JPH0355846U - - Google Patents
Info
- Publication number
- JPH0355846U JPH0355846U JP11785789U JP11785789U JPH0355846U JP H0355846 U JPH0355846 U JP H0355846U JP 11785789 U JP11785789 U JP 11785789U JP 11785789 U JP11785789 U JP 11785789U JP H0355846 U JPH0355846 U JP H0355846U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- electrode member
- displacing
- film
- wall surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11785789U JPH0355846U (zh) | 1989-10-05 | 1989-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11785789U JPH0355846U (zh) | 1989-10-05 | 1989-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0355846U true JPH0355846U (zh) | 1991-05-29 |
Family
ID=31666056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11785789U Pending JPH0355846U (zh) | 1989-10-05 | 1989-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0355846U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015045039A (ja) * | 2013-08-27 | 2015-03-12 | 株式会社ユーテック | プラズマｃｖｄ装置、成膜方法及びｄｌｃコーティング配管 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62167882A (ja) * | 1986-01-20 | 1987-07-24 | Nippon Kokan Kk <Nkk> | 移動電極式コ−テイング方法 |
-
1989
- 1989-10-05 JP JP11785789U patent/JPH0355846U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62167882A (ja) * | 1986-01-20 | 1987-07-24 | Nippon Kokan Kk <Nkk> | 移動電極式コ−テイング方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015045039A (ja) * | 2013-08-27 | 2015-03-12 | 株式会社ユーテック | プラズマｃｖｄ装置、成膜方法及びｄｌｃコーティング配管 |
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