JPS6220109A - Production of magnetic head - Google Patents

Abstract

PURPOSE:To improve durability by depositing a nonmagnetic material between a main magnetic pole and slider by a physical vapor deposition method and joining the magnetic pole and slider. CONSTITUTION:The factor to determine the characteristics of the head is required to secure the adhesion between the slider 22 and the slider 21 (main magnetic pole 23) and to prevent the deterioration of the magnetic characteristic of the main magnetic pole 23. The nonmagnetic material having the hardness approximately equal to the hardness of the materials forming the sliders 21, 22 is thereupon deposited in the form of atomic particles into the gap between the slider 22 and the slider 21 (the main magnetic pole 23) by using the physical vapor deposition method such as vapor deposition method or sputtering method; thereafter the surface of the sliders 21, 22 including the deposit and the pole 23 is polished to the intended shape and surface roughness and is finished to a sliding surface.

Description

[Detailed Description of the Invention] (Field of Application) The present invention relates to a method for manufacturing a magnetic head for perpendicular recording, and is particularly suitable for manufacturing a highly durable perpendicular magnetic head using a hard ceramic slider that is not easy to work with. The present invention relates to a method of manufacturing a magnetic head.

(Prior art) In recent years, with the improvement of magnetic recording density, a perpendicular magnetic recording method has been proposed in which the demagnetizing field of recording magnetization transition is small and the stability of magnetization increases as density recording becomes higher (Japanese Patent Laid-Open No. 52
-1347013. JP-A-53-3209, etc.). This recording method has the characteristic of being able to perform high-density magnetic recording, but its practical use requires a perpendicular recording medium with excellent durability and perpendicular magnetic anisotropy, and a perpendicular magnetic field with a strong magnetic field in the perpendicular direction to record and reproduce it. Requires head.

FIG. 1 shows an example of the configuration of a known magnetic head. The medium 10 includes a soft magnetic layer 12 having high magnetic permeability characteristics on a substrate 11.
This is a well-known perpendicular magnetic recording medium in which perpendicular magnetic layers 13 having perpendicular anisotropy are sequentially formed, and a protective layer is further formed as necessary. The magnetic head includes a main magnetic pole 31 made of a high magnetic permeability thin film layer with a film thickness Tm acting on the medium 10, sandwiched between sliders 32 and 33 made of non-magnetic material blocks, and a main magnetic pole part 30a whose surface is mirror-polished and the medium 10. It is formed of an auxiliary magnetic pole 34 made of a high magnetic permeability block and an auxiliary magnetic pole part 301 made of a recording/reproducing coil 35, which are arranged opposite to the main magnetic pole part 30a with the main magnetic pole part 30a in between. In the reproducing operation of this conventional magnetic head, the magnetic flux from the magnetization recorded in the perpendicular magnetic layer 13 forms a magnetic circuit 14 shown by a dotted line, and changes across the recording/reproducing coil 35, so that the magnetic flux changes due to the change in magnetic flux. The electric signal will be generated accordingly. In addition, the recording operation is performed by the magnetic circuit 14 by the current flowing through the recording/reproducing coil 35, contrary to the above.
The perpendicular magnetization layer 13 is magnetized.

The sliders 32 and 33 of the above-mentioned conventional magnetic head include a photoram, which is often used as a slider material for ring heads. Crystallized glass, barium titanate, etc. are used, but in this magnetic head, Go-Cr is used for the perpendicular magnetic layer 13.
When recording and reproducing a thin film type medium using a thin metal film such as an alloy film, there is a problem in that the medium or the head is damaged by a bus number of about several tens of gal, resulting in a lack of durability.

(Problem to be solved by the invention) By the way, after various studies, the above-mentioned durability problem can be solved by alumina titanium carbide (Al2O2-TtC).
It has been found that the problem can be solved by using a magnetic head with a slider made of hard ceramics such as those made of ceramics. However, when such hard ceramics are used as a slider, if ordinary glass fusion is used to bond the main pole and slider together, the bonded portion will wear off during polishing or over the course of use, impairing durability. It was discovered that

The object of the present invention is to provide a method for manufacturing a magnetic head that can stably manufacture a magnetic head that does not have the above-mentioned problems.

(Structure and operation of the invention) The above objects are achieved by the invention as follows.

That is, the present invention relates to the manufacture of a magnetic head in which a main pole made of a high magnetic permeability material is held between a slider made of a non-magnetic material that forms a sliding surface with a magnetic recording medium so that its tip faces the sliding surface. The method of manufacturing a magnetic head is characterized in that a non-magnetic material is deposited and bonded between the main pole and the slider by physical vapor deposition.

The present invention described above has the following advantages: the non-magnetic material is deposited even in the minute gap formed between the main pole and the slider by the physical vapor deposition method, and the two are sufficiently bonded; and even hard materials can be easily bonded by the physical vapor deposition method. Therefore, the slider surface to be joined to the main pole can be joined with a sufficiently hard material without precision machining, making it possible to stabilize a magnetic head whose slider is made of a hard material that is not easy to work with. It can be manufactured by

Note that, based on various studies, it is preferable that the non-magnetic material deposited for bonding has a hardness comparable to or greater than that of the non-magnetic material of the slider. If the hardness of the deposited non-magnetic material is much lower than the slider's hardness, specifically, if the Gockers hardness is several hundred Hv or more lower, only the deposited portion will be removed by the abrasive sliding and the head characteristics will deteriorate, which is undesirable. Therefore, the difference in hardness of the non-magnetic material deposited between the slider materials is several tens of tens of Vickers hardness.
Those within 0 are particularly preferably used.

In addition, from the above points, the present invention can be particularly advantageously applied when the slider is made of hard ceramics that are not easy to work with, but it also has the advantage that low-temperature bonding is possible and does not adversely affect the magnetic properties of the main pole. From this point of view, the present invention is expected to be effective when applied to sliders made of materials with good workability.

Furthermore, by forming a main magnetic pole in advance on the side surface of one slider by physical vapor deposition, abutting the other slider against the side surface, and depositing a non-magnetic material on the abutting portion by physical vapor deposition, the magnetic pole is bonded. The effect of stable manufacturing with good productivity can be obtained.

In the present invention, the physical vapor deposition method refers to a deposition method in which neutral or ionized particles are deposited by making them incident on a target location in a vacuum. Typical methods include vacuum evaporation and sputtering.

Examples include ion beam evaporation method.

The details of the present invention will be explained below with reference to the drawings.

FIG. 2(A) is a side sectional view showing the configuration of a magnetic head 20 in an embodiment of the present invention. The sliders 21 and 22 made of non-magnetic blocks include non-magnetic ferrite (Zn ferrite), forsterite, pho1-ceram, crystallized glass, barium titanium, potassium titanate, and AJ1203-Ti C.

Ceramics such as zirconia, hard carbon, etc. can be used, but the example shown in the figure is made of Aρ203-TiC. Main pole 2 close to perpendicular magnetization layer 13 of medium 10
3 is Permalloy, Sendust, FeN.

Co Zr, Co Zr Ta, Co Zr Nb
It is made of a high magnetic permeability thin film layer made of a CO-based amorphous alloy such as, etc., and is formed on the side surface of the slider 21 by a physical vapor deposition method such as evaporation or sputtering.Then, the desired pattern shape is formed by a chemical etching method using an ordinary photomask. is formed.

An example of the pattern shape of the main Fi1 pole 23 is shown in FIG. 2(B). Width TW+ of the tip surface portion close to the perpendicular magnetization layer 13
The magnetic circuit 24 is The resistance can be lowered and head characteristics are improved. An auxiliary magnetic pole 25 made of a high magnetic permeability block having a convex side cross section, such as ferrite, is formed in close contact with the rear end surface of the main pole 1i. The auxiliary magnetic pole 25 and the rear end surface of the main magnetic pole 23 are bonded together using a known glass fusing method, epoxy resin bonding method, or the like. The slider 21 is bonded to the surface of the auxiliary pole 25 facing the medium 10 so that the side surface of the slider 21 and the side surface of the tip end surface of the main magnetic pole 23 are in close contact with each other. Note that when ferrite is used for the auxiliary magnetic pole 25, bonding by glass fusing is preferable from the viewpoint of improving mechanical strength. coil 27
is formed in the notch portion of the auxiliary 1aff123. The coil 27 is formed by the slider 21, 22 and the auxiliary magnetic pole 25.
Alternatively, the slider 21, that is, the main magnetic pole 23 and the auxiliary magnet #A25 may be bonded together, the coil 27 is wound, and then the slider 22 is bonded.

The factors that determine the characteristics of the head shown in FIG. 2 (A>) include ensuring strong adhesion between the slider 22 and the slider 21 (main 1ff 123) and not deteriorating the magnetic characteristics of the main pole 23.

However, in the present invention, a physical vapor deposition method such as a vapor deposition method or a sputtering method is used to form the slider 22 and the slider 21 (the main magnetic pole 23 ) after being deposited in the void between
The surfaces of the sliders 21 and 22, including the deposits and the main magnetic pole 23, are polished to a desired shape and surface roughness to form a sliding surface.

Deposition into the above-mentioned voids was carried out using a sputtering apparatus shown in FIG. The sputtering device is a known RF two-pole sputtering device, and in the vacuum chamber 40, a head mounting portion S placed on a substrate holder 41 and a target T on a target holder 42 are arranged facing each other. During this period, a high frequency voltage is applied by a high frequency power supply 43, and an Ar gas 44 is applied.
Sputtering is performed while introducing the liquid through the introduction port 45. Note that the exhaust gas 46 is discharged from the outlet 47.

The head is attached to the section S by attaching the slider 21 as described above.
．． A head assembly assembled by bonding the slider 22 and the auxiliary magnetic pole is mounted so that the surfaces of the sliders 21 and 22 face the surface of the target T. The target T is made of a material having the same or similar hardness as the slider 21, 22. In this example, the material of the sliders 21 and 22 is Au2.
0z ・Since AlTiC made of TiC is used, the target T is the same AlTiC plate as the slider 21.22, a composite target with a TiC chip placed on the target of A cross 203, or A fl 20z,
Tic can be used alone, in this example Aρ203
is used.

Target T
The side surface 22a of the slider 22 on the side of the main magnetic pole 23 is slightly edged as shown in FIG. 4 in order to achieve uniform and dense sealing with atomic particles flying from the slider 22.

As a result of the above, the obtained magnetic head has the following various effects.

When processing a head using Altic, especially when conventional techniques such as glass fusion or epoxy resin are used to seal the tip of the head, polishing and sliding can create a step at the adhesive interface. It is not possible to eliminate the drawback that the spacing between the head and the medium increases, resulting in deterioration of recording and reproducing characteristics. Furthermore, since the main magnetic pole 23 is exposed to a high temperature atmosphere of 400° C. or higher during glass fusing, the magnetic properties of the main pole 23 deteriorate. For this reason, Co-Cr alloys in particular.

In combination with a recording medium consisting of a surface of a CO oxide layer,
A perpendicular magnetic head using an Altic slider, which has excellent wear resistance, was not realized.

According to the present invention, since the physical vapor deposition method is used, it is easy to maintain the temperature of the slider 21, 22 at 200° C. or less when sealing the air gap, and the magnetic properties of the main pole 23 are not deteriorated. . Moreover, the material for sealing the gap is the slider 21.
．． Since the same or similar composition to slider 22 can be used, the mechanical properties of the deposit during head processing such as sliding surface polishing are almost the same as sliders 21 and 22. Therefore,
Even during processing such as surface polishing, no step difference occurs in the deposited portion. Therefore, since the spacing between the medium and the head can be kept to a minimum, excellent recording and reproducing characteristics can be obtained.

Note that a soft magnetic thin film can be provided by physical vapor deposition on the surface of the slider 22 described in FIG. 2 on the side to which the auxiliary magnetic pole 25 is bonded. The side end of this soft magnetic thin film on the main magnetic pole side and the main magnetic pole 23
The distance to the side surface of the slider 22 is 1 to 50 μm, and the thickness of the main magnetic pole side of the slider 22 is 5 to 1000 μm, preferably 5 to 200 μm.
m, it is possible to improve the recording/reproducing characteristics, especially the reproduction waveform.

As described above, the present invention makes it possible to select the material composition for sealing the interface between the tip of the main pole and the slider, from conventional materials limited to glass or resin to any hard ceramic. It enables interface sealing under low-temperature conditions without causing deterioration of magnetic properties, and will make a major contribution to the practical application of perpendicular magnetic recording methods using perpendicular magnetic recording media made of thin metal magnetic films containing Go-Cr systems. It is something.

The present invention is not limited to the magnetic head of the embodiment aimed at high sensitivity, but also applies to a magnetic head in which the magnetic pole is held between sliders so as to face the sliding surface, for example, the conventional magnetic head shown in FIG. It is clear from the gist of the present invention that the present invention can be widely applied to the main pole portion of a magnetic head.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram of a conventional magnetic head, FIG. 2 (A) is a side view of the magnetic head of the embodiment, FIG. 2 (B) is an explanatory diagram of the main 1i pole shape, and FIG. An explanatory view of the sputtering apparatus used in the example, and FIG. 4 is an enlarged view of the tip of the main pole of the magnetic head of the example. 10: Medium 23, 31: Main magnetic pole 25. 34: Auxiliary magnetic pole 21, 22. 32. 33 Varnish slider 40: Vacuum tank 11\I (A) (8,) ? Figure 2 ``￥'4-/pu

Claims (1)

[Claims] 1. A magnetic device in which a main magnetic pole made of a high magnetic permeability material is held between a slider made of a non-magnetic material that forms a sliding surface with a magnetic recording medium so that its tip faces the sliding surface. 1. A method for manufacturing a magnetic head, comprising depositing and bonding a non-magnetic material between a main pole and a slider by physical vapor deposition. 2. The method of manufacturing a magnetic head according to claim 1, wherein the hardness of the non-magnetic material deposited between the main pole and the slider is approximately equal to the hardness of the slider. 3. A method of manufacturing a magnetic head according to claim 1 or 2, wherein the slider is made of hard ceramics. 4. The magnetic head according to claim 3, wherein the slider is made of alumina titanium carbide (Al_2O_3/TiC), and the nonmagnetic material deposited is alumina (Al_2O_2) or/and titanium carbide (TiC). Production method. 5. The main magnetic pole is formed on the side surface of a slider by physical vapor deposition, and the other slider is butted against the side surface of the slider, and a non-magnetic material is deposited between the sliders by physical vapor deposition to join them. A method for manufacturing a magnetic head according to item 2, 3, or 4.