JPS62201720A - Separation and conveyance equipment for semiconductor device - Google Patents

Abstract

PURPOSE:To aim at high-speed stabilization for separation and conveyance of a semiconductor device, by installing two sets of separating and conveying rollers, and reducing the load imposed on a turning gear in a way of making the conveying roller so as to be rotated at higher speed than the separating roller. CONSTITUTION:Each semiconductor device 1 being conveyed in succession is separated in an A direction by separating rollers 4a and 4b continuously rotating in an arrow direction by a turning gear on a guide rail 2. And afterward, coming nearer to a stroke, conveying rollers 5a and 5b speedier in peripheral speed than that of these separating rollers 4a and 4b are continuously rotated at high speed in the arrow direction whereby the semiconductor device 1 further goes forward in a direction A and is intermittently delivered. Thus, separation and conveyance at high speed are made possible to be done, and load on the turning gear is reducible, while misregistration of the semiconductor device due to stopping accuracy of the turning gear is eliminable.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application] The present invention relates to improvements in semiconductor device manufacturing equipment, device separation, and transportation equipment.

[Conventional technology]

Conventionally, there has been a device of this type as shown in FIG. In the figure, (1) is a semiconductor device, (2) is a rail that guides this semiconductor device, (13a) (8b)
) is a pair of rollers that separate and transport semiconductor devices.

Next, the operation will be explained in order. As shown in FIG. 8, the semiconductor device @ 11) moves on the guide rail (2) in the direction of arrow A, while the rollers (8a) and (8b) are rotated in the direction of arrow B by a rotating device (not shown). The semiconductor device (1) is transported in the incoming direction.

At this time, since the rotating device (not shown) performs short feed, the semiconductor device is transported and separated at the same time.

[Problem that the invention seeks to solve]

Since the conventional semiconductor device separation and conveyance apparatus is configured as described above, the load on the rotating device of the rollers (8 &) (8b) is heavy (which makes high-speed conveyance impossible and the rotating device stops). There have been problems such as the inability to stably separate semiconductor devices due to precision.

This invention was made to solve the above-mentioned problems, and by reducing the load on rotating equipment and stably and quickly separating and transporting semiconductor devices, it improves productivity and machine operation rate. The aim is to provide separation and conveyance equipment that greatly contributes to the

[Means for solving problems]

The separation and conveyance device according to the present invention is such that two sets of rollers, a separation roller and a conveyance roller, are installed in a semiconductor device conveyance line, and the conveyance roller is rotated at a higher speed than the separation roller.

[Effect]

゛ The separation and conveyance device according to the present invention continuously rotates the separation roller and the conveyance roller at different speeds.
Stable and high-speed separation and transport can be performed, the load on the rotating device can be reduced, and positional deviation of the semiconductor device due to the stopping precision of the rotating device can be eliminated.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

No. 1111B) (B), (1) is a semiconductor device;
(2) is the guide rail of the semiconductor device (1), (4a) (4
b) is a separation roller; (5a) and (5b) are conveyance rollers disposed close to the rear path of the separation roller; and (6) is an elastic body provided around each of the rollers.

Next, the operation will be explained. Semiconductor devices (1) that are continuously fed are separated in the A direction by separation rollers (4a) and (4b) that are continuously rotated in the direction of the arrow by a rotating device (not shown) on the guide rail AI+21.

Then, in the vicinity of the subsequent process, the above-mentioned 1ip-ra (4a)
(4b) The semiconductor device (
1) further advances in the advancing direction (N) and is sent out intermittently.

In the above embodiment, the separation roller (41L) (4k)
), the elastic bodies t61 of the conveyance rollers (5a) and (5b) are applied to the sides of the semiconductor device (1) to perform separation and conveyance, but as shown in FIG. Separation and transportation may be performed by applying the elastic body (6) to the upper and lower surfaces of the semiconductor device (1).

〔Effect of the invention〕

As described above, according to the present invention, two sets of rollers, a separation roller and a conveyance roller, are provided together, and the conveyance roller is continuously rotated at a higher speed than the separation roller.
f! It has excellent effects such as enabling quick separation and transportation, reducing the load on the rotating device, and eliminating positional deviation of the semiconductor device due to the stopping accuracy of the rotating device.

[Brief explanation of drawings]

Figure 1 shows an embodiment of the present invention.
Figures (o) and 2 are front views showing other embodiments of the present invention, and Figures 8 (a) and (b) are front views (a) and plan views (a) and (b) of conventional semiconductor device separation and transport equipment. b). In the figure, (11 is a semiconductor device, (2) is a guide rail, (4 is
a) and (4b) are separation rollers, (5a) and (5b) are conveyance rollers, and (6J is an elastic body). In addition, the same reference numerals in the figures indicate the same or corresponding parts.

Claims (2)

[Claims] (1) In a device that separates and transports semiconductor devices that are sent in a row on a guide rail without any gaps, a pair of separating rollers that are arranged on the left and right sides of the guide rail and rotate continuously, and a pair of separating rollers that rotate continuously. On the other hand, an apparatus for separating and transporting semiconductor devices is provided with a pair of left and right transport rollers that are disposed close to the direction of movement of the semiconductor devices and that are continuously rotated at a peripheral speed faster than the separation rollers. . (2) The device for separating and transporting semiconductor devices according to claim 1, wherein each of the separation roller and the transport roller has an elastic body around the separation roller and the transport roller.