JPS622081A - モジユ−ル式ガス取扱装置 - Google Patents
モジユ−ル式ガス取扱装置Info
- Publication number
- JPS622081A JPS622081A JP13473486A JP13473486A JPS622081A JP S622081 A JPS622081 A JP S622081A JP 13473486 A JP13473486 A JP 13473486A JP 13473486 A JP13473486 A JP 13473486A JP S622081 A JPS622081 A JP S622081A
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- valve
- port
- block
- path block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Valve Housings (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US74331785A | 1985-06-10 | 1985-06-10 | |
US743317 | 1985-06-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS622081A true JPS622081A (ja) | 1987-01-08 |
JPH0445712B2 JPH0445712B2 (un) | 1992-07-27 |
Family
ID=24988332
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13473486A Granted JPS622081A (ja) | 1985-06-10 | 1986-06-10 | モジユ−ル式ガス取扱装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS622081A (un) |
GB (1) | GB2176270B (un) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003507768A (ja) * | 1999-08-23 | 2003-02-25 | マス エンジニアード デザイン | Lcdモニタのための万能即時連結装置 |
JP2008231515A (ja) * | 2007-03-20 | 2008-10-02 | Tokyo Electron Ltd | 気化器,気化モジュール,成膜装置 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4892115A (en) * | 1988-06-16 | 1990-01-09 | Continental Can Company, Inc. | Control valve assembly |
FR2670270B1 (fr) * | 1990-12-05 | 1993-04-02 | Spirax Sarco | Poste de purge monobloc a robinets d'isolement incorpores. |
US5163475A (en) * | 1991-11-26 | 1992-11-17 | Praxair Technology, Inc. | Gas delivery panels |
DE4324867A1 (de) * | 1993-07-23 | 1995-01-26 | Roemer J C Avs Gmbh | Kugelhahn, Verteilergehäuse und modulares Bausystem mit Kugelhähnen |
US6293310B1 (en) * | 1996-10-30 | 2001-09-25 | Unit Instruments, Inc. | Gas panel |
US5992463A (en) * | 1996-10-30 | 1999-11-30 | Unit Instruments, Inc. | Gas panel |
US11091837B2 (en) * | 2016-10-24 | 2021-08-17 | Fujikin Incorporated | Fluid control system and product manufacturing method using fluid control system |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5054923A (un) * | 1973-09-14 | 1975-05-14 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1062506B (de) * | 1956-04-09 | 1959-07-30 | William Carls | Anschlusssockel fuer eine Vielzahl von Steuerventilen fuer druckmittelbetaetigte Arbeitszylinder |
US3171435A (en) * | 1961-12-05 | 1965-03-02 | Parker Hannifin Corp | Solenoid operated valve assembly |
US3538947A (en) * | 1967-11-27 | 1970-11-10 | Teldix Gmbh | Multiple valve araangement |
DE1775516C3 (de) * | 1968-08-16 | 1975-10-02 | Basf Ag, 6700 Ludwigshafen | Mischventil für Kunststoff-Gießmaschinen |
GB1512255A (en) * | 1975-07-04 | 1978-05-24 | Schwelm & Towler Hydraulics | Hydraulic machine control |
US4078574A (en) * | 1976-10-22 | 1978-03-14 | Modular Controls Corporation | Modular control valve |
GB2053422A (en) * | 1979-05-12 | 1981-02-04 | Gkn Sankey Ltd | Valve block |
-
1986
- 1986-06-10 JP JP13473486A patent/JPS622081A/ja active Granted
- 1986-06-10 GB GB8614112A patent/GB2176270B/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5054923A (un) * | 1973-09-14 | 1975-05-14 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003507768A (ja) * | 1999-08-23 | 2003-02-25 | マス エンジニアード デザイン | Lcdモニタのための万能即時連結装置 |
JP2008231515A (ja) * | 2007-03-20 | 2008-10-02 | Tokyo Electron Ltd | 気化器,気化モジュール,成膜装置 |
WO2008120531A1 (ja) * | 2007-03-20 | 2008-10-09 | Tokyo Electron Limited | 気化器,気化モジュール,成膜装置 |
US8197601B2 (en) | 2007-03-20 | 2012-06-12 | Tokyo Electron Limited | Vaporizer, vaporization module and film forming apparatus |
Also Published As
Publication number | Publication date |
---|---|
GB8614112D0 (en) | 1986-07-16 |
GB2176270A (en) | 1986-12-17 |
JPH0445712B2 (un) | 1992-07-27 |
GB2176270B (en) | 1989-08-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
LAPS | Cancellation because of no payment of annual fees | ||
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |