JPS62197847U - - Google Patents
Info
- Publication number
- JPS62197847U JPS62197847U JP8670686U JP8670686U JPS62197847U JP S62197847 U JPS62197847 U JP S62197847U JP 8670686 U JP8670686 U JP 8670686U JP 8670686 U JP8670686 U JP 8670686U JP S62197847 U JPS62197847 U JP S62197847U
- Authority
- JP
- Japan
- Prior art keywords
- generation chamber
- plasma generation
- plasma
- excitation coil
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 230000005284 excitation Effects 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000004308 accommodation Effects 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Non-Reversible Transmitting Devices (AREA)
Description
第１図は本案装置の縦断面図、第２図は同じく
模式的平面図、第３図は従来装置の縦断面図であ
る。 １……プラズマ生成室、２……導波管、３……
反応室、４……励磁コイル、４ａ……収容ケース
、４ｂ……通水室、４ｃ……円筒体、４ｄ……通
水室、４ｅ……フランジ部、４ｆ……絶縁板、４
ｇ……給水口、４ｈ……排水口。
模式的平面図、第３図は従来装置の縦断面図であ
る。 １……プラズマ生成室、２……導波管、３……
反応室、４……励磁コイル、４ａ……収容ケース
、４ｂ……通水室、４ｃ……円筒体、４ｄ……通
水室、４ｅ……フランジ部、４ｆ……絶縁板、４
ｇ……給水口、４ｈ……排水口。
Claims (1)
- プラズマ生成室及びこれに連結した導波管の端
部にわたつてその外周に励磁コイルを配設したプ
ラズマ装置において、前記励磁コイルの内周に沿
つて配設した水冷ジヤケツトをプラズマ生成室の
冷却に兼用すべくプラズマ生成室の周壁外面に接
触せしめて配設したことを特徴とするプラズマ装
置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8670686U JPS62197847U (ja) | 1986-06-06 | 1986-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8670686U JPS62197847U (ja) | 1986-06-06 | 1986-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197847U true JPS62197847U (ja) | 1987-12-16 |
Family
ID=30943261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8670686U Pending JPS62197847U (ja) | 1986-06-06 | 1986-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197847U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0227726U (ja) * | 1988-08-09 | 1990-02-22 |
-
1986
- 1986-06-06 JP JP8670686U patent/JPS62197847U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0227726U (ja) * | 1988-08-09 | 1990-02-22 |