JPS6220659U - - Google Patents
Info
- Publication number
- JPS6220659U JPS6220659U JP11116585U JP11116585U JPS6220659U JP S6220659 U JPS6220659 U JP S6220659U JP 11116585 U JP11116585 U JP 11116585U JP 11116585 U JP11116585 U JP 11116585U JP S6220659 U JPS6220659 U JP S6220659U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- substrate
- motor
- centrifugally
- dries
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Centrifugal Separators (AREA)
Description
図面はこの考案の遠心乾燥装置の１実施例の概
略構成図である。
３…乾燥室、６…モータ、８…ロータ、１０…
真空ポンプ、１１…吸気配管。
The drawing is a schematic diagram of one embodiment of the centrifugal drying apparatus of this invention. 3...Drying room, 6...Motor, 8...Rotor, 10...
Vacuum pump, 11...Intake piping.
Claims (1)
燥用基板が装着されるロータと、前記ロータを回
転し前記基板を遠心乾燥するモータと、前記乾燥
室の内部に配管を介して連通され前記乾燥室内を
減圧する真空装置とを備えた遠心乾燥装置。 A rotor that is rotatably provided in a sealed drying chamber and has a substrate to be dried mounted thereon; a motor that rotates the rotor and centrifugally dries the substrate; A centrifugal drying device equipped with a vacuum device that reduces the pressure inside the room.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11116585U JPS6220659U (en) | 1985-07-20 | 1985-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11116585U JPS6220659U (en) | 1985-07-20 | 1985-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6220659U true JPS6220659U (en) | 1987-02-07 |
Family
ID=30990833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11116585U Pending JPS6220659U (en) | 1985-07-20 | 1985-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6220659U (en) |
-
1985
- 1985-07-20 JP JP11116585U patent/JPS6220659U/ja active Pending
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