JPS62198277U - - Google Patents
Info
- Publication number
- JPS62198277U JPS62198277U JP8734886U JP8734886U JPS62198277U JP S62198277 U JPS62198277 U JP S62198277U JP 8734886 U JP8734886 U JP 8734886U JP 8734886 U JP8734886 U JP 8734886U JP S62198277 U JPS62198277 U JP S62198277U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- activating
- microwave
- microwave plasma
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 230000003213 activating effect Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986087348U JPH043007Y2 (zh) | 1986-06-09 | 1986-06-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986087348U JPH043007Y2 (zh) | 1986-06-09 | 1986-06-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62198277U true JPS62198277U (zh) | 1987-12-17 |
| JPH043007Y2 JPH043007Y2 (zh) | 1992-01-31 |
Family
ID=30944471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986087348U Expired JPH043007Y2 (zh) | 1986-06-09 | 1986-06-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH043007Y2 (zh) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6054995A (ja) * | 1983-09-07 | 1985-03-29 | Natl Inst For Res In Inorg Mater | ダイヤモンドの合成法 |
| JPS6054996A (ja) * | 1983-09-07 | 1985-03-29 | Natl Inst For Res In Inorg Mater | ダイヤモンドの合成法 |
-
1986
- 1986-06-09 JP JP1986087348U patent/JPH043007Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6054995A (ja) * | 1983-09-07 | 1985-03-29 | Natl Inst For Res In Inorg Mater | ダイヤモンドの合成法 |
| JPS6054996A (ja) * | 1983-09-07 | 1985-03-29 | Natl Inst For Res In Inorg Mater | ダイヤモンドの合成法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH043007Y2 (zh) | 1992-01-31 |