JPS62197849U - - Google Patents

Info

Publication number
JPS62197849U
JPS62197849U JP1987074416U JP7441687U JPS62197849U JP S62197849 U JPS62197849 U JP S62197849U JP 1987074416 U JP1987074416 U JP 1987074416U JP 7441687 U JP7441687 U JP 7441687U JP S62197849 U JPS62197849 U JP S62197849U
Authority
JP
Japan
Prior art keywords
phase growth
gas
vapor phase
heating jig
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987074416U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987074416U priority Critical patent/JPS62197849U/ja
Publication of JPS62197849U publication Critical patent/JPS62197849U/ja
Pending legal-status Critical Current

Links

JP1987074416U 1987-05-20 1987-05-20 Pending JPS62197849U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987074416U JPS62197849U (enExample) 1987-05-20 1987-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987074416U JPS62197849U (enExample) 1987-05-20 1987-05-20

Publications (1)

Publication Number Publication Date
JPS62197849U true JPS62197849U (enExample) 1987-12-16

Family

ID=30919612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987074416U Pending JPS62197849U (enExample) 1987-05-20 1987-05-20

Country Status (1)

Country Link
JP (1) JPS62197849U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480071A (en) * 1977-12-09 1979-06-26 Hitachi Ltd Vapor growth method for semiconductor layer
JPS54144867A (en) * 1978-05-04 1979-11-12 Hitachi Ltd Gas phase growth method of semiconductor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480071A (en) * 1977-12-09 1979-06-26 Hitachi Ltd Vapor growth method for semiconductor layer
JPS54144867A (en) * 1978-05-04 1979-11-12 Hitachi Ltd Gas phase growth method of semiconductor

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