CN101770968B

CN101770968B - Inflation valve and chip box configured with same

Info

Publication number: CN101770968B
Application number: CN2009100013439A
Authority: CN
Inventors: 林志铭; 吕保仪
Original assignee: JIADENG PRECISE INDUSTRY Co Ltd
Current assignee: JIADENG PRECISE INDUSTRY Co Ltd; Gudeng Precision Industrial Co Ltd
Priority date: 2009-01-07
Filing date: 2009-01-07
Publication date: 2011-08-17
Anticipated expiration: 2029-01-07
Also published as: CN101770968A

Abstract

The invention relates to an inflation valve and a chip box configured with the same. The chip box comprises a box body, a door body and an inflation valve, wherein the inflation valve is configured in a through hole of the box body. The chip box is characterized in that the inflation valve comprises a fixed body installed at the through hole, wherein the fixed body is provided with a base, a lower opening is formed in the center of the base, an inflation head is arranged in the lower opening and comprises a base and a hollow cylindrical part protruding in the center of the base upwards, the hollow cylindrical part is annularly provided with an elastic assembly, an air outlet hole is arranged at the peripheral wall of the elastic assembly, and a valve cover is further configured above the air outlet hole. Under the support of upward external force, the inflation head is moved from a first position to a second position in the lower opening. When the inflation head is at the first position, the valve cover pushes against the base of the fixed body. When the inflation head is at the second position, a clearance is formed between the valve cover and the base, and the air outlet hole of the inflation head is communicated with the clearance.

Description

Charge valve and dispose the chip cartridges of this charge valve

Technical field

The present invention relates to a kind of front open type chip cartridges, particularly a kind of front open type chip cartridges that disposes charge valve.

Background technology

At present in semiconductor factory, adopt mostly by normal formula interface (SMIF) system that Hewlett-Packard proposed about the storage and transportation apparatus of chip, light shield, this SMIF system is open in United States Patent (USP) No. 4532970 and No. 4534389.The purpose of SMIF system is will guarantee chip, light shield in conveying and storage, and the gas around chip, the light shield is static with respect to chip, light shield basically, and the particulate in the dust free room also is unlikely in the environment that enters next-door neighbour's chip, light shield.

Therefore, the transport box that uses in the SMIF system need possess good airtight effect, enters transport box with gas or the particulate of avoiding external environment.And on practice, for example: 200mm chip cartridges or 300mm chip cartridges in order to prevent chip surface generation oxidation or to produce organic contamination, then can be further charge into nitrogen, blunt gas or the gases such as dry gas of having removed moisture (below 1%) in the chip cartridges.In view of this, can at least one charge valve of configuration in the said chip box, fill smoothly and prevent that the blanketing gas in the chip cartridges from leaking to guarantee gas.

See also shown in Figure 1ly, be disclosed in United States Patent (USP) the 7th, 201, the employed charge valve of chip cartridges in No. 276.This charge valve comprises a cylinder 100, and cylinder 100 inside are provided with a duck-beak type valve body 101, and it mainly is made up of two flexible valves 102 of tool; Therefore, when inflating, gas can be exerted pressure outside valve 102 and be caused the slot 103 between the valve 102 to strut, and gas is entered in the chip cartridges smoothly.And when stop the inflation or when the chip cartridges internal pressure increased gradually, the slot 103 between the valve 102 just reverted to closure state, to keep gas in chip cartridges inside.Though above-mentioned charge valve structure seems simply, the design of valve 102 and the material of use are grasped and are difficult for.When material stiffness was too big, valve 102 was difficult for producing deformation, causes the slot 103 between the valve 102 too little, to such an extent as to can't be at short notice with the chip cartridges gassy.And when material stiffness too hour, 102 of valves can't cause disappointing generation easily fully with slot 103 closures.

Summary of the invention

According to its charge valve of chip cartridges of prior art lose heart easily, can't be efficient with the chip cartridges gassy, a main purpose of the present invention is to provide a kind of charge valve in chip cartridges, this charge valve can be at short notice with the chip cartridges gassy, to save the required time of inflation.

Another main purpose of the present invention is to provide a kind of charge valve in chip cartridges, and charge valve can remain in gas in the chip cartridges for a long time, can prevent the gas leak in the chip cartridges.

A main purpose more of the present invention is to provide a kind of charge valve in chip cartridges, and charge valve has good airtight effect, can avoid in the process of inflation, and the gas of chip cartridges outside or the gas of environment are followed and entered in the chip cartridges.

For reaching above-mentioned projects, the present invention discloses a kind of charge valve, mainly comprise a fixed body, a pneumatic head, an elastic parts and a valve gap.Fixed body has a base and is provided with a under shed at the center of base; And pneumatic head comprises a pedestal and by the center of the pedestal hollow tube-shape portion to upper process, and wherein, hollow tube-shape portion is arranged in the under shed of fixed body and the perisporium of hollow tube-shape portion is provided with a venthole; Elastic parts is located on around the hollow tube-shape portion of pneumatic head and between its base of fixed body and its pedestal of pneumatic head; Valve gap then is disposed at the hollow tube-shape portion top of pneumatic head, therefore, when pneumatic head supports following time in up an external force, pneumatic head can move to a second place and elasticity of compression assembly by a primary importance under shed, and above-mentioned primary importance refers to that valve gap is compressing the base of fixed body, communicates with the gap and the second place refers to the venthole that valve gap and base form a gap and pneumatic head.

In addition, the present invention also comprises the chip cartridges that disposes above-mentioned charge valve, because above-mentioned charge valve is in when closing, when promptly being in primary importance, its elastic parts can provide a strength to make valve gap compress the base of fixed body, so, can for a long time gas be remained in the chip cartridges, effectively avoid gas leak.

Description of drawings

Fig. 1 is the schematic diagram of its charge valve of chip cartridges of prior art;

Fig. 2 is a kind of its schematic diagram of chip cartridges that disposes charge valve of the present invention;

Fig. 3 is the explosive view of its charge valve of chip cartridges of the present invention;

Fig. 4 is the online cutaway view of its AA of charge valve of Fig. 3;

Fig. 5 A and Fig. 5 B are the upward view and the vertical view of its fixed body of charge valve of Fig. 3;

Fig. 6 is the online cutaway view of its BB of charge valve of Fig. 3;

Fig. 7 is the schematic diagram of its filter of charge valve of the present invention;

Fig. 8 is a chip cartridges of the present invention when inflation, the schematic diagram of charge valve;

Fig. 9 disposes the schematic diagram of a fastener for charge valve of the present invention;

Figure 10 disposes the cutaway view of fastener for charge valve of the present invention;

Figure 11 places the schematic diagram of inflating on the load bearing interface for chip cartridges of the present invention; And

Figure 12 disposes the cutaway view of another fastener for charge valve of the present invention.

[main element symbol description]

10 box bodys

The 10B bottom

11 slots

12 openings

20 bodies

21 outer surfaces

22 inner surfaces

30 through holes

40 charge valves

41 fixed bodies

411 bases

412 under sheds

413 first madial walls

414 upper sheds

415 second inboards

The 415r projecting rib

416 outer peripheral faces

417 flanges

418 projection fasteners

419 flanges

42 pneumatic heads

421 pedestals

422 hollow tube-shape portions

4221 ventholes

423 air inlets

424 filter carriers

43 valve gaps

431 bodies

432 Gai Yuan

433 grooves

44 elastic partss

441 elasticity lobes

45 filters

46 fasteners

50 spray nozzle of the gas supply

60 load bearing interfaces

Embodiment

For technology contents, goal of the invention that the present invention is used and the effect reached thereof have more completely and clearly open,, and see also the accompanying drawing and the figure number of being taken off now in describing in detail down:

At first, see also shown in Figure 2, a kind of its schematic diagram of chip cartridges that disposes charge valve of the present invention.This chip cartridges is a front open type chip cartridges; comprise a box body 10 and a body 20; box body 10 inside are provided with a plurality of slots 11 with the ccontaining a plurality of chips of level; and having an opening 12 in a side of box body 10 can be for the input and the output of chip; and door body 20 has an outer surface 21 and an inner surface 22; door body 20 combines with the opening 12 of box body 10 by inner surface 22, with a plurality of chips of protection box body 10 inside.In addition, on box body 10 or door body 20, has a through hole 30 at least, to dispose a charge valve 40; Yet generally speaking, charge valve 40 is disposed at the bottom 10B of box body 10, and when being beneficial to chip cartridges and placing a load bearing interface (load port) to go up, a spray nozzle of the gas supply stretches out from load bearing interface and inflates via the 40 pairs of chip cartridges of charge valve in the through hole 30.The gas that above-mentioned spray nozzle of the gas supply provided or sprayed is based on nitrogen, passivity gas or dry gas, but does not limit especially.

And as shown in Figure 3, the explosive view of its charge valve of chip cartridges of the present invention.Charge valve 40 mainly comprises a fixed body 41, a pneumatic head 42, an elastic parts 44, a valve gap 43 and a filter 45, fixed body 41 has the tubular structure of a upper shed 414 and a under shed (not being shown among the figure), and pneumatic head 42 comprises that a pedestal 421 and is by the center of the pedestal 421 hollow tube-shape portion 422 to upper process.Above-mentioned pneumatic head 42 is earlier with an elastic parts 44, after being located on around the hollow tube-shape portion 422, hollow tube-shape portion 422 put under shed by the lower end of fixed body 41 its under sheds and with being about to the top that a valve gap 43 is put into fixed body 41 upper sheds 414 and assembled or be disposed at hollow tube-shape portion 422.45 of filters comprise a lower cover 451, a loam cake 452 and a filter 453, and filter 45 is arranged at the inside of pneumatic head 42 its pedestals 421; Therefore, when spray nozzle of the gas supply was inflated via 40 pairs of chip cartridges of charge valve, the gas that filter 45 can further filter spray nozzle of the gas supply and sprayed was with the state of guaranteeing that chip cartridges inner sustain one is clean or clean.

Then, see also Fig. 4, the cutaway view that its AA of the charge valve of Fig. 3 is online; Fig. 5 A and Fig. 5 B, the upward view and the vertical view of its fixed body of charge valve of Fig. 3; And Fig. 6, the cutaway view that its BB of the charge valve of Fig. 3 is online.(the online cutaway view of charge valve AA) as shown in Figure 4, fixed body 41 has a base 411, and is provided with above-mentioned under shed 412 at the center of base 411.In addition, around the upper surface of base 411, up be extended with one first madial wall 413, form the diameter upper shed 414 also bigger between this first madial wall 413 than under shed 412; And around the lower surface of base 411, also down being extended with one second madial wall 415, above-mentioned first madial wall 413 and second madial wall 415 further reverse laterally to form the outer peripheral face 416 of fixed body 41.This outer peripheral face 416 contacts with each other with the periphery of through hole 30, and forms an outward extending flange 417 in the bottom of outer peripheral face 416, and flange 417 is fastened in the periphery below of through hole 30, enters chip cartridges inside to avoid fixed body 41 to come off; And between the periphery of above-mentioned flange 417 and through hole 30, can further dispose a gas seal member, for example: circular rings (O-ring) with the gas of avoiding the chip cartridges outside slit via 30 of outer peripheral face 416 and through holes, and enters chip cartridges inside.And as shown in Figure 4, elastic parts 44 has a circulus and connect a plurality of elasticity lobes 441 around circulus, and elasticity lobe 441 has plenty of past top and extends, directly extends toward the outside or extend toward the below.

Again, shown in Fig. 4 and Fig. 5 A, second madial wall 415 at fixed body 41 is provided with a plurality of projecting rib 415r, this projecting rib 415r is used for contacting with each other with the pedestal 421 of pneumatic head 42, pneumatic head 42 its hollow tube-shape portions 422 are maintained in the under shed 412 of fixed body 41, avoid pneumatic head 42 to roll in fixed body 41 inside.

Then, see also Fig. 5 B and Fig. 6 (the online cutaway view of charge valve BB), be interval with four projection fasteners 418 on outer peripheral face 416, projection fastener 418 is to link to each other with outer peripheral face 416 with its bottom, and its top has another flange 419; Because structure and fixed body 41 beyond projection fastener 418 its bottoms have a gap, therefore, can fixed body 41 be fixed in the through hole 30 by projection fastener 418 its elastic force, and the flange 419 on projection fastener 418 its tops also can be buckled in the periphery top of through hole 30, skids off the chip cartridges outside to avoid fixed body 41 to come off.

And as shown in Figure 6, pneumatic head 42 its hollow tube-shape portion 422 1 ends seal, and the other end is an open end (being the air inlet 423 of pneumatic head).In addition, down be extended with a filter carrier 424 in its pedestals 421 of pneumatic head 42 and hollow tube-shape portion 422 its air inlets 423 part of joining.These filter carrier 424 its sidewalls can be provided with screw thread or buckle, so that filter 45 to be installed.This filter 45 is made up of lower cover 451, loam cake 452 and filter 453 as mentioned before.As shown in Figure 7, lower cover 451 is a hollow structure, but is provided with fixing rib 4511 in this hollow structure with in regular turn in last placement filter 453 and loam cake 452.Because lower cover 451 and loam cake 452 all have hole, therefore, when spray nozzle of the gas supply 50 was inflated via 40 pairs of chip cartridges of charge valve, gas can enter pneumatic head 42 by hole and filter 453.Again, flexible slightly and its edge of above-mentioned loam cake 452 has raised structures 4521, therefore, can be embedded in the groove on lower cover 451 its hollow structure sidewalls (not being shown among the figure).Because, loam cake 452 removable being fixed in lower cover 451 its grooves, so, when filter 453 can't provide good filter effect, the filter that need more renew only, reusable lower cover 451 and loam cake 452.Again, can stretch out into an inclined-plane 4512 in the bottom of lower cover 451, can further place a gas seal member on this inclined-plane 4512, for example: circular rings (O-ring), with the gas of avoiding the chip cartridges outside slit, and enter pneumatic head 42 or chip cartridges inside via 424 of inclined-plane 4512 and filter carriers.

And as shown in Figure 6, valve gap 43 have a body 431 and body 431 around be extended with downwards one the lid edge 432, the sidewall that forms a groove 433 and groove 433 between the lid edge 432 is provided with screw thread, so that screw togather mutually and be integral with screw thread in pneumatic head 42 its hollow tube-shape portions 422.And on fixed body 41 its bases 411 with respect to the place of lid edge 432, promptly the periphery of under shed 412 place is provided with an annular recess, and annular recess is embedded with a gas seal member, for example: circular rings (O-ring).Therefore, when spray nozzle of the gas supply 50 was not inflated chip cartridges as yet, charge valve 40 was a closed condition; At this moment, pneumatic head 41 is in the first position, and promptly the circular rings (O-ring) that compresses on fixed body 41 its bases 411 of its lid edge 432 of valve gap 43 is airtight to form; So the gas of chip cartridges outside just can't enter chip cartridges inside via the venthole 4221 in pneumatic head 42 its hollow tube-shape portions 422.Certainly, its base 411 of said fixing body can also not need to be provided with groove and circular rings (O-ring), and only needs coating one deck rubber blanket or gas seal member on fixed body 41 its bases 411 or on valve gap 43 its lid edge 432, can reach airtight effect equally.

Then, as shown in Figure 8, for chip cartridges of the present invention in when inflation, the schematic diagram of charge valve.When spray nozzle of the gas supply 50 up supports the filter 45 of pneumatic head 42 or pneumatic head 42 belows, elastic parts 44 and elasticity lobe 441 thereof are a compressive state and pneumatic head 42 up moves to the second place, and promptly valve gap 43 its lid edge 432 form a clearance G with fixed body 41 its bases 411.At the same time, above-mentioned clearance G communicates with the venthole 4221 of pneumatic head 42, therefore, spray nozzle of the gas supply 50 its gases just can be in regular turn via the upper shed 414 of venthole 4221, clearance G and the fixed body 41 of the air inlet 423 of filter 45, pneumatic head 42, pneumatic head 42 and enter chip cartridges inside.And when chip cartridges is finished inflation, just spray nozzle of the gas supply 50 down can be regained to stop it and be supported pneumatic head 42, at this moment, the elastic parts 44 that is compression originally just can play a role, and pneumatic head 42 is down pushed away making valve gap 43 its lid edge 432 form airtight again with fixed body 41 its bases 411.

Then, please refer to Fig. 9 and Figure 10, can further dispose or a sheathed fastener 46 in the outer peripheral face bottom of pneumatic head 42 its pedestals 421, this fastener 46 comprises that a ring-shaped sleeve 461 and ring-shaped sleeve 461 lower edges are extended with an inclined-plane airtight 462 to the center; Therefore, when above-mentioned spray nozzle of the gas supply 50 supports pneumatic head 42, can avoid the gas of chip cartridges outside or the gas of surrounding environment to enter pneumatic head 42 inside, can more guarantee the cleaning of chip cartridges inside for airtight 462.And as shown in figure 11, spray nozzle of the gas supply 50 is fixed on the load bearing interface 60, rather than can be from load bearing interface 60 movable the or form of stretching out.Therefore, when chip cartridges one was put on the load bearing interface 60, the charge valve 40 in its through hole 30 of chip cartridges was just opened immediately, and the spray nozzle of the gas supply 50 on the load bearing interface 60 also can be inflated at once, to save the inflation required time.And when chip cartridges one was left load bearing interface 60, elastic parts 44 also can down push away pneumatic head 42 equally and make valve gap 43 and fixed body 41 its bases 411 form airtight.

Certainly, above-mentioned pneumatic head 42 bottoms dispose or sheathed fastener 46 can also be as the structure of Figure 12, and airtight 462 of these fastener 46 its ring-shaped sleeve 461 lower edges is level, but not the inclined-plane.The gas of airtight 462 also the same energy limited chip box outside like this or the gas of surrounding environment enter the inside of pneumatic head 42.And the present invention can also be that charge valve 40 is own except that the chip cartridges that disposes charge valve 40, and charge valve 40 its most preferred embodiments comprise fixed body 41, pneumatic head 42, elastic parts 44, valve gap 43 and filter 45; But charge valve 40 lacks elastic parts 44 and filter 45, though the effect of inflation is relatively poor, also is to make pneumatic head 42 travel to and fro between up and down two diverse locations to finish inflation.Therefore, charge valve 40 of the present invention can only comprise fixed body 41, pneumatic head 42 and valve gap 43 and gets final product.In addition, pneumatic head 42 also can only keep hollow tube-shape portion 422, and does not need pedestal 421; Structure like this, spray nozzle of the gas supply 50 equally can support pneumatic head 42 makes hollow tube-shape portion 422 its ventholes 4221 communicate with clearance G.

Though the present invention with aforesaid preferred embodiment openly as above; right its is not in order to limit the present invention; anyly have the knack of alike skill person; without departing from the spirit and scope of the present invention; when can doing a little change and retouching, therefore scope of patent protection of the present invention must look this specification appended claim defined is as the criterion.

Claims

1. a charge valve is characterized in that, comprising:

One fixed body has a base and is provided with a under shed at the center of this base;

One pneumatic head comprises a pedestal and by the center of this pedestal hollow tube-shape portion to upper process, and wherein, this hollow tube-shape portion is arranged in this under shed of this fixed body and the perisporium of this hollow tube-shape portion is provided with a venthole;

One elastic parts is located on around this hollow tube-shape portion of this pneumatic head, is located between its base of this fixed body and its pedestal of this pneumatic head; And

One valve gap is disposed in this hollow tube-shape portion of this pneumatic head, and this pneumatic head is supported down in up an external force, is moved to a second place and is compressed this elastic parts by a primary importance in this under shed;

Wherein when this pneumatic head was in this primary importance, this valve gap compressed this base of this fixed body, and when being in this second place, this valve gap communicates with this gap with this venthole that this base forms a gap and this pneumatic head.

2. charge valve as claimed in claim 1 is characterized in that, this elastic parts be a circulus and this circulus around connect a plurality of elasticity lobes.

3. charge valve as claimed in claim 1 is characterized in that, the place, periphery in this under shed on this base of this fixed body is provided with an annular recess, and this annular recess is embedded with a gas seal member.

4. chip cartridges, mainly comprise a box body, this box body inside is equipped with a plurality of chips, and forming an opening in a side of this box body can be for the input and the output of these a plurality of chips, a body, in order to closing this opening of this box body, and a charge valve is disposed in the through hole on this box body, and wherein this chip cartridges is characterised in that:

This charge valve comprises a fixed body that is installed on this through hole, this fixed body has a base and be formed centrally opening in this base, with the interior pneumatic head of adorning, this pneumatic head its perisporium be provided with a venthole and this pneumatic head above further dispose a valve gap, this pneumatic head is supported down in up an external force, in this under shed, move to a second place by a primary importance, when this pneumatic head is in this primary importance, this valve gap compresses this base of this fixed body, and when being in this second place, this valve gap communicates with this gap with this venthole that this base forms a gap and this pneumatic head.

5. chip cartridges, mainly comprise a box body, this box body inside is equipped with a plurality of chips, and forming an opening in a side of this box body can be for the input and the output of these a plurality of chips, a body, in order to this opening of this box body of switch, and a charge valve, this charge valve is disposed in the through hole on this box body, and wherein this chip cartridges is characterised in that:

This charge valve comprises a fixed body that is installed on this through hole, this fixed body has a base and be formed centrally opening in this base, with the interior pneumatic head of adorning, this pneumatic head comprises that a pedestal and is by the center of this pedestal hollow tube-shape portion to upper process, this hollow tube-shape portion is equipped with an elastic parts and is provided with a venthole at its perisporium, and the top of this hollow tube-shape portion further disposes a valve gap, this pneumatic head is supported down in up an external force, in this under shed, move to a second place and compress this elastic parts by a primary importance, when this pneumatic head is in this primary importance, this valve gap compresses this base of this fixed body, and when being in this second place, this valve gap communicates with this gap with this venthole that this base forms a gap and this pneumatic head.

6. chip cartridges as claimed in claim 5 is characterized in that, this elastic parts be a circulus and this circulus around connect a plurality of elasticity lobes.

7. chip cartridges as claimed in claim 5 is characterized in that, is provided with an annular recess in this under shed periphery on this base of this fixed body, and this annular recess is embedded with a circular rings.

8. chip cartridges as claimed in claim 5 is characterized in that the bottom of this pneumatic head has an air inlet, and air inlet further is equipped with a filter.

9. chip cartridges as claimed in claim 5 is characterized in that, this pedestal of this pneumatic head is configuration one fastener further, and avoiding when a spray nozzle of the gas supply up supports this pneumatic head, the gas of surrounding environment enters this pneumatic head.

10. chip cartridges as claimed in claim 5, it is characterized in that, this base of this fixed body is extended with a madial wall toward below all around, this madial wall further is provided with a plurality of projecting ribs, to utilize these a plurality of projecting ribs to contact this pedestal of this pneumatic head, this hollow tube-shape portion of this pneumatic head is maintained in this under shed of this fixed body.