JPS6219939Y2 - - Google Patents

Info

Publication number
JPS6219939Y2
JPS6219939Y2 JP1980103954U JP10395480U JPS6219939Y2 JP S6219939 Y2 JPS6219939 Y2 JP S6219939Y2 JP 1980103954 U JP1980103954 U JP 1980103954U JP 10395480 U JP10395480 U JP 10395480U JP S6219939 Y2 JPS6219939 Y2 JP S6219939Y2
Authority
JP
Japan
Prior art keywords
pressure
detection
purge gas
pipe
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980103954U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5728324U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980103954U priority Critical patent/JPS6219939Y2/ja
Publication of JPS5728324U publication Critical patent/JPS5728324U/ja
Application granted granted Critical
Publication of JPS6219939Y2 publication Critical patent/JPS6219939Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Measuring Fluid Pressure (AREA)
JP1980103954U 1980-07-24 1980-07-24 Expired JPS6219939Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980103954U JPS6219939Y2 (enExample) 1980-07-24 1980-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980103954U JPS6219939Y2 (enExample) 1980-07-24 1980-07-24

Publications (2)

Publication Number Publication Date
JPS5728324U JPS5728324U (enExample) 1982-02-15
JPS6219939Y2 true JPS6219939Y2 (enExample) 1987-05-21

Family

ID=29465339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980103954U Expired JPS6219939Y2 (enExample) 1980-07-24 1980-07-24

Country Status (1)

Country Link
JP (1) JPS6219939Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS516754A (en) * 1974-07-08 1976-01-20 Oval Eng Co Ltd Ryuryonaishiryusokukeino paajisochi

Also Published As

Publication number Publication date
JPS5728324U (enExample) 1982-02-15

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