JPS62213138A - Airtight vessel for conveyance of substance to be treated provided for treatment in purified environment - Google Patents

Abstract

PURPOSE:To improve the airtightness of an airtight vessel for conveyance by a construction wherein airtight sealing of a box-shaped member and a cap- shaped member is attained by an annular elastic air bag and the air bag can be pressed in accepting grooves. CONSTITUTION:In a state in which a cap-shaped member 2 is made to engage with the inside of an opening edge 3 of a box-shaped member 1, a nozzle 11 is made to face an inlet-outlet 8, and a pressurized gas is injected into an air bag 7 through the inlet-outlet. Then the air bag 7 is inflated to protrude outside the outer periphery of the cap-shaped member 2 and to contact with the inner periphery of the opening edge 3. When the pressurized gas is injected further, the air bag 7 is pressed on the inner periphery and further into an accepting groove 5, the annular elastic air bag 7 is put consequently in state in which the outside thereof is pressed in the accepting groove 5 and the inside thereof in an accepting groove 6, and thereby the box-shaped member 1 and the cap- shaped member 2 are put in a coupled state. The pressurized gas injected in the air bag 7 is maintained by a valve mechanism 9 and others, and thus a vessel can be moved in a state in which a space S is isolated airtightly.

Description

Detailed Description of the Invention (Industrial Field of Application) The present invention is applicable to various fields that involve processing processes that require a clean environment, such as the manufacturing process, ceramic manufacturing process, and pharmaceutical process. This invention relates to an airtight container for transporting a workpiece between processing steps while maintaining a clean environment on the workpiece.

(Prior art and its problems) The IC manufacturing process, which is a typical field with processing steps that require a clean environment, spans hundreds of steps.

The sea urchins/%-i of the processed material must be transported between each processing step. Conventionally, most of the processing and transportation has been carried out in a lean room where people can enter and exit, resulting in problems such as high costs associated with constructing and operating a clean room. Recently, there have been proposals to keep only the equipment for each processing process clean and to transport the processed materials between these equipment in airtight containers, thereby eliminating the need for a clean room. .../There is nothing that is necessarily satisfactory in terms of pufferfish, etc.

The entire purpose of the present invention is to solve the above-mentioned conventional problems, and will be explained below based on the drawings corresponding to the implemented project.

(Means for Solving Problems) In the diagram corresponding to Implementation Te 1, reference numeral 1 indicates a box-shaped member with an opening on one side, and reference numeral 2 indicates the inside of the opening edge 3 of the box-shaped member 1. 2 shows a lid-like member that engages with the body through an appropriate gap 4. Thus, the airtight container for transportation of the present invention is composed of the box-shaped member 1 and the lid-shaped member 2, and the inner periphery of the opening edge 3, the lid-shaped part, and the outer periphery of the material 2 are provided with corresponding receiving grooves 5. ,6'
In addition, either the receiving groove 5 of the opening edge 3 or the receiving groove 6 of the lid-like member 2 (in the illustrated example, the receiving groove 6
), an Il-shaped elastic air glue 7 is attached to the air sac 7, and the gas inlet/output part 8 for the air sac 7 is connected to the box-like member 1 or the lid-like member 2 (lid-like member 2 in the illustrated example). set up at a location. The inlet/outlet S+ is provided with a function to hold the air injected into the air 57 and an exhaust function by external operation.
These functions may be provided, for example, by attaching and detaching an appropriate plug when inflating and discharging air from a car tire pressure. In the example shown in FIG. 1, the shape of the engagement portion between the opening edge 3 and the lid-like member 2 is circular, but it may be in a different shape depending on the case. In the case of polygonal shapes.

It is desirable to form appropriate roundness in the corners. Of course, the shape of the box-shaped member 1 itself may be determined as appropriate. Further, as the gas injected into the air bladder 7, in addition to air, an inert gas such as nitrogen gas or charcoal gas can be used.

(Function) In the above configuration, when the lid-like member 2 is engaged with the inside of the opening edge 3 of the box-like member 1, the entire inlet/outlet portion of the nozzle 11 connected to the appropriate pressurized gas supply system 10 is opened. 8, pressurized gas is injected into the air sac 1 from here. The air 51 is injected and expanded by the pressurized gas, and the lid-like member 2
protrudes outside the outer periphery of the opening edge 3 and comes into contact with the inner periphery of the opening edge 3. When pressurized gas is further injected, it comes into pressure contact with the inner periphery of the air sac IVi and is press-fitted into the receiving groove 5. In this way, the annular elastic air 57 is placed inside the receiving groove 5 on the outside and inside the receiving groove 57. #
6 is press-fitted into 1 box-shaped member 1 and lid-shaped member 2.
Let be the connected state. The air 57 fills the gap 4 between the inner periphery of the opening edge 3 and the outer periphery of the lid-shaped member 2 and is in pressure contact with each side, so that air cannot circulate through the entire gap 4. In this way, it is possible to airtightly isolate the nitrogen in the container constructed by the box-like member 1 and the lid-like member 2.

The next processing gas is injected into the gas 57 and is supplied to the pressurized gas supply system 1.
Even when it is separated from the container, it is held by the valve mechanism 9, etc., so that the space S can be airtightly isolated and the container can be moved in the next state.

Next, in the above state, when the nozzle 11 is used to discharge air from the component, such as by activating the air discharge operation bottle of the valve mechanism 9, the air sac 7 contracts and the outer periphery moves from the inner periphery of the opening edge 3. After separating, a gap 4 is created again between the inner periphery of the opening edge 3 and the outer periphery of the lid-like member 2.
Because it makes me sick to the core.

The box-like member 1 and the lid-like member 2 can be uncoupled and separated. In this case, if the contracted air sac 7 can be completely stored in the receiving groove 6 on the outer periphery of the lid-like member 2, the member 1.2 can be easily separated.

Such retraction can be performed by the elasticity of the air sac 7 itself, and the nozzle 11 can be freely connected to the gas suction system 12, so that more gas can be actively discharged than can be achieved by the elasticity itself. ◇ In the present invention, as described above, by separating the lid-like member 2 and the box-like member 1 in a state where the air glue 7 is contracted,
The object 13 to be processed can be carried in and out of the space S, and the air sac 7t can be expanded to airtightly connect the 1-shaped member 2 and the box-shaped member 1. The object to be processed 13 inside S can be airtightly isolated from the outside.

Therefore, the inside is maintained in a clean environment.When carrying in and out of the processing apparatus 14, the separation and coupling operations of the lid-shaped member 2 and the box-shaped member 1 are performed in the clean environment inside the processing apparatus (114). By configuring it appropriately so that it can be carried out, there is no need for a clean room that one person can freely enter and leave, and by simply maintaining the equipment in each processing process in a clean environment, a series of treatments in a clean environment of the object to be processed can be carried out. can be done.

In the present invention, the object to be processed 13 includes not only the object to be processed, such as sea urchins, etc., but also a cassette, a case, etc., containing one or more objects to be processed.

(Effects of the Invention) As described above, the present invention is achieved by airtightly sealing a box-like member and a lid-like member using a ring-shaped elastic pouch, so that the airtightness is good.
Receiving grooves are formed at corresponding positions of the opening edge of the box-like member and the lid-like member, which the air sac presses into contact with when the air sac is pressed, and the air sac is configured to be press-fitted into these receiving grooves. Therefore, in addition to the above-mentioned airtightness being even better, the two members can be bonded well, and falling off during transportation can be completely prevented. And the present invention utilizes this technique.
Since the box-like member and the lid-like member are connected by a C'fR-shaped elastic pneumatic sac, there are no moving parts such as shafts of the joint mechanism using cams and links, and dust from these is eliminated. There was no problem of occurrence of.

It also has the effect of being less likely to break down. The Kagushisu invention does not require a clean room that people can freely enter and exit from, and simply maintains only the equipment in each processing process in a clean environment, allowing for a series of treatments in a clean environment for the processed material. I can do it. By applying it in various fields such as IC manufacturing, ceramic manufacturing, pharmaceutical manufacturing, etc., it is possible to significantly reduce the amount of varnish.

[Brief explanation of drawings]

All the figures correspond to embodiments of the present invention; Fig. 1 is an explanatory perspective view of the constituent members, Fig. 2 is an explanatory cross-sectional view of each member in a fixed state after being connected, and Fig. 3 is an explanatory sectional view of the members in a fixed state, and Fig. 3 is an explanatory perspective view of the constituent members. This is an explanatory cross-sectional view of the state. Code 1: Box-shaped member, 2: Lid-like member, 3: Opening edge. 4... Gap, 5.6... Receiving groove, 7... 5°8... Entry/exit part of the elastic air, 9... Valve mechanism, 10... Pressurized gas supply system, DESCRIPTION OF SYMBOLS 11... Nozzle, 12... Gas suction system, 13... Processing object, 14... Processing device, S.
・Space inside the container.

Claims (1)

[Claims] Consisting of a box-like member with one side open, and a lid-like member that engages inside the opening edge of the box-like member with an appropriate gap, the inner periphery of the opening edge and the outer periphery of the lid-like member include A corresponding receiving groove is provided, and an annular elastic air sac is attached to either the receiving groove of the opening edge or the receiving groove of the lid-like member, and the gas inlet/output portion for the annular elastic air sac is connected to the box. An airtight container for transporting objects to be processed for processing in a clean environment, characterized in that the container is provided at an appropriate location on the shaped member or the lid-shaped member.