JPS6287749A - Conveying device - Google Patents

Conveying device

Info

Publication number
JPS6287749A
JPS6287749A JP22646685A JP22646685A JPS6287749A JP S6287749 A JPS6287749 A JP S6287749A JP 22646685 A JP22646685 A JP 22646685A JP 22646685 A JP22646685 A JP 22646685A JP S6287749 A JPS6287749 A JP S6287749A
Authority
JP
Japan
Prior art keywords
air chamber
clean air
clean
box
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22646685A
Other languages
Japanese (ja)
Inventor
Hiroshi Kato
宏 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP22646685A priority Critical patent/JPS6287749A/en
Publication of JPS6287749A publication Critical patent/JPS6287749A/en
Pending legal-status Critical Current

Links

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  • Handcart (AREA)
  • Auxiliary Methods And Devices For Loading And Unloading (AREA)
  • Ventilation (AREA)

Abstract

PURPOSE:To permit to keep the insides of a clean air chamber and a conveying box as well as an article to be conveyed clean by a method wherein a cleaning process mechanism, replacing the inside air of connecting section between the carrying box and the clean air chamber with glean gas, is provided in the title device. CONSTITUTION:When an article 8 is transferred between a conveying box 4 and a clean air chamber 1, the conveying box 4 is carried at first under a condition that both of doors 2, 5 are being closed and the opening 6 of the carrying box 4 is connected to the opening 3 of the clean air chamber 1 through a connecting section 7. Subsequently, a cleaning process mechanism 10 is operated to discharge air in a space 9 enclosed by the doors 2, 5 and the connecting section 7 through an air discharging port 11 and clean a circumstance in the space 9. Thereafter, the doors 2, 5 are opened to transfer the article 8. According to this method, adhesion of dust to the article 8 in case of delivering it from the conveying box 4 into the clean air chamber 1 may be precluded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は塵埃の付着をさけなければならない物品の運搬
用装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a device for transporting articles that must be protected from dust.

〔従来の技術〕[Conventional technology]

従来、清浄な状態で運ぶ必要のある物品を運搬するとき
は、清浄度を保った運搬箱内に入れて運んでいるが、そ
の運搬箱から清浄空気室内に物品を搬入するとき、従来
は運搬箱に物品を入れたまま運搬箱を清浄空気室内に搬
入し、運搬箱の外面を清浄にした後、運搬箱を開けて物
品を取シ出している。また、近年は第3図に示す様に、
清浄空気室1の扉2を備えた開口部3と、運搬箱4の扉
5を備えた開口部6とを連結部7で連結し、外部の空間
と遮断した状態で扉2及び5を開き、物品8を移載する
ことも行なわれている。
Conventionally, when transporting items that need to be transported in clean conditions, they are transported in a transport box that maintains cleanliness. The transport box is carried into a clean air chamber with the articles still in it, and after the outer surface of the transport box is cleaned, the transport box is opened and the articles are taken out. In addition, in recent years, as shown in Figure 3,
The opening 3 with the door 2 of the clean air chamber 1 and the opening 6 with the door 5 of the transport box 4 are connected by a connecting part 7, and the doors 2 and 5 are opened while being isolated from the outside space. , the article 8 is also transferred.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上述した従来の運搬装置では、塵埃の付着した運搬箱を
清浄空気室に持込むことによって清浄空気室を汚染して
しまうことがあった。また第3図に示す運搬装置では扉
2と扉5及び連結部7で囲まれた閉空間内9の清浄でな
い空気中の塵埃が物品8や運搬箱4の内部に付着したシ
、清浄空気室1の内部に入るという欠点があった。
In the above-mentioned conventional transportation device, the clean air chamber may be contaminated by bringing the transportation box with dust on it into the clean air chamber. In addition, in the transport device shown in FIG. 3, dust in the unclean air in the closed space 9 surrounded by the doors 2, 5, and the connecting part 7 may adhere to the goods 8 and the inside of the transport box 4, and the clean air chamber It had the disadvantage of being inside 1.

本発明は前記問題点を解消し、運搬室から清浄空気室に
搬入する際に、物品に塵埃が付着するのを阻止する運搬
装置を提供するものである。
The present invention solves the above-mentioned problems and provides a transport device that prevents dust from adhering to articles when they are transported from a transport chamber to a clean air chamber.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は運搬箱に物品を収納したまま、これを清浄空気
室まで搬送し、運搬箱と清浄空気室とを連結部で連通し
、運搬箱から清浄空気室内に物品を搬入する運搬装置に
おいて、前記連結部の内部空気を清浄な気体に置換する
浄化処理機構を有することを特徴とする運搬装置である
The present invention provides a transportation device that transports articles stored in a transportation box to a clean air chamber, communicates the transportation box and the clean air chamber through a connecting portion, and transports the articles from the transportation box into the clean air chamber. The transportation device is characterized in that it has a purification mechanism that replaces the internal air of the connecting portion with clean gas.

〔実施例〕〔Example〕

次に、本発明の一実施例について、図面を参照して説明
する。
Next, one embodiment of the present invention will be described with reference to the drawings.

第1図において、清浄空気室1の開口部3には扉2が備
えられ、運搬箱4の開口部6には扉5が設けられている
。清浄空気室lの開口部3に設けられた連結部7には、
清浄気体に置換する浄化処理機構lOが接続され、また
、連結部7の下部には空気の出口11が設けである。
In FIG. 1, an opening 3 of a clean air chamber 1 is provided with a door 2, and an opening 6 of a transport box 4 is provided with a door 5. The connecting part 7 provided at the opening 3 of the clean air chamber l has a
A purification processing mechanism IO for replacing the gas with clean gas is connected, and an air outlet 11 is provided at the bottom of the connecting portion 7.

本実施例において、物品8を運搬箱4と清浄空気室lの
間で移載する場合には、先ず、両扉2と5を閉じた状態
で運搬箱4を運搬し、連結部7によって運搬箱4の開口
部6と清浄空気室1の開口部3とを連結する。次に、浄
化処理機構10を作動させ扉2と扉5及び連結部7で囲
まれた空間9内の空気を空気の出口11から排出させて
、空間9内の雰囲気を清浄にする。しかる後に扉2と扉
5を開いて物品8を移載する。
In this embodiment, when transferring the article 8 between the transport box 4 and the clean air chamber l, the transport box 4 is first transported with both doors 2 and 5 closed, and then transported by the connecting part 7. The opening 6 of the box 4 and the opening 3 of the clean air chamber 1 are connected. Next, the purification processing mechanism 10 is activated to discharge the air in the space 9 surrounded by the doors 2, 5, and the connecting portion 7 from the air outlet 11, thereby purifying the atmosphere in the space 9. After that, the door 2 and the door 5 are opened and the article 8 is transferred.

第2図は、本発明の他の実施例の断面図である。FIG. 2 is a cross-sectional view of another embodiment of the invention.

本実施例においては、連結部17は運搬箱4の開口部6
に設けられ、伸縮自在な構造になっている。
In this embodiment, the connecting portion 17 is connected to the opening 6 of the transport box 4.
It has a flexible structure.

また、清浄空気室1の開口部3に設けられた扉2は全開
せずに一部を開けた状態で止まる様に制御可能になって
いる。本実施例では浄化処理機構10として、清浄空気
室1を利用している。すなわち、本実施例において、物
品8を運ぶ場合には、両扉2および5を閉じた状態で、
運搬箱4を両開口部3と6が向い合う位置に固定し、次
に連結部17を伸ばして開口部3に接続し、扉2を一部
開いて清浄空気室l内の空気を空間9内に流し込み、空
間9内の非清浄な空気を出口11から排出し、空間9内
の雰囲気を清浄にしだ後に1両扉2および5を開き、物
品8を清浄空気室1と運搬箱4の間で移載する。
Furthermore, the door 2 provided at the opening 3 of the clean air chamber 1 can be controlled so as to remain partially open, rather than fully opened. In this embodiment, a clean air chamber 1 is used as the purification processing mechanism 10. That is, in this embodiment, when transporting the article 8, with both doors 2 and 5 closed,
The transport box 4 is fixed in a position where both openings 3 and 6 face each other, and then the connecting part 17 is extended and connected to the opening 3, and the door 2 is partially opened to drain the air in the clean air chamber 1 into the space 9. The non-clean air in the space 9 is discharged from the outlet 11, and after the atmosphere in the space 9 has been purified, both doors 2 and 5 are opened, and the articles 8 are placed in the clean air chamber 1 and the transport box 4. Transfer between.

本発明の第1の実施例において、浄化処理機構10は空
気中の塵埃を取9除き空気を圧送する設備でもよいし、
清浄な乾燥空気または乾燥窒素を供給するパイプでも可
能なことは明らかである。また、第2の実施例において
、空間9内の空気を排出するために扉2を部分的に開い
たが、扉2の一部分に開閉可能な小扉を設けても良いし
、扉2とは別に清浄空気室1と空間9を結ぶ小扉を設け
ても良い。
In the first embodiment of the present invention, the purification processing mechanism 10 may be a device that removes dust from the air and pumps the air.
Obviously, pipes supplying clean dry air or dry nitrogen are also possible. Further, in the second embodiment, the door 2 was partially opened to exhaust the air in the space 9, but a small door that can be opened and closed may be provided in a part of the door 2, or the door 2 may be A small door may be separately provided to connect the clean air chamber 1 and the space 9.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は清浄空気室と運搬箱との間
の空間の雰囲気を清浄にした後に物品を移載することに
よシ、清浄空気室や、運搬箱内部および物品を清浄に保
ったまま移載することができる効果を有するものである
As explained above, the present invention cleans the atmosphere in the space between the clean air chamber and the transport box before transferring the goods, thereby keeping the clean air chamber, the inside of the transport box, and the goods clean. This has the effect that it can be transferred without any change.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の第1の実施例を示す断面図、第2図は
本発明の第2の実施例を示す断面図、第3図は従来の運
搬装置の断面図である。 1・・・清浄空気室、2・・・扉、3・・・開口部、4
・・・運搬箱、5・・・扉、6・・・開口部、7・・・
連結部、8・・・被搬送物、9・・・空間、lO・・・
浄化処理機構、11・・・出口。 第2図 第3図
FIG. 1 is a sectional view showing a first embodiment of the present invention, FIG. 2 is a sectional view showing a second embodiment of the invention, and FIG. 3 is a sectional view of a conventional conveying device. 1... Clean air chamber, 2... Door, 3... Opening, 4
... Transport box, 5... Door, 6... Opening, 7...
Connecting portion, 8... Object to be transported, 9... Space, lO...
Purification processing mechanism, 11...exit. Figure 2 Figure 3

Claims (1)

【特許請求の範囲】[Claims] (1)運搬箱に物品を収納したまま、これを清浄空気室
まで搬送し、運搬箱と清浄空気室とを連結部で連通し、
運搬箱から清浄空気室内に物品を搬入する運搬装置にお
いて、前記連結部の内部空気を清浄な気体に置換する浄
化処理機構を有することを特徴とする運搬装置。
(1) Transport the goods stored in the transport box to the clean air chamber, connect the transport box and the clean air chamber through a connecting part,
A transportation device for transporting articles from a transportation box into a clean air chamber, characterized in that the transportation device has a purification mechanism that replaces the internal air of the connecting portion with clean gas.
JP22646685A 1985-10-11 1985-10-11 Conveying device Pending JPS6287749A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22646685A JPS6287749A (en) 1985-10-11 1985-10-11 Conveying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22646685A JPS6287749A (en) 1985-10-11 1985-10-11 Conveying device

Publications (1)

Publication Number Publication Date
JPS6287749A true JPS6287749A (en) 1987-04-22

Family

ID=16845537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22646685A Pending JPS6287749A (en) 1985-10-11 1985-10-11 Conveying device

Country Status (1)

Country Link
JP (1) JPS6287749A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH053240A (en) * 1991-06-24 1993-01-08 Tdk Corp Method and apparatus for clean conveyance
US5713791A (en) * 1995-04-06 1998-02-03 Motorola, Inc. Modular cleanroom conduit and method for its use
JPH10241858A (en) * 1997-02-25 1998-09-11 Tdk Corp Manufacture of organic electroluminescent display device and device therefor
US6543981B1 (en) * 2001-03-30 2003-04-08 Lam Research Corp. Apparatus and method for creating an ultra-clean mini-environment through localized air flow augmentation
US20070130738A1 (en) * 2005-12-14 2007-06-14 Tokyo Electron Limited Vacuum processing apparatus and zonal airflow generating unit

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH053240A (en) * 1991-06-24 1993-01-08 Tdk Corp Method and apparatus for clean conveyance
US5713791A (en) * 1995-04-06 1998-02-03 Motorola, Inc. Modular cleanroom conduit and method for its use
JPH10241858A (en) * 1997-02-25 1998-09-11 Tdk Corp Manufacture of organic electroluminescent display device and device therefor
US6543981B1 (en) * 2001-03-30 2003-04-08 Lam Research Corp. Apparatus and method for creating an ultra-clean mini-environment through localized air flow augmentation
US20070130738A1 (en) * 2005-12-14 2007-06-14 Tokyo Electron Limited Vacuum processing apparatus and zonal airflow generating unit
US8794896B2 (en) * 2005-12-14 2014-08-05 Tokyo Electron Limited Vacuum processing apparatus and zonal airflow generating unit

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