JPS62203266U - - Google Patents
Info
- Publication number
- JPS62203266U JPS62203266U JP9265586U JP9265586U JPS62203266U JP S62203266 U JPS62203266 U JP S62203266U JP 9265586 U JP9265586 U JP 9265586U JP 9265586 U JP9265586 U JP 9265586U JP S62203266 U JPS62203266 U JP S62203266U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- tray
- thin film
- sputtering
- thermocouple
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 238000009529 body temperature measurement Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9265586U JPS62203266U (cg-RX-API-DMAC7.html) | 1986-06-17 | 1986-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9265586U JPS62203266U (cg-RX-API-DMAC7.html) | 1986-06-17 | 1986-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62203266U true JPS62203266U (cg-RX-API-DMAC7.html) | 1987-12-25 |
Family
ID=30954551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9265586U Pending JPS62203266U (cg-RX-API-DMAC7.html) | 1986-06-17 | 1986-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62203266U (cg-RX-API-DMAC7.html) |
-
1986
- 1986-06-17 JP JP9265586U patent/JPS62203266U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0819898A3 (en) | Temperature-controlled appliance | |
| JPS62203266U (cg-RX-API-DMAC7.html) | ||
| JPS62203267U (cg-RX-API-DMAC7.html) | ||
| JPS62122863U (cg-RX-API-DMAC7.html) | ||
| JPS58197719A (ja) | 基板の加熱構造および加熱方法 | |
| JPH0291340U (cg-RX-API-DMAC7.html) | ||
| JPH0460548U (cg-RX-API-DMAC7.html) | ||
| JPS59178329U (ja) | 搬送台 | |
| JPH0436231U (cg-RX-API-DMAC7.html) | ||
| JPS60172535U (ja) | 配膳車 | |
| JPH0373453U (cg-RX-API-DMAC7.html) | ||
| JPH0186229U (cg-RX-API-DMAC7.html) | ||
| JPS58176959U (ja) | Ｃｖｄ装置 | |
| JPS6453752U (cg-RX-API-DMAC7.html) | ||
| JPS63157054U (cg-RX-API-DMAC7.html) | ||
| JPS6426368U (cg-RX-API-DMAC7.html) | ||
| JPS62114056U (cg-RX-API-DMAC7.html) | ||
| JPS63115211U (cg-RX-API-DMAC7.html) | ||
| JPS6255341U (cg-RX-API-DMAC7.html) | ||
| JPS63190809U (cg-RX-API-DMAC7.html) | ||
| JPS63111433U (cg-RX-API-DMAC7.html) | ||
| JPS6373359U (cg-RX-API-DMAC7.html) | ||
| JPH0378062U (cg-RX-API-DMAC7.html) | ||
| LAFEMINA et al. | Radiative heat transfer and selective emission in planar slab coatings on hot emissive substrates(Final Report, Oct. 1985- Mar. 1987) | |
| JPS60180560U (ja) | 加温マツト |