JPS62201950U - - Google Patents

Info

Publication number
JPS62201950U
JPS62201950U JP1986090704U JP9070486U JPS62201950U JP S62201950 U JPS62201950 U JP S62201950U JP 1986090704 U JP1986090704 U JP 1986090704U JP 9070486 U JP9070486 U JP 9070486U JP S62201950 U JPS62201950 U JP S62201950U
Authority
JP
Japan
Prior art keywords
recess
insulating
isolation region
capacitive element
filled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986090704U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986090704U priority Critical patent/JPS62201950U/ja
Publication of JPS62201950U publication Critical patent/JPS62201950U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Semiconductor Memories (AREA)
  • Element Separation (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP1986090704U 1986-06-13 1986-06-13 Pending JPS62201950U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986090704U JPS62201950U (enrdf_load_stackoverflow) 1986-06-13 1986-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986090704U JPS62201950U (enrdf_load_stackoverflow) 1986-06-13 1986-06-13

Publications (1)

Publication Number Publication Date
JPS62201950U true JPS62201950U (enrdf_load_stackoverflow) 1987-12-23

Family

ID=30950812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986090704U Pending JPS62201950U (enrdf_load_stackoverflow) 1986-06-13 1986-06-13

Country Status (1)

Country Link
JP (1) JPS62201950U (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730363A (en) * 1980-07-03 1982-02-18 Ibm Memory cell
JPS60154622A (ja) * 1984-01-25 1985-08-14 Hitachi Ltd 溝およびそのエッチング方法
JPS60158652A (ja) * 1984-01-27 1985-08-20 Toshiba Corp 半導体装置及びその製造方法
JPS60224261A (ja) * 1984-04-20 1985-11-08 Nec Corp 半導体記憶装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730363A (en) * 1980-07-03 1982-02-18 Ibm Memory cell
JPS60154622A (ja) * 1984-01-25 1985-08-14 Hitachi Ltd 溝およびそのエッチング方法
JPS60158652A (ja) * 1984-01-27 1985-08-20 Toshiba Corp 半導体装置及びその製造方法
JPS60224261A (ja) * 1984-04-20 1985-11-08 Nec Corp 半導体記憶装置

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