JPS62203272U - - Google Patents
Info
- Publication number
- JPS62203272U JPS62203272U JP8938286U JP8938286U JPS62203272U JP S62203272 U JPS62203272 U JP S62203272U JP 8938286 U JP8938286 U JP 8938286U JP 8938286 U JP8938286 U JP 8938286U JP S62203272 U JPS62203272 U JP S62203272U
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- susceptor
- wafer
- epitaxial growth
- gravity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005484 gravity Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 239000012495 reaction gas Substances 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8938286U JPS62203272U (no) | 1986-06-13 | 1986-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8938286U JPS62203272U (no) | 1986-06-13 | 1986-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62203272U true JPS62203272U (no) | 1987-12-25 |
Family
ID=30948324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8938286U Pending JPS62203272U (no) | 1986-06-13 | 1986-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62203272U (no) |
-
1986
- 1986-06-13 JP JP8938286U patent/JPS62203272U/ja active Pending