JPS62204213A - Optical coupler - Google Patents

Optical coupler

Info

Publication number
JPS62204213A
JPS62204213A JP4783486A JP4783486A JPS62204213A JP S62204213 A JPS62204213 A JP S62204213A JP 4783486 A JP4783486 A JP 4783486A JP 4783486 A JP4783486 A JP 4783486A JP S62204213 A JPS62204213 A JP S62204213A
Authority
JP
Japan
Prior art keywords
prism
fixing
optical coupling
optical waveguide
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4783486A
Other languages
Japanese (ja)
Other versions
JP2579906B2 (en
Inventor
Hidetaka Tono
秀隆 東野
Hideaki Adachi
秀明 足立
Osamu Yamazaki
山崎 攻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP61047834A priority Critical patent/JP2579906B2/en
Publication of JPS62204213A publication Critical patent/JPS62204213A/en
Application granted granted Critical
Publication of JP2579906B2 publication Critical patent/JP2579906B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To convert the stress direction of a fixing part into a direction independent of optional coupling and to prevent the efficiency of optical coupling from reduction due to fixing by fixing a base with a prism through a fixing board. CONSTITUTION:In a device for executing optical coupling of an optical waveguide 2 formed on the base 1 with the external by the prism 3 pressed against the optical waveguide 2, the prism 3 is fixed on the base 1 through the fixing board 4. Polyester resin, soldering or laser welding is used as a more concrete fixing means, the gap between the bottom of the prism 3 and the optical waveguide 2 is kept as it is or filled with transparent resin or transparent grease and a material having linear expansion coefficient almost equal to that of the prism 3 is used as the material of the fixing board 4. Consequently, the prism 3 can be rigidly fixed and stabilized against external force and vibration, the positional shear at the time of fixing can be easily reduced as <=1mum and the reduction of the coupling efficiency can be neglected. Since the gap between the prism 3 and the optical waveguide 2 is not almost changed in spite of temperature change and stable optical coupling can be attained.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は光フアイバ通信、光応用計測・制御、光情報処
即の分野に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to the fields of optical fiber communications, optical applied measurement and control, and optical information processing.

従来の技術 第4図および第5図は従来の技術を示す側面図および正
面図である。第4図および第5図において、基板1上に
形成された光導波路2上に押し当てられた(圧接された
)プリズム3の底面と基板1間に、エポキシ系接着剤あ
るいは紫外線硬化樹脂による接着剤11を充填させて、
最高の光結合効率が得られる様に空隙を調整した後、硬
化させ、そしてプリズム3の固定を行っていた。また、
補強のためにプリズム3の側面に接着剤12を塗布した
りもしていた。
Prior Art FIGS. 4 and 5 are a side view and a front view showing the prior art. 4 and 5, the bottom surface of the prism 3 pressed onto the optical waveguide 2 formed on the substrate 1 and the substrate 1 are bonded using epoxy adhesive or ultraviolet curing resin. Fill with agent 11,
After adjusting the air gap to obtain the highest optical coupling efficiency, it was cured and the prism 3 was fixed. Also,
Adhesive 12 was also applied to the sides of the prism 3 for reinforcement.

発明が解決しようとする問題点 従来の技術では、接着剤11が硬化する際の収縮膨張に
より、プリズムと光導波路間の空隙が変化し、修正が不
可能であり光結合効率が低下して問題となっていた。ま
た、接着剤による固定のため、外力や振動、温度に対し
ても、光結合効率の変動があり問題となっていた。
Problems to be Solved by the Invention In the conventional technology, the gap between the prism and the optical waveguide changes due to contraction and expansion when the adhesive 11 hardens, making it impossible to correct and reducing the optical coupling efficiency. It became. Furthermore, since the device is fixed with adhesive, the optical coupling efficiency fluctuates due to external force, vibration, and temperature, which has been a problem.

問題点を解決するための手段 上記問題点を解決するため本発明の光結合装置は、基板
上に設けられた光導波路と外部との光結合を、前記先導
波路に押し当てられたプリズムにより行なう光結合装置
において、前記プリズムを固定台を介して基板上に固定
することを特徴とするものである。より具体的には、固
定手段として、ポリエステル系樹脂、あるいははんだ付
、あるいはレーザ溶接を用いることを特徴とし、またプ
リズム底面と光導波路間の空隙は、そのままか、あるい
は透明な樹脂、あるいは透明なグリスで充填することを
特徴とし、さらに固定台の材料としてプリズムとほぼ等
しい線膨張率を有するものを使用したことを特徴とする
ものである。
Means for Solving the Problems In order to solve the above problems, the optical coupling device of the present invention performs optical coupling between the optical waveguide provided on the substrate and the outside using a prism pressed against the leading waveguide. The optical coupling device is characterized in that the prism is fixed onto a substrate via a fixing stand. More specifically, it is characterized by using polyester resin, soldering, or laser welding as the fixing means, and the gap between the bottom surface of the prism and the optical waveguide is left as is, or is made of transparent resin or transparent resin. The present invention is characterized in that it is filled with grease, and that a material having a coefficient of linear expansion approximately equal to that of the prism is used as the material for the fixing base.

作用 プリズムと基板とを固定板を介して固定するので、プリ
ズムの固定が強固になり、外力や振動に対し安定となる
。また、ポリエステル系接着材には硬化時の収縮率が0
.1〜0.2%のものがあり、固定の際の位置ずれは1
μm以下が容易に得られ、結合効率の低下はわずかで問
題ない。また、はんだ付では迅速な固定が実現でき、温
度を上げることにより再調整が可能という作用がある。
Since the working prism and the substrate are fixed via the fixing plate, the prism is firmly fixed and stable against external forces and vibrations. Additionally, polyester adhesives have a shrinkage rate of 0 when cured.
.. There are 1 to 0.2%, and the positional deviation during fixation is 1
A diameter of less than μm can be easily obtained, and there is no problem with a slight decrease in coupling efficiency. In addition, soldering allows quick fixing, and readjustment is possible by raising the temperature.

また、レーザ溶接による固定では秒以下の固定が実現で
き、極めて迅速かつ堅固な固定が可能となる。また、プ
リズム底面と光導波路間の空隙に透明な樹脂を充填する
ことにより空隙の光結合の行われる部分に外部からのご
みの侵入を防止し、光の散乱損失を低下させることがで
き、長期間にわたって保護°層の役割を果たす。また、
空隙に透明なグリスを充填することにより、プリズムの
空隙部に応力を生ずることなく、ごみの侵入を防止し、
かつ光の散乱損失を低下させる作用を有する。さらに、
固定台の線膨張率がプリズムのものとほぼ等しい材料を
用いることにより、プリズムと光導波路間の空隙が温度
変化に対してもほとんど変化せず、安定な光結合が実現
できる。
Furthermore, fixation using laser welding can achieve fixation in seconds or less, making it possible to achieve extremely quick and firm fixation. In addition, by filling the gap between the prism bottom surface and the optical waveguide with transparent resin, it is possible to prevent foreign particles from entering the part of the gap where optical coupling takes place, and reduce light scattering loss. Acts as a layer of protection over a period of time. Also,
By filling the voids with transparent grease, no stress is created in the voids of the prism, and dust is prevented from entering.
It also has the effect of reducing light scattering loss. moreover,
By using a material for the fixed base whose coefficient of linear expansion is approximately equal to that of the prism, the gap between the prism and the optical waveguide hardly changes even with temperature changes, and stable optical coupling can be achieved.

実施例 第1図および第2図は、本発明の第1の実施例を示す側
面図および正面図である。ここでは説明のために、サフ
ァイアを基板1に用い、PLZT系WI膜を光導波路2
の材料に使用した例を述べる。
Embodiment FIGS. 1 and 2 are a side view and a front view showing a first embodiment of the present invention. For the sake of explanation, sapphire is used for the substrate 1, and a PLZT-based WI film is used for the optical waveguide 2.
An example of using this material is described below.

プリズム3には屈折率3・3のGa Pの直角プリズム
3を用いた。光導波路2にプリズム3のエラジを押し当
て、プリズム3の底面と光導波路2とで形成される空隙
8を調整して入力光〇を集光し、エツジ近傍に当て、プ
リズム3中の導波角θ岬40.7度で入射させた時に光
導波路2中に導波光7として導波させた。空隙8とビー
ム入射位置を調整し、最高結合効率の時点で固定台4を
基板1に固定し、その後プリズム3と固定した。空隙8
寸法は、プリズム3N!面と、光導波路2間の干渉によ
る縞の間隔を測ることで知ることができる。固定台4の
材質は、ソーダガラスを用いた。固定は、固定部5a、
5bともに、ポリエステル系樹脂(テクノビット400
0(登録商標)、西独クルツアー社製、硬化時の収縮率
は0,1〜0.2%)を用いて約15分で完全に硬化し
た。硬化時の空隙8の変化はほとんどみられなかった。
As the prism 3, a GaP right angle prism 3 having a refractive index of 3.3 was used. The edge of the prism 3 is pressed against the optical waveguide 2, the gap 8 formed between the bottom surface of the prism 3 and the optical waveguide 2 is adjusted, the input light 〇 is focused, and it is applied to the vicinity of the edge, and the waveguide in the prism 3 is focused. When the light was incident at an angle θ of 40.7 degrees, it was guided into the optical waveguide 2 as guided light 7. The gap 8 and the beam incidence position were adjusted, and the fixing table 4 was fixed to the substrate 1 at the time of maximum coupling efficiency, and then fixed to the prism 3. void 8
The dimensions are prism 3N! This can be determined by measuring the interval between fringes caused by interference between the surface and the optical waveguide 2. As the material of the fixing base 4, soda glass was used. The fixing is done by the fixing part 5a,
Both 5b are made of polyester resin (Technovit 400
0 (registered trademark), manufactured by Kultur GmbH, West Germany, shrinkage rate during curing is 0.1 to 0.2%), and was completely cured in about 15 minutes. Almost no change in the voids 8 was observed during curing.

これは、樹脂の硬化時の収縮率が0.2%以下と極めて
小さいことと、プリズム3に対し固定台4が側面から固
定され、両側面から同時に固定を行うため、応力バラン
スがとれてプリズム3の傾きやプリズム3の浮き沈みが
なくなったものと思われる。なお、図中の下方に座標軸
方向を示す。
This is because the shrinkage rate of the resin during curing is extremely small at 0.2% or less, and because the fixing base 4 is fixed to the prism 3 from the side and is fixed from both sides simultaneously, the stress is balanced and the prism It seems that the tilt of 3 and the ups and downs of prism 3 are gone. Note that the direction of the coordinate axes is shown at the bottom of the figure.

第3図は本発明の第2の実施例を示す側面図である。第
3図において、プリズム9の底面が純色をなしており、
実験には85°の純色をなした綾線10を光導波路2に
押し当てて、入射光6を絞ってこの部分に当てた。この
プリズム9の場合、光結合効率の調整は導波光7側の空
隙角ε1の調整により行うことにより、第1の実施例の
プリズム3の場合よりも高効率が得られる。このプリズ
ム9の場合でも、第一の実施例と同じ様に、固定前後で
空隙間隔および空隙角度ε1の変化はほとんどみられな
かった。従って光結合効率の変動もほとんどみられなか
った。
FIG. 3 is a side view showing a second embodiment of the invention. In FIG. 3, the bottom surface of the prism 9 is a pure color,
In the experiment, a pure color twill wire 10 of 85° was pressed against the optical waveguide 2, and the incident light 6 was focused and applied to this part. In the case of this prism 9, by adjusting the optical coupling efficiency by adjusting the gap angle ε1 on the guided light 7 side, higher efficiency can be obtained than in the case of the prism 3 of the first embodiment. In the case of this prism 9 as well, as in the first example, there was almost no change in the gap distance and gap angle ε1 before and after fixing. Therefore, almost no variation in optical coupling efficiency was observed.

沫だ、固定方法の別の手段として、はんだ付による方法
およびレーザ溶接による方法も試みた。
As other fixing methods, we also tried soldering and laser welding.

はんだ付による方法では、固定台として銅ブロックを用
い、Inを固定台およびGa Pプリズムの固定面に蒸
着し、プリズムはあらかじめ温度を上げて合金処理を行
った。そして、第1図におけるように、プリズム位置調
整後、固定台4と基板1との固定部5bをポリエステル
系樹脂で固定し、その後プリズム3と固定台4との固定
部5aに熱線を当てて、Inハンダ溶かしてはんだ付を
行った。はんだ付に伴う位置ずれはほとんど見られなか
った。
In the soldering method, a copper block was used as a fixing base, In was vapor-deposited on the fixing base and the fixing surface of the GaP prism, and the prism was preheated and alloyed. Then, as shown in FIG. 1, after adjusting the prism position, the fixing part 5b between the fixing base 4 and the substrate 1 is fixed with polyester resin, and then a hot wire is applied to the fixing part 5a between the prism 3 and the fixing base 4. , In solder was melted and soldered. Almost no positional displacement due to soldering was observed.

また、プリズム、固定台、基板などに、あらかじめクロ
ム、金などの付着力の強い金属薄膜を表面に真空蒸着あ
るいはスパッタ蒸着により形成し、これにはんだメッキ
をしてはんだ付することにより容易にはんだ付ができ、
従って使用できる被接合材の材質の種類が増える。
In addition, it is possible to easily solder by forming a highly adhesive thin metal film such as chromium or gold on the surface of the prism, fixed stand, substrate, etc. by vacuum deposition or sputter deposition, and then applying solder plating to this. can be attached,
Therefore, the number of types of materials that can be used for joining increases.

レーザ溶接では、固定台材料にガラスまたは金属を用い
、プリズム位置調整後、固定台を基板とプリズムに接触
させて置き、基板との固定部5bにレーザ光を集光させ
て溶接をした後、プリズムと固定台の固定部5aにレー
ザ光を集光させて溶接を行った。光源にはQスイッチY
AGレーザを用いた。固定に伴うプリズム空隙の変動は
ほとんどみられず、結合効率の変化も0.5dB以下で
あった。レーザ溶接の場合、はんだ付の場合と異なり、
やり直しがきかないが最も堅固な固定が可能であり、外
力や振動に対し最も安定した結合が得られる。
In laser welding, glass or metal is used as the fixing base material, and after adjusting the prism position, the fixing base is placed in contact with the substrate and the prism, and the laser beam is focused on the fixing part 5b with the substrate to perform welding. Welding was performed by focusing a laser beam on the prism and the fixing part 5a of the fixing table. Q switch Y for light source
An AG laser was used. There was almost no change in the prism gap due to fixation, and the change in coupling efficiency was less than 0.5 dB. In the case of laser welding, unlike in the case of soldering,
Although it cannot be repaired, it is the most solid fixation possible, and provides the most stable connection against external forces and vibrations.

また、プリズム底面と光導波路間の空隙に外部からのご
みが侵入することがあり、しみ出している導波光の散乱
を誘起し、光結合効率の低下をきたす。これを防止する
ために、空隙にあらかじめ透明なエポキシ樹脂や紫外線
硬化樹脂を充填し固定を行った後、樹脂を硬化させた。
In addition, dust from the outside may enter the gap between the prism bottom surface and the optical waveguide, causing scattering of the guided wave light seeping out, resulting in a decrease in optical coupling efficiency. In order to prevent this, the gap was filled in advance with a transparent epoxy resin or ultraviolet curable resin, fixed, and then the resin was cured.

硬化に伴う収縮膨張によるプリズム空隙の変化は、固定
台によりあらかじめプリズムが固定されているのでほと
んど変化がみられず、また光導波路の散乱が少なくなり
損失がわずかに減少した。また硬化に伴う屈折率変化も
わずかであり、光の結合効率の変化を0.5dB以下に
抑えることができた。また、樹脂のかわりに、空隙に透
明なグリスを充填して同様の実験を行ったところ、安定
な結合が得られ、固定に伴う結合効率の変化はグリスを
充填しない場合とほぼ同等に微量であった。
Almost no changes were observed in the prism gap due to contraction and expansion due to curing, as the prism was fixed in advance using a fixing table, and the scattering of the optical waveguide was reduced, resulting in a slight decrease in loss. Furthermore, the refractive index change due to curing was slight, and the change in light coupling efficiency could be suppressed to 0.5 dB or less. In addition, when we conducted a similar experiment by filling the void with transparent grease instead of resin, a stable bond was obtained, and the change in bonding efficiency due to fixation was almost the same as when no grease was filled. there were.

さらに、固定台の材料に、プリズムと線膨張率が等しい
材料を用いて実験を行った。具体的には、プリズムと同
じ材質のGa Pを用いて固定台を形成して固定したと
ころ、温度変化に対して極めて安定な光結合効率特性が
得られることを確認した。
Furthermore, we conducted experiments using a material with the same coefficient of linear expansion as the prism for the material of the fixing table. Specifically, when a fixing base was formed and fixed using GaP, which is the same material as the prism, it was confirmed that extremely stable optical coupling efficiency characteristics against temperature changes could be obtained.

なお、本実施例の説明において、入力部について説明し
たが、光路の方向が逆の場合、すなわち出力部について
も同様な効果が得られるのは自明である。
In the description of this embodiment, the input section has been described, but it is obvious that the same effect can be obtained when the direction of the optical path is reversed, that is, for the output section.

また、光導波路にPLZT系薄暎光導波路について説明
したが、これはもちろん他の光導波路、たとえばTi拡
散や、プロトン交換のL i NbO3光導波路や、Y
IG薄膜光導波路、ガラス光導波路などの光導波路やG
a P以外のプリズム材料にっていても同様な効果があ
るのは自明である。
In addition, although the PLZT-based thin optical waveguide has been explained, it is of course possible to use other optical waveguides such as Ti diffusion, proton exchange LiNbO3 optical waveguide, and Y
Optical waveguides such as IG thin film optical waveguides and glass optical waveguides,
It is obvious that the same effect can be obtained using prism materials other than aP.

また、固定台の材質にガラスや銅、Ga Pなどをとり
あげて説明したが、他の材質に関しても、同様な効果が
青られるのは自明である。また、はんだ材料やはんだ材
用金属薄膜の材料もその効果が得られるものであれば、
本発明の実施例に記載されたものに限定されることがな
いのは自明のことである。
Further, although glass, copper, GaP, and the like are used as the material of the fixing base, it is obvious that similar effects can be obtained with other materials. In addition, if the solder material or the material of the metal thin film for solder material can achieve the same effect,
It is obvious that the present invention is not limited to what is described in the examples.

発明の効果 本発明の構成によると、固定台を介して基板とプリズム
を固定することにより固定部分の応力方向を光結合と無
関係な方向へ転換するため、固定にともなう光結合効率
の低下を防ぐことが可能である。従って、従来、プリズ
ム固定の際に大きく劣化していた光結合効率を容易に高
くすることができる。また、固定台の剛性が強いため、
外力や振動に対しても安定な光結合が得られる。さらに
、プリズム材料と線膨張係数の似通った材料を固定台に
使用することにより、温度変化によるプリズム空隙の変
化がほとんどみられず、従って極めて安定な光結合の温
度特性が得られる。
Effects of the Invention According to the configuration of the present invention, by fixing the substrate and the prism via the fixing base, the stress direction of the fixed part is changed to a direction unrelated to optical coupling, thereby preventing a decrease in optical coupling efficiency due to fixing. Is possible. Therefore, it is possible to easily increase the optical coupling efficiency, which conventionally deteriorated significantly when fixing the prism. In addition, the rigidity of the fixed base is strong, so
Stable optical coupling can be obtained even against external forces and vibrations. Furthermore, by using a material with a coefficient of linear expansion similar to that of the prism material for the fixing base, there is almost no change in the prism gap due to temperature changes, and therefore extremely stable temperature characteristics of optical coupling can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図および第2図は本発明の光結合装置の第1の実施
例を示す側面図および正面図、第3図は同装置の第2の
実施例を示す側面図、第4図および第5図は従来の&[
の技術例を示す側面図および正面図である。 ト・・基板、2・・・光導波路、3.9・・・プリズム
、4・・・固定台、5a、5b・・・固定部、6・・・
入射光、7・・・導波光、8・・・空隙、10・・・稜
線代理人   森  本  義  弘 一〜勺陣遭Nト 第2図 β−V際 第3図 第4図 第5図
1 and 2 are a side view and a front view showing a first embodiment of the optical coupling device of the present invention, FIG. 3 is a side view showing a second embodiment of the same device, and FIGS. Figure 5 shows the conventional &[
FIG. 2 is a side view and a front view showing a technical example of the invention. G... Substrate, 2... Optical waveguide, 3.9... Prism, 4... Fixing base, 5a, 5b... Fixing part, 6...
Incident light, 7... Guided light, 8... Gap, 10... Ridge agent Yoshihiroichi Morimoto ~ Kokujin encounter Figure 2 β-V cross Figure 3 Figure 4 Figure 5

Claims (1)

【特許請求の範囲】 1、基板上に設けられた光導波路と外部との光結合を、
前記光導波路に押し当てられたプリズムにより行なう光
結合装置において、前記プリズムを固定台を介して基板
上に固定することを特徴とする光結合装置。 2、固定台とプリズムおよび固定台と基板の各固定に、
ポリエステル系樹脂よりなる接着剤を使用したことを特
徴とする特許請求の範囲第1項記載の光結合装置。 3、固定台とプリズムおよび固定台と基板の各固定に、
はんだ付を用いたことを特徴とする特許請求の範囲第1
項記載の光結合装置。 4、固定台とプリズムおよび固定台と基板とをそれぞれ
はんだ付により固定する際に、金属薄膜を介在させるこ
とを特徴とする特許請求の範囲第3項記載の光結合装置
。 5、固定台とプリズムおよび固定台と基板との各固定を
、レーザ溶接により行なうことを特徴とする特許請求の
範囲第1項記載の光結合装置。 6、プリズム底面と基板との空隙を透明な樹脂で充填し
たことを特徴とする特許請求の範囲第1項記載の光結合
装置。 7、プリズム底面と基板との空隙を透明なグリスで充填
したことを特徴とする特許請求の範囲第1項記載の光結
合装置。 8、固定台の材料として、プリズムとほぼ等しい線膨張
率を有する材ものを用いることを特徴とする特許請求の
範囲第1項記載の光結合装置。
[Claims] 1. Optical coupling between the optical waveguide provided on the substrate and the outside,
An optical coupling device that performs optical coupling using a prism pressed against the optical waveguide, characterized in that the prism is fixed onto a substrate via a fixing table. 2. For fixing the fixed base and the prism, and the fixed base and the board,
The optical coupling device according to claim 1, characterized in that an adhesive made of polyester resin is used. 3. For fixing the fixed base and the prism, and the fixed base and the board,
Claim 1 characterized in that soldering is used.
Optical coupling device as described in section. 4. The optical coupling device according to claim 3, wherein a metal thin film is interposed when the fixing base and the prism and the fixing base and the substrate are fixed by soldering, respectively. 5. The optical coupling device according to claim 1, wherein the fixing base and the prism and the fixing base and the substrate are each fixed by laser welding. 6. The optical coupling device according to claim 1, wherein the gap between the bottom surface of the prism and the substrate is filled with a transparent resin. 7. The optical coupling device according to claim 1, wherein the gap between the bottom surface of the prism and the substrate is filled with transparent grease. 8. The optical coupling device according to claim 1, wherein a material having a coefficient of linear expansion approximately equal to that of the prism is used as the material of the fixing base.
JP61047834A 1986-03-05 1986-03-05 Optical coupling device Expired - Fee Related JP2579906B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61047834A JP2579906B2 (en) 1986-03-05 1986-03-05 Optical coupling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61047834A JP2579906B2 (en) 1986-03-05 1986-03-05 Optical coupling device

Publications (2)

Publication Number Publication Date
JPS62204213A true JPS62204213A (en) 1987-09-08
JP2579906B2 JP2579906B2 (en) 1997-02-12

Family

ID=12786385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61047834A Expired - Fee Related JP2579906B2 (en) 1986-03-05 1986-03-05 Optical coupling device

Country Status (1)

Country Link
JP (1) JP2579906B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4932743A (en) * 1988-04-18 1990-06-12 Ricoh Company, Ltd. Optical waveguide device
JP2004029568A (en) * 2002-06-27 2004-01-29 Kyocera Corp Optical device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59147307A (en) * 1983-02-10 1984-08-23 Matsushita Electric Ind Co Ltd Prism coupler

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59147307A (en) * 1983-02-10 1984-08-23 Matsushita Electric Ind Co Ltd Prism coupler

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4932743A (en) * 1988-04-18 1990-06-12 Ricoh Company, Ltd. Optical waveguide device
JP2004029568A (en) * 2002-06-27 2004-01-29 Kyocera Corp Optical device

Also Published As

Publication number Publication date
JP2579906B2 (en) 1997-02-12

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