JPS62202961U - - Google Patents
Info
- Publication number
- JPS62202961U JPS62202961U JP9266186U JP9266186U JPS62202961U JP S62202961 U JPS62202961 U JP S62202961U JP 9266186 U JP9266186 U JP 9266186U JP 9266186 U JP9266186 U JP 9266186U JP S62202961 U JPS62202961 U JP S62202961U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- probe card
- holding
- hand
- assembly jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- 229910052742 iron Inorganic materials 0.000 claims 1
- 238000009966 trimming Methods 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例の斜視図、第２図は
ハンド部の斜視図、第３図はハンド部の応用例を
示す斜視図である。
１……試料基板固定台、２……プローブカード
ホルダー、３……チヤツク、４……マグネツト、
５……プローブハンド、６……円環状プレート、
７……微調機構。
FIG. 1 is a perspective view of an embodiment of the present invention, FIG. 2 is a perspective view of a hand portion, and FIG. 3 is a perspective view showing an example of application of the hand portion. 1...Sample substrate fixing stand, 2...Probe card holder, 3...Chuck, 4...Magnet,
5... Probe hand, 6... Annular plate,
7...Fine adjustment mechanism.
Claims (1)
ローブを取り付ける際に用いるプローブを掴みこ
れを保持するプローブハンドとプローブカードを
支持固定するプローブカードホルダーと試料基板
固定台とを有するプローブ組立用治具において、
プローブカードホルダーは鉄製の円環状プレート
に取り付けられており、プローブハンドはプロー
ブを挾む機構とマグネツトとを備えていることを
特徴とするプローブ組立用治具。 A probe assembly jig comprising a probe hand for grasping and holding a probe used when attaching the probe to a probe card used for laser trimming, a probe card holder for supporting and fixing the probe card, and a sample substrate fixing stand,
A probe assembly jig characterized in that the probe card holder is attached to an annular plate made of iron, and the probe hand is equipped with a mechanism for holding the probe and a magnet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9266186U JPS62202961U (en) | 1986-06-17 | 1986-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9266186U JPS62202961U (en) | 1986-06-17 | 1986-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62202961U true JPS62202961U (en) | 1987-12-24 |
Family
ID=30954563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9266186U Pending JPS62202961U (en) | 1986-06-17 | 1986-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62202961U (en) |
-
1986
- 1986-06-17 JP JP9266186U patent/JPS62202961U/ja active Pending
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