JPS62214329A - Differential pressure transmitter - Google Patents
Differential pressure transmitterInfo
- Publication number
- JPS62214329A JPS62214329A JP5989886A JP5989886A JPS62214329A JP S62214329 A JPS62214329 A JP S62214329A JP 5989886 A JP5989886 A JP 5989886A JP 5989886 A JP5989886 A JP 5989886A JP S62214329 A JPS62214329 A JP S62214329A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- chamber
- detection
- static pressure
- introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims abstract description 65
- 230000003068 static effect Effects 0.000 claims abstract description 54
- 239000007788 liquid Substances 0.000 claims abstract description 17
- 238000005192 partition Methods 0.000 claims abstract description 7
- 238000007667 floating Methods 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000004886 process control Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（イ）産業上の利用分野
この発明は、プロセス制御系等における差圧を検出して
伝送する差圧伝送器に関し、特に、片圧保護機構に係る
ものである。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application This invention relates to a differential pressure transmitter that detects and transmits differential pressure in a process control system, etc., and particularly relates to a single pressure protection mechanism.
（ロ）従来の技術
一般に、この種の差圧伝送器においては静圧誤差を無く
することが重要である。従来、この差圧伝送器には、第
２図に示すように、ハウジングａに検出室すが形成され
、この検出室すに断面コ字状の検出ダイアフラムＣが設
けられて検出室すが左右の入力側に区画され、この検出
室すに通路ｄ、ｅを介して高圧ｐＨと低圧ＰＬとが印加
されるように構成されているものがある。従って、検出
ダイアフラムＣは両側より高圧ｐＨと低圧ＰＬとが作用
し、その差圧（ｐＨＰＬ）により歪み、この歪みを電気
的に検出し、リードｙＡｆを介して導出し、差圧を検出
している。(b) Prior Art Generally, in this type of differential pressure transmitter, it is important to eliminate static pressure errors. Conventionally, in this differential pressure transmitter, as shown in Fig. 2, a detection chamber is formed in a housing a, and a detection diaphragm C having a U-shaped cross section is provided in the detection chamber. There are some devices which are partitioned on the input side of the detection chamber and configured such that high pressure pH and low pressure PL are applied to this detection chamber through passages d and e. Therefore, the detection diaphragm C is affected by the high pressure pH and low pressure PL from both sides, and is distorted by the differential pressure (pHPL).This distortion is electrically detected and derived via the lead yAf, and the differential pressure is detected. There is.
（ハ）発明が解決しようとする問題点
上述した差圧伝送器においては、検出ダイアフラムＣ等
の警鐘が左右非対称であるため、静圧誤差が生じる虞れ
があった。また、高圧Ｐ、或いは低圧ＰＬが過大圧（片
圧）となって検出ダイアフラムＣに作用すると、破損す
るという問題があった。この破損を防止するためには片
圧保護機構が必要となるが、構造が複雑となり、構成が
難しいという問題がある。(c) Problems to be Solved by the Invention In the differential pressure transmitter described above, since the alarm bells of the detection diaphragm C and the like are left and right asymmetrical, there is a possibility that a static pressure error may occur. Further, if the high pressure P or the low pressure PL becomes excessive pressure (unilateral pressure) and acts on the detection diaphragm C, there is a problem that it may be damaged. In order to prevent this damage, a single-pressure protection mechanism is required, but the structure is complicated and difficult to configure.
この発明は、斯かる為に鑑み、左右対称構造の圧力セン
サを静圧下に保持すると共に２つの補助室を設けて圧力
センサのき外側より導入圧の高い方が作用するようにし
た差圧伝送器を提供するものである。In view of this, the present invention provides differential pressure transmission in which a pressure sensor with a bilaterally symmetrical structure is held under static pressure, and two auxiliary chambers are provided so that the side with higher introduced pressure acts on the outside of the pressure sensor. It provides equipment.
（ニ）問題点を解決するための手段及び作用この発明は
、ボディに圧力の第１導入室と第２導入室とが両側に形
成されると共に、１つの静圧室と静圧の第１補助室及び
第２補助室とが形成され、前記各導入室に隔壁が設けら
れて各導入室が圧力の導入側と検出側とに区画され、前
記静圧室に圧力センサが設けられ、この圧力センサの本
体内に検出室が形成され、この検出室に検出ダイアフラ
ムが壁面離接自在に設けられて検出室が左右の入力端に
区画され、この圧力センサ本体とボディ間に２本の導管
が連接されて圧力センサが浮遊状態に支持される一方、
前記各補助室にシールダイアフラムが設けられて各補助
室が加圧側と静圧側とに区画され、この加圧側壁面が静
圧側壁面よりシールダイアフラムに近接形成され、シー
ルダイアフラムが加圧側壁面に離接自在に且つ前記検出
ダイアフラムより大なる弾性を備えて形成され、前記第
１及び第２導入室の検出側が第１及び第２補助室の加圧
側を経て検出室の各入力側に導管を介して連通され、他
方、両補助室の静圧側が静圧室に連通され、各導入室か
ら検出室に亘って封入液が充填されると共に、静圧室か
ら両補助室の静圧側に亘って封入液が充填されて構成さ
れている。(d) Means and operation for solving the problem The present invention has a first pressure introduction chamber and a second pressure introduction chamber formed on both sides of the body, and one static pressure chamber and a first static pressure introduction chamber. An auxiliary chamber and a second auxiliary chamber are formed, each introduction chamber is provided with a partition wall to divide each introduction chamber into a pressure introduction side and a pressure detection side, a pressure sensor is provided in the static pressure chamber, and a pressure sensor is provided in the static pressure chamber. A detection chamber is formed in the main body of the pressure sensor, and a detection diaphragm is provided in this detection chamber so that it can be freely moved into and out of the wall, dividing the detection chamber into left and right input ends, and two conduits are connected between the pressure sensor main body and the body. are connected and the pressure sensor is supported in a floating state, while
A seal diaphragm is provided in each of the auxiliary chambers, and each auxiliary chamber is divided into a pressure side and a static pressure side, the pressure side wall surface being formed closer to the seal diaphragm than the static pressure side wall surface, and the seal diaphragm coming into contact with and separating from the pressure side wall surface. The detection diaphragm is formed freely and has greater elasticity than the detection diaphragm, and the detection side of the first and second introduction chambers is connected to each input side of the detection chamber via a pressure side of the first and second auxiliary chambers via a conduit. On the other hand, the static pressure side of both auxiliary chambers is communicated with the static pressure chamber, and the filling liquid is filled from each introduction chamber to the detection chamber, and from the static pressure chamber to the static pressure side of both auxiliary chambers. It is filled with liquid.
従って、両五入室に導入された圧力は隔壁を介して封入
液に伝達され、検出ダイアフラムに両側より作用する一
方、シールダイアフラムを介して静圧室にも伝達され、
圧力センサに外側より作用し、差圧が生じると検出ダイ
アフラムが変位してその差圧を検出し、過大な片圧が作
用すると、シールダイアフラムが変位し、低圧側シール
ダイアフラムが壁面に当接し、静圧室が片圧とほぼ等し
い圧力となって圧力センサに作用し破損が防止されるよ
うに成っている。Therefore, the pressure introduced into both five entry chambers is transmitted to the filling liquid via the partition wall and acts on the detection diaphragm from both sides, while also being transmitted to the static pressure chamber via the sealing diaphragm.
When a differential pressure is generated by acting on the pressure sensor from the outside, the detection diaphragm is displaced and detects the differential pressure. When excessive one-sided pressure is applied, the seal diaphragm is displaced and the low-pressure side seal diaphragm comes into contact with the wall. The pressure in the static pressure chamber is approximately equal to the one-sided pressure, which acts on the pressure sensor to prevent damage.
（ホ）実施例 以下、この発明の一実施例を図面に基づいて説明する。(e) Examples Hereinafter, one embodiment of the present invention will be described based on the drawings.
第１図に示すように、１は差圧伝送器であって、プロセ
ス制御系などにおいて差圧を検出して伝送するものであ
る。As shown in FIG. 1, a differential pressure transmitter 1 detects and transmits differential pressure in a process control system or the like.
この差圧伝送器１のボディ２の両側にはフランジ３．３
が設けられ、このボディ２とフランジ３．３間に第１導
入室４ａと第２導入室４ｂとが形成されている。この両
扉入室４ａ、４ｂは、隔壁５ａ、５ｂが設けられて外側
の圧力導入側と圧力検出側とに区画され、第１′ｉ４人
室４ａに高圧ｐＨが、第２導入室４ｂに低圧ＰＬが導入
されている。Flanges 3.3 are provided on both sides of the body 2 of this differential pressure transmitter 1.
A first introduction chamber 4a and a second introduction chamber 4b are formed between the body 2 and the flange 3.3. The two-door entry chambers 4a and 4b are partitioned into an outer pressure introduction side and a pressure detection side by partition walls 5a and 5b, with high pressure pH being applied to the 1st four-person room 4a and low pressure being applied to the second introduction chamber 4b. PL has been introduced.
前記ボディ２には、上部に静圧室６が、下部に第１補助
室７ａ、７ｂがそれぞれ形成されている。The body 2 has a static pressure chamber 6 formed in its upper part and first auxiliary chambers 7a and 7b formed in its lower part.
この静圧室６には圧力センサ８が設けられており、この
圧力センサは静電容量式で左右対称に構成され、差圧伝
送器１自体も左右対称に構成されている。この圧力セン
サ８は本体８ａに検出室８ｂが形成され、この検出室８
ｂに検出ダイアフラム８Ｃが設けられ、この検出室８ｂ
が左右の入力側に区画されて構成されている。この検出
ダイアフラム８ｃはＳｉウェハなど弾性特性に優れた単
結晶で形成され、ガラス等によって左右の本体８ａに挟
持接着されている。また、検出室８ｂの壁面は検出ダイ
アフラム８ｃの変位形状に倣って成形され、検出ダイア
フラム８Ｃが接離自在に構成され、図示しないが、検出
ダイアフラム８Ｃに可動電極が、検出室８ｂ壁面に固定
電極が設けられている。A pressure sensor 8 is provided in the static pressure chamber 6, and this pressure sensor is of a capacitance type and is configured symmetrically, and the differential pressure transmitter 1 itself is also configured symmetrically. This pressure sensor 8 has a detection chamber 8b formed in a main body 8a, and this detection chamber 8
A detection diaphragm 8C is provided in the detection chamber 8b.
is divided into left and right input sides. This detection diaphragm 8c is formed of a single crystal with excellent elastic properties, such as a Si wafer, and is sandwiched and bonded to the left and right main bodies 8a with glass or the like. Further, the wall surface of the detection chamber 8b is formed to follow the displacement shape of the detection diaphragm 8c, and the detection diaphragm 8C is configured to be able to move toward and away from the sensor.Although not shown, a movable electrode is provided on the detection diaphragm 8C, and a fixed electrode is provided on the wall surface of the detection chamber 8b. is provided.
更に、圧力センサ本体８ａとボディ２との間には２本の
導管９ａ、９ｂが両側に設けられ、圧力センサ８が静圧
室６内に浮遊状態に保持されている。Furthermore, two conduits 9a and 9b are provided on both sides between the pressure sensor main body 8a and the body 2, and the pressure sensor 8 is held in a floating state within the static pressure chamber 6.
前記両補助室７ａ、７ｂはそれぞれシールダイアフラム
１０ａ 、１０ｂが設けられて加圧側と静圧側とに区画
され、このシールダイアフラム１０ａ 、 １０ｂの曲
げ剛さく弾性）は検出ダイアフラム８ｂに比して１０倍
乃至数十倍に設定されている。また、加圧側壁面１１ａ
、ｌｌｂ及び静圧側壁面１２ａ 、１２ｂはシールダ
イアフラム１０ａ 、 ］Ｏｂの変位形状に倣って成形
され、しかも、静圧側が加圧側より大容量に形成され、
加圧側壁面１１ａ 、ｌｌｂが静圧側壁面１２ａ 、
１２ｂよりシールダイアフラム１０ａ 、１０ｂに近接
成形されてシールダイアフラム１０ａ 、 １０ｂ力礪
１＃接自在に構成されている。The auxiliary chambers 7a and 7b are respectively provided with seal diaphragms 10a and 10b and are divided into a pressure side and a static pressure side, and the seal diaphragms 10a and 10b have a bending stiffness (elasticity) that is 10 times that of the detection diaphragm 8b. It is set to several tens of times. In addition, the pressurizing side wall surface 11a
, llb and the static pressure side wall surfaces 12a, 12b are formed to follow the displacement shape of the seal diaphragm 10a, ]Ob, and the static pressure side is formed to have a larger capacity than the pressure side,
Pressure side wall surface 11a, llb is static pressure side wall surface 12a,
12b is formed closer to the seal diaphragms 10a, 10b so that the seal diaphragms 10a, 10b can be freely connected to the forceps 1#.
この各補助室７ａ、７ｂの静圧側は静圧室６に通路１３
を介して連通され、加圧側は各導入室４ａ、４ｂの検出
側に通路１４ａ 、１４ｂを介して、更に検出室８ａの
各入力側に通路１５ａ 、 １５ｂ及び導管９ａ、９ｂ
を介してそれぞれ連通されている。The static pressure side of each auxiliary chamber 7a, 7b is connected to the static pressure chamber 6 by a passage 13.
The pressurizing side communicates with the detection side of each introduction chamber 4a, 4b via passages 14a, 14b, and further communicates with each input side of detection chamber 8a with passages 15a, 15b and conduits 9a, 9b.
are connected to each other via.
そして、この導入室４ａ、４ｂの検出側から各補助室７
ａ、７ｂの加圧側を介して検出室８ｂに亘って封入液１
６が充填されると共に、静圧室６から各補助室７ａ、７
ｂの静圧側に亘って封入液１７が充填され、圧力センサ
８がフローティング（Ｆｌｏａｔｉｎｇ）状態に支持さ
れている。Then, from the detection side of the introduction chambers 4a and 4b, each auxiliary chamber 7
The filled liquid 1 is supplied to the detection chamber 8b via the pressure side of
6 is filled, and each auxiliary chamber 7a, 7 is filled from the static pressure chamber 6.
The sealed liquid 17 is filled over the static pressure side of b, and the pressure sensor 8 is supported in a floating state.
この差圧伝送器１の仕様として静圧は最大５００ｋｇｆ
／ｃｎ＋”程度に、測定差圧は０〜４００００ｍｍＨｚ
Ｏである。The specifications of this differential pressure transmitter 1 are that the maximum static pressure is 500 kgf.
/cn+”, the measured differential pressure is 0 to 40000mmHz
It is O.
尚、１８は各電極に接続されたリード線で、ハーメチッ
クシール１９でシールされている。Note that 18 is a lead wire connected to each electrode, which is sealed with a hermetic seal 19.
次に、この差圧伝送器１の検出動作について説明する。Next, the detection operation of this differential pressure transmitter 1 will be explained.
先ず、プロセス圧等の高圧Ｐ、及び低圧ＰＬは、各導入
室４ａ、４ｂの導入側に導かれ、隔壁５ａ、５ｂを介し
て封入液１６に伝達され、圧力センサ８の検出ダイアフ
ラム８Ｃに両側より作用すると同時に、補助室７ａ、７
ｂのシールダイアフラムｌＯａ 、ｌｏｂを介して封入
液１７に伝達され、静圧室６に導かれて圧力センサ８に
外側より作用している。First, high pressure P such as process pressure and low pressure PL are guided to the introduction side of each introduction chamber 4a, 4b, transmitted to the sealed liquid 16 via the partition walls 5a, 5b, and are applied to the detection diaphragm 8C of the pressure sensor 8 on both sides. At the same time, the auxiliary chambers 7a, 7
It is transmitted to the sealed liquid 17 via the seal diaphragm lOa and the lob in b, is led to the static pressure chamber 6, and acts on the pressure sensor 8 from the outside.
この高圧Ｐ□と低圧ＰＬとの差（ＰＨＰＬ）により検出
ダイアフラム８ｃが低圧側に変位し、可動電極と固定電
極間の静電容量が変化し、この容量変化をリード線１８
を介して導出し、差圧を検出して伝送する。The detection diaphragm 8c is displaced to the low voltage side due to the difference (PHPL) between the high voltage P
to detect and transmit the differential pressure.
この差圧が測定レンジ内である場合、シールダイアフラ
ム１０ａ 、１０ｂは検出ダイアフラム８ｃに比して剛
性が大きいのでほとんど変位せず、封入液１６の移動は
ほとんどなく、検出ダイアフラム８Ｃの変位による移動
は無視できる程度で誤差の発生は生じない。When this differential pressure is within the measurement range, the seal diaphragms 10a and 10b have greater rigidity than the detection diaphragm 8c, so they hardly displace, the sealed liquid 16 hardly moves, and the displacement of the detection diaphragm 8C causes no movement. The error is negligible and does not occur.
この差圧が測定レンジを越えると、検出ダイアフラム８
Ｃは検出室８ｂ壁面に当接して破損が防止される。If this differential pressure exceeds the measurement range, the detection diaphragm 8
C comes into contact with the wall surface of the detection chamber 8b and is prevented from being damaged.
更に過大な差圧、例えば、高圧ｐＨのみ作用したような
場合、検出ダイアフラム８ｃは壁面に当接しており、第
１補助室７ａのシールダイアフラムｌｏａは静圧側（第
１図において左側）に、第２補助室７ｂのシールダイア
フラム１０ｂは加圧側（第１図において右側）にそれぞ
れ変位し、更に、第２補助室７ｂのシールダイアフラム
ｔｏｂは加圧側壁面１１ｂに当接する。一方、第１補助
室７ａのシールダイアフラム１０ａは静圧側壁面１２ａ
が加圧側壁面１１ａより離れているので当接せず、高圧
Ｐにが静圧室６に伝達される。この静圧室６の圧力は高
圧Ｐｕ（片圧）よりシールダイアフラム１０ａの曲げ剛
さ分（変位による圧力吸収分）低い値となっており、こ
の圧力でもって圧力センサ８が外側より押圧されている
。従って、圧力センサ８の検出室８ｂ内では高圧ＰＩｌ
が左右の本体８ａを剥がす方向（外側方向）に作用する
一方、圧力センサ８の外側では静圧室６の圧力が左右の
本体８ａを合わせる方向（内側方向）に作用している。Furthermore, in the case where only an excessive pressure difference, for example, high pressure pH, is applied, the detection diaphragm 8c is in contact with the wall surface, and the seal diaphragm loa of the first auxiliary chamber 7a is on the static pressure side (left side in FIG. 1). The seal diaphragms 10b of the second auxiliary chamber 7b are respectively displaced to the pressure side (right side in FIG. 1), and the seal diaphragm tob of the second auxiliary chamber 7b abuts the pressure side wall surface 11b. On the other hand, the seal diaphragm 10a of the first auxiliary chamber 7a has a static pressure side wall surface 12a.
Since it is separated from the pressurizing side wall surface 11a, there is no contact, and the high pressure P is transmitted to the static pressure chamber 6. The pressure in this static pressure chamber 6 is lower than the high pressure Pu (unilateral pressure) by the bending stiffness of the seal diaphragm 10a (pressure absorption due to displacement), and this pressure presses the pressure sensor 8 from the outside. There is. Therefore, in the detection chamber 8b of the pressure sensor 8, the high pressure PIl
acts in a direction to separate the left and right main bodies 8a (outward direction), while on the outside of the pressure sensor 8, pressure in the static pressure chamber 6 acts in a direction to bring the left and right main bodies 8a together (inward direction).
ごの高圧Ｐ、と静圧室６の圧力との差が圧力センサ８に
おける左右の本体８ａの接合力より小さく設定されてい
るので、圧力センサ８が片圧より保護される。Since the difference between the high pressure P and the pressure in the static pressure chamber 6 is set to be smaller than the bonding force between the left and right bodies 8a of the pressure sensor 8, the pressure sensor 8 is protected from one-sided pressure.
尚、低圧ＰＬのみが作用した片圧の場合も同様に保護さ
れる。It should be noted that protection is provided in the same way in the case of single pressure where only the low pressure PL acts.
また、圧力センサ８は静電容量式に限られず、検出ダイ
アフラム８Ｃの変位を電気的に検出できるものであれば
よい。Further, the pressure sensor 8 is not limited to a capacitance type, but may be any type as long as it can electrically detect the displacement of the detection diaphragm 8C.
（へ）発明の効果
以上のように、この発明の差圧伝送器によれば、左右対
称構造の圧力センサを静圧室の封入液中に浮遊状態で支
持し、２つの補助室からこの封入液に導入圧の高い方を
作用させるようにしたために、圧力センサが導入圧の高
い方の圧力にほぼ等しい静圧で外側より均一に押圧され
るので、圧力センサの破損を確実に防止することができ
る。(F) Effects of the Invention As described above, according to the differential pressure transmitter of the present invention, a pressure sensor having a bilaterally symmetrical structure is supported in a floating state in a liquid filled in a static pressure chamber, and the pressure sensor is filled in from two auxiliary chambers. Since the higher inlet pressure is applied to the liquid, the pressure sensor is evenly pressed from the outside with a static pressure almost equal to the higher inlet pressure, thereby reliably preventing damage to the pressure sensor. I can do it.
また、片圧が作用した場合、小さい領域においては検出
ダイアフラムが壁面に当接し、大きい領域においてはシ
ールダイアフラムが移動して圧力センサが保護されるこ
とになる。Furthermore, when a single pressure is applied, the detection diaphragm contacts the wall surface in a small region, and the seal diaphragm moves in a large region, thereby protecting the pressure sensor.
また、差圧が少なくとも測定レンジ内の場合、シールダ
イアフラムの変位がほとんどなく、封入液がほとんど移
動しないので、リニアリティ特性が良好なものとなる。Further, when the differential pressure is at least within the measurement range, there is almost no displacement of the seal diaphragm and almost no movement of the sealed liquid, resulting in good linearity characteristics.
更に、左右対称構造とすることができるので、静圧誤差
や片圧誤差等を非常に小さくすることができる。Furthermore, since the structure can be made laterally symmetrical, static pressure errors, unilateral pressure errors, etc. can be made extremely small.
第１図は、この発明の一実施例を示す差圧伝送器の中央
縦断面図、第２図は、従来の差圧伝送器を示す要部の断
面図である。
ｌ：差圧伝送器、 ２：ボディ、４ａ −４ｂ
：導入室、 ５ａ・５ｂ＝隔壁、６：静圧室、
７ａ・７ｂ：補助室、８：圧力センサ、 ８
ａ：本体、
８ｂ：検出室、 ８ｃ：検出ダイアフラム、９
：導管、
１０ａ ・ｉｏｂ ：シールダイアフラム、１１ａ
４１ｂ ４２ａ ４２ｂ ：壁面、１６・１
７：封入液。FIG. 1 is a central vertical cross-sectional view of a differential pressure transmitter showing an embodiment of the present invention, and FIG. 2 is a cross-sectional view of essential parts of a conventional differential pressure transmitter. l: Differential pressure transmitter, 2: Body, 4a - 4b
: Introduction chamber, 5a/5b = partition wall, 6: Static pressure chamber,
7a/7b: Auxiliary chamber, 8: Pressure sensor, 8
a: Main body, 8b: Detection chamber, 8c: Detection diaphragm, 9
: Conduit, 10a ・iob : Seal diaphragm, 11a
41b 42a 42b: Wall surface, 16・1
7: Filled liquid.
Claims (1)
に形成されると共に、１つの静圧室と静圧の第１補助室
及び第２補助室とが形成され、前記各導入室に隔壁が設
けられて各導入室が圧力の導入側と検出側とに区画され
、前記静圧室に圧力センサが設けられ、この圧力センサ
の本体内に検出室が形成され、この検出室に検出ダイア
フラムが壁面離接自在に設けられて検出室が左右の入力
側に区画され、この圧力センサ本体とボディ間に２本の
導管が連接されて圧力センサが浮遊状態に支持される一
方、前記各補助室にシールダイアフラムが設けられて各
補助室が加圧側と静圧側とに区画され、この加圧側壁面
が静圧側壁面よりシールダイアフラムに近接形成され、
シールダイアフラムが加圧側壁面に離接自在に且つ前記
検出ダイアフラムより大なる弾性を備えて形成され、前
記第１及び第２導入室の検出側が第１及び第２補助室の
加圧側を経て検出室の各入力側に導管を介して連通され
、他方、両補助室の静圧側が静圧室に連通され、各導入
室から検出室に亘って封入液が充填されると共に、静圧
室から両補助室の静圧側に亘って封入液が充填されて成
り、前記圧力センサが静圧下に保持されていることを特
徴とする差圧伝送器。(1) A first pressure introduction chamber and a second pressure introduction chamber are formed on both sides of the body, and one static pressure chamber and a first auxiliary static pressure chamber and a second auxiliary chamber are formed, and each of the above-mentioned A partition is provided in the introduction chamber to divide each introduction chamber into a pressure introduction side and a pressure detection side, a pressure sensor is provided in the static pressure chamber, a detection chamber is formed in the main body of the pressure sensor, and the detection chamber is provided with a pressure sensor. A detection diaphragm is provided in the chamber so that it can be freely attached to and separated from the wall, dividing the detection chamber into left and right input sides, and two conduits are connected between the pressure sensor body and the body to support the pressure sensor in a floating state. , a seal diaphragm is provided in each of the auxiliary chambers, each auxiliary chamber is divided into a pressure side and a static pressure side, and the pressure side wall surface is formed closer to the seal diaphragm than the static pressure side wall surface,
A seal diaphragm is formed to be able to move into and out of the pressure side wall surface and to have greater elasticity than the detection diaphragm, and the detection side of the first and second introduction chambers passes through the pressure sides of the first and second auxiliary chambers to the detection chamber. The static pressure sides of both auxiliary chambers are connected to the static pressure chamber via conduits, and the sealed liquid is filled from each introduction chamber to the detection chamber, and the static pressure side of both auxiliary chambers is A differential pressure transmitter, characterized in that the auxiliary chamber is filled with a sealed liquid over the static pressure side, and the pressure sensor is held under static pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5989886A JPH0833334B2 (en) | 1986-03-17 | 1986-03-17 | Differential pressure transmitter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5989886A JPH0833334B2 (en) | 1986-03-17 | 1986-03-17 | Differential pressure transmitter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62214329A true JPS62214329A (en) | 1987-09-21 |
| JPH0833334B2 JPH0833334B2 (en) | 1996-03-29 |
Family
ID=13126397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5989886A Expired - Fee Related JPH0833334B2 (en) | 1986-03-17 | 1986-03-17 | Differential pressure transmitter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0833334B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6469930A (en) * | 1987-09-11 | 1989-03-15 | Yokogawa Electric Corp | Capacitance type differential pressure measuring apparatus |
| JPH0198937A (en) * | 1987-10-12 | 1989-04-17 | Yokogawa Electric Corp | Electrostatic capacity type differential pressure measuring instrument |
| JPH01276035A (en) * | 1988-03-22 | 1989-11-06 | Honeywell Inc | Pressure transmitter |
| JPH03223639A (en) * | 1989-10-14 | 1991-10-02 | Fuji Electric Co Ltd | Differential-pressure detecting device |
| JP2006078230A (en) * | 2004-09-07 | 2006-03-23 | Yamatake Corp | Steam flowmeter |
-
1986
- 1986-03-17 JP JP5989886A patent/JPH0833334B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6469930A (en) * | 1987-09-11 | 1989-03-15 | Yokogawa Electric Corp | Capacitance type differential pressure measuring apparatus |
| JPH0198937A (en) * | 1987-10-12 | 1989-04-17 | Yokogawa Electric Corp | Electrostatic capacity type differential pressure measuring instrument |
| JPH01276035A (en) * | 1988-03-22 | 1989-11-06 | Honeywell Inc | Pressure transmitter |
| JPH03223639A (en) * | 1989-10-14 | 1991-10-02 | Fuji Electric Co Ltd | Differential-pressure detecting device |
| JP2006078230A (en) * | 2004-09-07 | 2006-03-23 | Yamatake Corp | Steam flowmeter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0833334B2 (en) | 1996-03-29 |
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| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |