JPS62201950U - - Google Patents
Info
- Publication number
- JPS62201950U JPS62201950U JP1986090704U JP9070486U JPS62201950U JP S62201950 U JPS62201950 U JP S62201950U JP 1986090704 U JP1986090704 U JP 1986090704U JP 9070486 U JP9070486 U JP 9070486U JP S62201950 U JPS62201950 U JP S62201950U
- Authority
- JP
- Japan
- Prior art keywords
- recess
- insulating
- isolation region
- capacitive element
- filled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986090704U JPS62201950U (enExample) | 1986-06-13 | 1986-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986090704U JPS62201950U (enExample) | 1986-06-13 | 1986-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62201950U true JPS62201950U (enExample) | 1987-12-23 |
Family
ID=30950812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986090704U Pending JPS62201950U (enExample) | 1986-06-13 | 1986-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62201950U (enExample) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5730363A (en) * | 1980-07-03 | 1982-02-18 | Ibm | Memory cell |
| JPS60154622A (ja) * | 1984-01-25 | 1985-08-14 | Hitachi Ltd | 溝およびそのエッチング方法 |
| JPS60158652A (ja) * | 1984-01-27 | 1985-08-20 | Toshiba Corp | 半導体装置及びその製造方法 |
| JPS60224261A (ja) * | 1984-04-20 | 1985-11-08 | Nec Corp | 半導体記憶装置 |
-
1986
- 1986-06-13 JP JP1986090704U patent/JPS62201950U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5730363A (en) * | 1980-07-03 | 1982-02-18 | Ibm | Memory cell |
| JPS60154622A (ja) * | 1984-01-25 | 1985-08-14 | Hitachi Ltd | 溝およびそのエッチング方法 |
| JPS60158652A (ja) * | 1984-01-27 | 1985-08-20 | Toshiba Corp | 半導体装置及びその製造方法 |
| JPS60224261A (ja) * | 1984-04-20 | 1985-11-08 | Nec Corp | 半導体記憶装置 |