JPH0267646U - - Google Patents
Info
- Publication number
- JPH0267646U JPH0267646U JP14543688U JP14543688U JPH0267646U JP H0267646 U JPH0267646 U JP H0267646U JP 14543688 U JP14543688 U JP 14543688U JP 14543688 U JP14543688 U JP 14543688U JP H0267646 U JPH0267646 U JP H0267646U
- Authority
- JP
- Japan
- Prior art keywords
- holding part
- end holding
- substrate
- clamp
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001552 radio frequency sputter deposition Methods 0.000 claims 1
Description
第１図は本考案の一実施例の断面図、第２図は
従来例の正面図と側面図、第３図は本考案の一実
施例の正面図と側面図である。
１…基板ホルダー、２…被成膜基板、３…下端
保持部、４…クランプ、５…固定クランプ、６…
着脱式クランプ、７…保持台、８…板バネ。
FIG. 1 is a sectional view of an embodiment of the present invention, FIG. 2 is a front view and a side view of a conventional example, and FIG. 3 is a front view and a side view of an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Substrate holder, 2... Substrate to be film-formed, 3... Lower end holding part, 4... Clamp, 5... Fixed clamp, 6...
Detachable clamp, 7... Holding stand, 8... Leaf spring.
Claims (1)
持する基板ホルダーにおいて、下端保持部は局部
的な固定クランプ、上端保持部はバネを有する着
脱式のクランプを設けたことを特徴とする基板ホ
ルダー。 A substrate holder for holding the upper and lower ends of a substrate to be film-formed in an RF sputtering device, characterized in that the lower end holding part is provided with a local fixing clamp, and the upper end holding part is provided with a removable clamp having a spring. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14543688U JPH0267646U (en) | 1988-11-09 | 1988-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14543688U JPH0267646U (en) | 1988-11-09 | 1988-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0267646U true JPH0267646U (en) | 1990-05-22 |
Family
ID=31414025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14543688U Pending JPH0267646U (en) | 1988-11-09 | 1988-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0267646U (en) |
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1988
- 1988-11-09 JP JP14543688U patent/JPH0267646U/ja active Pending