JPS62204323U - - Google Patents
Info
- Publication number
- JPS62204323U JPS62204323U JP9256486U JP9256486U JPS62204323U JP S62204323 U JPS62204323 U JP S62204323U JP 9256486 U JP9256486 U JP 9256486U JP 9256486 U JP9256486 U JP 9256486U JP S62204323 U JPS62204323 U JP S62204323U
- Authority
- JP
- Japan
- Prior art keywords
- powder layer
- quartz glass
- powder
- quartz
- cylindrical container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Glass Melting And Manufacturing (AREA)
Description
第１図は本考案のベルジヤーの斜視図であり、
第２，３図は本考案のベルジヤーの製造工程の説
明図である。 １…窓、２…粉体層、３…円筒容器、４…供給
口、５…透明石英ガラス板、６…熱源。
第２，３図は本考案のベルジヤーの製造工程の説
明図である。 １…窓、２…粉体層、３…円筒容器、４…供給
口、５…透明石英ガラス板、６…熱源。
Claims (1)
- 回転する中空有底円筒容器内に石英粉を入れ遠
心力によつて成型した粉体層内面の所望の位置に
、透明石英ガラス板を粉体層内面と同一面をなす
ように埋め込んだ後、粉体層をガラス化してなる
ことを特徴とする石英ガラス製ベルジヤー。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9256486U JPH0143859Y2 (ja) | 1986-06-18 | 1986-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9256486U JPH0143859Y2 (ja) | 1986-06-18 | 1986-06-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62204323U true JPS62204323U (ja) | 1987-12-26 |
| JPH0143859Y2 JPH0143859Y2 (ja) | 1989-12-19 |
Family
ID=30954379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9256486U Expired JPH0143859Y2 (ja) | 1986-06-18 | 1986-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0143859Y2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08162423A (ja) * | 1994-11-30 | 1996-06-21 | Shinetsu Quartz Prod Co Ltd | 枚葉式ウエーハ熱処理装置とその装置に用いる反応容器の製造方法 |
-
1986
- 1986-06-18 JP JP9256486U patent/JPH0143859Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08162423A (ja) * | 1994-11-30 | 1996-06-21 | Shinetsu Quartz Prod Co Ltd | 枚葉式ウエーハ熱処理装置とその装置に用いる反応容器の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0143859Y2 (ja) | 1989-12-19 |