a function equation or a conversion table.

このように構成すれば、光入力の大きさに合わせて常に
検出出力Vaが一定となるように光電子増倍管1の感度
が連続的に制御されるので、従来のようにあらかじめ標
準試料によって各元素毎に測定レンジを定めておいたり
、あるいは検出出力のスケールオーバーを検出して測定
レンジを段階的に切り替えたりする必要がなく、またS
N比も常に最高の状態に保たれるという利点がある。
With this configuration, the sensitivity of the photomultiplier tube 1 is continuously controlled so that the detection output Va is always constant according to the magnitude of the optical input. There is no need to define a measurement range for each element, or to switch the measurement range step by step by detecting overscale of detection output.
There is also the advantage that the N ratio is always kept at its highest.

第3図は他の実施例を示したもので、光電子増倍管!の
出力をA/D変換器8を介してマイクロプロセッサ6に
入力し、光電子増倍管1に電圧を供給する負高圧電源4
にマイクロプロセッサ6からの出力データDoをD/A
変換器9を介して入力し、更に上記出力データDoと光
電子増倍管1の増幅度f(V)との相関テーブルをマイ
クロプロセッサ6に記憶させ、マイクロプロセッサ6に
おいてA/D変換器8からの入力データDiが所定範囲
に入るまで出力データDoを変化させて、この時の光電
子増倍管lの増幅度r(v)で上記入力データDiを割
り算して測光値を算出するようにしたものである。
Figure 3 shows another example, a photomultiplier tube! A negative high-voltage power source 4 inputs the output of
D/A the output data Do from the microprocessor 6
A correlation table between the output data Do and the amplification factor f(V) of the photomultiplier tube 1 is stored in the microprocessor 6, and the microprocessor 6 inputs the data from the A/D converter 8. The output data Do is varied until the input data Di falls within a predetermined range, and the photometric value is calculated by dividing the input data Di by the amplification r(v) of the photomultiplier tube l at this time. It is something.

このように構成すれば、測光値としてA/D変換器8と
D/A変換器9とを加えたビット数の分解能が得られる
上に、光入力の大小に拘わらず常に同一の有効桁数でダ
イナミックレンジの広い測定ができるという+1点があ
る。
With this configuration, it is possible to obtain a resolution equal to the number of bits added by the A/D converter 8 and the D/A converter 9 as a photometric value, and the number of significant digits is always the same regardless of the magnitude of the optical input. An additional point is that it allows measurements with a wide dynamic range.

(発明の効果) 上記のように本発明によれば、光電子増倍管の検出出力
を一定に保つように電子増倍管の印加電圧にフィードバ
ックをかけて、光電子増倍管の感度を制御すると共に、
この印加電圧を検出し、これを印加電圧と増幅度との相
関データを用いて増幅度に変換して、検出出力と増幅度
から測光値を算出するようにしたしのであるから、従来
のように試料中の各元素の量を推定して、各元素毎にあ
らかじめ感度を設定しておく必要がなく、感度調整が完
全に自動化できる上に、広いダイナミックレンジで良好
なSN比を維持できるという利点がある。
(Effects of the Invention) As described above, according to the present invention, the sensitivity of the photomultiplier tube is controlled by applying feedback to the voltage applied to the electron multiplier tube so as to keep the detection output of the photomultiplier tube constant. With,
This applied voltage is detected, and this is converted into an amplification degree using the correlation data between the applied voltage and the amplification degree, and the photometric value is calculated from the detected output and the amplification degree. There is no need to estimate the amount of each element in the sample and set the sensitivity for each element in advance, making it possible to completely automate sensitivity adjustment and maintain a good signal-to-noise ratio over a wide dynamic range. There are advantages.

【図面の簡単な説明】 第1図は本発明の一実施例を示すブロック図、第2図は
同上の動作を示す特性図、第3図は本発明の他の実施例
を示すブロック図である。 1・・・光電子増倍管、2・・・増幅器、3・・・差動
増幅器、4・・・負高圧電源、5・・・A/D変換器、
6・・・マイクロプロセッサ、7・・・出力装置、8・
・・A/D変換器、9・・・D/A変換器。
[Brief Description of the Drawings] Fig. 1 is a block diagram showing one embodiment of the present invention, Fig. 2 is a characteristic diagram showing the same operation as above, and Fig. 3 is a block diagram showing another embodiment of the present invention. be. DESCRIPTION OF SYMBOLS 1... Photomultiplier tube, 2... Amplifier, 3... Differential amplifier, 4... Negative high voltage power supply, 5... A/D converter,
6...Microprocessor, 7...Output device, 8.
...A/D converter, 9...D/A converter.

Claims (1)

【特許請求の範囲】[Claims] (1)光電子増倍管の検出出力を基準値と比較し、該比
較出力を光電子増倍管の印加電圧にフィードバックして
光電子増倍管の増幅度を変化させる手段と、上記印加電
圧を検出し、これをあらかじめ記憶してある印加電圧と
増幅度との相関データにより増幅度に変換して、上記検
出出力と増幅度の比として測光値を算出する手段を備え
て成ることを特徴とする発光分光分析用測光装置。
(1) A means for comparing the detection output of the photomultiplier tube with a reference value and feeding back the comparison output to the applied voltage of the photomultiplier tube to change the amplification degree of the photomultiplier tube, and detecting the applied voltage. and converting this into an amplification degree using pre-stored correlation data between the applied voltage and the amplification degree, and calculating a photometric value as a ratio between the detected output and the amplification degree. Photometric device for emission spectrometry.
JP6030386A 1986-03-18 1986-03-18 Photometric device for emission spectroscopy Expired - Lifetime JPH0668467B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6030386A JPH0668467B2 (en) 1986-03-18 1986-03-18 Photometric device for emission spectroscopy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6030386A JPH0668467B2 (en) 1986-03-18 1986-03-18 Photometric device for emission spectroscopy

Publications (2)

Publication Number Publication Date
JPS62215850A true JPS62215850A (en) 1987-09-22
JPH0668467B2 JPH0668467B2 (en) 1994-08-31

Family

ID=13138261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6030386A Expired - Lifetime JPH0668467B2 (en) 1986-03-18 1986-03-18 Photometric device for emission spectroscopy

Country Status (1)

Country Link
JP (1) JPH0668467B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1351049A3 (en) * 2002-04-01 2004-02-25 Central Iron & Steel Research Institute Analyzer for metal
JP2007104510A (en) * 2005-10-07 2007-04-19 Hitachi Kokusai Electric Inc Method and apparatus for sensitivity adjustment of television camera
US9726611B2 (en) 2014-03-26 2017-08-08 Hitachi High-Tech Science Corporation Stabilized ICP emission spectrometer and method of using

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1351049A3 (en) * 2002-04-01 2004-02-25 Central Iron & Steel Research Institute Analyzer for metal
JP2007104510A (en) * 2005-10-07 2007-04-19 Hitachi Kokusai Electric Inc Method and apparatus for sensitivity adjustment of television camera
JP4612518B2 (en) * 2005-10-07 2011-01-12 株式会社日立国際電気 Electron multiplication type imaging apparatus and sensitivity adjustment method thereof
US9726611B2 (en) 2014-03-26 2017-08-08 Hitachi High-Tech Science Corporation Stabilized ICP emission spectrometer and method of using

Also Published As

Publication number Publication date
JPH0668467B2 (en) 1994-08-31

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